Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

30 30 30 30 30 59 71 82 46 55 66 45 55 68 58 67 73 21 26 32 23.5 28 34.5 34.5 40 46.5 Up to 1000 Up to 1000 Up to 1000 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 10 14 14 16 16 16 4 5 5 12 15 15 M6 x 1 M8 x 1.25 M8 x 1.25 Up to 1000 Up to 1000 Up to 1000 39 42 52 208 228 254 436

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

solenoids applicable) ... ... 16 stations 16 Note 1) Includes the number of blanking plate assemblies.

Membrane Air Dryer

2 1/2 205 202 11 90 262 20 146 9 18 108 55 31 9 15 276 262 26 Series IDG1 I N SMC SMC SMC 2 SMC 202 60 Port size 1/8, 1/4 119 41.5 30 Dew point indicator (Option: S) 5.5 29 24 24 67 OUT IN 10 116 Drain Discharge 9 133.5 140 136 97 With float type auto-drain (N.C.) 3.2 5.5 Purge air for dehumidification 12

CG1

22 26 M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 24 29 M5 X 0.8 M5 X 0.8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 X 0.8 106 (114) 16 16 16 16 18 18 22 22 15 (16) Up to 200 201to350 23 30 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 5.5 M6 X 0.75 Up to 300 301to400

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Programless controller Step motor (servo 24 VDC)

(r) Forward speed switch 16 forward speeds are available. *1) (k) SPEED (l) Reverse speed switch 16 reverse speeds are available. *1) Forward acceleration switch (q) (m) 16 forward acceleration steps are available. *1) ACCEL Reverse acceleration switch (n) 16 reverse acceleration steps are available. *1) (p) Power supply connector (o) P1 (o) CN1 Connect the power supply cable.

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

CLK1

Hs (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Hs Bore size 40 56 54 16 44 77 10 47 14 55 M12 x 1.5 86 112.5 5 39 27.5 114 228 46 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 50 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 56 Unclamp side lock (F) 3-Rc 1/4 Unclamp side port 3-Rc 1/4 Clamp side port Rear cushion valve Top width across

Hygienic Design Cylinder Series HY

Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 1/2 Bore size (mm) 20 25 32 40 50 63 80 100 K KA NA NB R S ZZ C M TF G 1/8 G 1/8 G 1/4 G 1/4 G 3/8 G 1/2 TN NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 3/8 NPT 1/2 81 81 83 95 107 107 131 131 5 5 6 6.5 8 8 9.5 11.5 6 8 10 13 16 16 22 27 30 30 35.5 44 55 69 80 100 24 29 35.5 44 55 69 80 100 33 33 69 69 71 78 90 90 108 108 D-X Individual -X Technical data 857

Sine Cylinder Series REC

8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181 23 10 27 264 1031 Series REC Dimensions

Sine Cylinder Series REC

8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181 23 10 27 264 1031 Series REC Dimensions

Sine Cylinder Series REC

8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181 23 10 27 264 1031 Series REC Dimensions

Clamp Cylinder with Lock Series CLK1

Hs (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Hs Bore size 40 56 54 16 44 77 10 47 14 55 M12 x 1.5 86 112.5 5 39 27.5 114 228 46 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 50 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 56 Unclamp side lock (F) 3-Rc 1/4 Unclamp side port 3-Rc 1/4 Clamp side port Rear cushion valve Top width across

One-touch Fittings

Series/ Spare Parts P.48 Inch P.29 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V V How to Order P.50 Variations P.51 Dimensions P.52 Made to Order/Clean Series/ Spare Parts P.55 Inch P.49 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V Face Seal Connection thread Applicable tubing G R Rc NPT R How to Order P.58 Variations P.59 Dimensions P.60 Spare Parts P.63 Metric P.57 2 3.2 4 6 8 10 12 16 V V How

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

68 58 67 73 21 26 32 23.5 28 34.5 46 55 66 59 71 82 34.5 40 46.5 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 Up to 1000 Up to 1000 Up to 1000 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 16 16 16 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 10 14 14 208 228 254 39 42 52 8-25-17 17 Series MGZ With Mounting Bracket Transaxial

VQZ1000/2000/3000

port F G M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) Note 1) 3(R2), 5(R1) port of VQZ2000 is only G 1/16.

F

21 15 16 5.6 5.6 16 5/32 1/16 KQH03-33S 11.11 22 18 16 3 7 6 M5x0.8 KQH06-M5 11.8 24 20.5 17 4 4 9 5/32 1/8 KQH03-34S 11.11 22 18 16 3 9 6 1/8 KQH06-01S 12 22.5 18.5 17 13.1 13.1 10 5/32 1/4 KQH03-35S 14.29 21 15 16 3 16 6 1/4 KQH06-02S 14 23 17 17 13.1 13.1 15 3/16 1/8 KQH05-34S 12.7 22 18 16 3.5 11 6 3/8 KQH06-03S 17 23 16.5 17 13.1 13.1 27 3/16 1/4 KQH05-35S 14.29 21 15 16 3.5 12 8 1/8

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Pitch) VT L1 4 L2 VT VP VG Manual override (Non-locking) VP 48.5 [55] 36.1 29.5 VQ 20 VQZ [ ] for AC VZ L plug connector (L) M plug connector (M) VS 12 12 8.5 8.5 17.5 1 1.5 17.5 11.5 P R 53.2 [54.5] P R 36 36 49.2 62.8 (Lead wire length) 4-Rc(PT)1/8 4-Rc(PT)1/8 48.5 [55] 300 (P/R port) (P/R port) 300 59.6 [66.1] (Lead wire length) 36.1 48.5 [55] [ ] for AC Other dimensions are the same

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

4" 1/8" 3/8" 3/8" 1/4" 1/4" 1/4" 1/2" 1/2" 3/8" 1/4" 3/8" 1/4" 3/8" 3/4" 3/4" 3/4" 1/2" 3/8" 1/2" 1/2" 3/8" 1/4" 1/4" 1" 1" 1" 1" 3/4" 1/2" 3/4" 3/4" 1/2" 3/8" 1/4" 1/4" 16 9 17 10 33.5 29.5 9 16 16 9 19.5 16 19.5 19.5 16 34.5 30.5 29.5 33.5 37 32.5 44.5 37 44.5 45.5 38 10 17 17 10 22.5 17 22.5 22.5 17 30.5 34.5 38 33.5 47.5 38 47.5 48.5 39 16 11 11 16 16 11 21 16 21 21 16 20 14 14 20 20

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fl {rrrn 1m) o o t: 0 16" :Il o Co 10{) 25g004 33 IY-12 5 32:::5; 79.5 69.5 04 x40 1-12A 125 54 46 M30 x 1.5 27 125 4 8 25:t m 28 ~g[84 39 IY-14 5 1-14A 48 M30x1.S 30 140 .78.5 4 140 8 54 105 36 ::8: 1 8M ~4:x4Q 28 :Z~L 32 _ g' 39 IY-16 5 M36x1.5 94.5 94.5 04 x40 1-16A 160 8 60 55 110 40 :3:1 34 160 4 32 :::li1: ~ Spilt pin IS Included -