5

64 20 40 10 101 11.5 15 86 105 59 130 17 58 11 80 40 37 102 32 78 25 52 14 119 13.5 18 102 130 76 160 21 71 13 100 40 37 116 41 92 30 52 14 133 13.5 18 116 150 92 180 21 72 16 Bore size (mm) J K KA MM N P S ZZ 40 M8 x 1.25 6 14 M14 x 1.5 27 1/4 84 147 50 M8 x 1.25 7 18 M18 x 1.5 30 3/8 90 160 63 M10 x 1.25 7 18 M18 x 1.5 31 3/8 98 171 80 M12 x 1.75 10 22 M22 x 1.5 37 1/2 116 205 100 M12

NCG/CG1

Bore size (mm) Standard stroke range (mm) Long stroke range (mm) AL H1 H GA F E B1 D J C I KA A K 15.5 19.5 19.5 27 32 32 37 37 35 40 40 50 58 58 71 71 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 26 31 38 47 58 72 89 110 6 8 10 14 18 18 22 26 18 22 22 30 35 35 40 40 13 17 17 19 27 27 32 41 5 6 6 8 11 11 13 16 M4 x 0.7 depth

Air Slide Table

40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type

Made to Order

16 10 26 M26 x 1.5 14 192 41 50 47 36 90 18 16 31 M30 x 1.5 15 208 46 CA2 series Width across flats KA Width across flats B1 Bore size (mm) W A AL B1 D H H1 K KA MM W ZZ D 40 50 63 80 100 35 32 20 58 11 7 18 M18 x 1.5 9 153 27 H1 MM 40 37 25 71 13 11 22 M22 x 1.5 9 172 32 AL 40 37 25 71 13 11 22 M22 x 1.5 9 183 32 K A 40 37 30 72 16 11 26 M26 x 1.5 0 205 41 H ZZ + Stroke 50 47 36 85 18 15

Air Cylinder Series CA2

M8 x 1.25 7 18 M18 x 1.5 30 3/8 63 0.032 0.059 18 98 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 M18 x 1.5 31 3/8 80 0.040 0.073 25 116 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 M22 x 1.5 37 1/2 100 0.040 0.073 25 126 40 37 116 41 92 30 52 14 21 16 M12 x 1.75 10 26 M26 x 1.5 40 1/2 Bore size (mm) TT TX TY TZ H Z ZZ 22 85 62 117 51 93 140 40 50 22 95 74 127 58 103 154 63 28 110 90

CA2

up to 750 up to 750 B B1 C A AL D E F G H H1 K KA J LD LH LT LX LY MM N P X 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 6 7 7 10 10 14 18 18 22 26 9 9 11.5 13.5 13.5 40 45 50 65 75 3.2 3.2 3.2 4.5 6 42 50 59 76 92 70 80 93 116 133 M14 x 1.5 27 30 31 37 40 1/4

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Standard stroke range (mm) Long stroke range (mm) A H H1 I J K KA MM NA P TA ZZ AL B1 C D E S TB F GA GB 24 20 25 32 40 50 63 80 100 15.5 19.5 19.5 27 32 32 37 37 8 10 12 16 20 20 25 30 26 31 38 47 58 72 89 110 6 8 10 14 18 18 22 26 14 16.5 20 26 32 38 50 60 5 6 6 8 11 11 13 16 5 5.5 5.5 6 7 7 10 10 18 22 22 30 35 35 40 40 13 17 17 19 27 27 32 41 10(12) 35 40 40 50 58 58 71

Electric Actuators

T-slot 1 dimensions (Switch groove) 11.5 27 40 80 Stroke + 145 45 9.4 4.5 10 18 The body mounting reference plane should be used as a standard when mounting onto equipment.

Table of Contents

32, 40, 50, 63, 80 and 100.) 8-21-18 18 Guide Cylinder Series MGG Construction 20 to 50/MGG #8 !

JIS Standard Hydraulic Cylinder

M18 x 1.5 25 to 1800 135 102 19 42 22 18 44 44 3/4 75 192 20 3 156 40 53 145 40 225 19 15 100 80 Rod series Tolerance (mm) B-series rod C-series rod Bore size (mm) Bore size (mm) TDe9 TX E E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 55 207 0 0.3 0.040 0.092 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 60 212 18 M16 x 1.5 25 22 7 14 55 207 0.025

ZP

5 3 x 4 4 x 8 3 x 6.5 4 x 9.5 18 34 40 Dimensions Dimensions Dimensions Model A 40 50 ZP40H ZP50H B 42 52 C 32 42 Model A 63 80 ZP63H ZP80H B 65 82 C 50 61 D 14.5 16.5 Y 3.5 4.5 Model A 100 125 ZP100H ZP125H B 103 128 C 80 104 ZP HB 40 50 ZP HB ZP HB 63 80 100 125 F F F 4 x 9.5 4 x 8 3 x 6.5 4 x 6 4 x 5 3 x 4 6 G E E Y E 3.5 Y Y 10 6 8 40 18 34 C C C A A A B B B D D D Dimensions Model ZP63HB

Table of Contents

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Table of Contents

SB, counterbore depth SC P .C.D.R (Mounting hole) Auto switch mounting groove positions (4 locations) MHS3-100D MHS3-125D 10 10 10 10 40 40 40 40 5 6.4 5 10 6.4 13 90 12 5 15 7 90 (mm) I G 63 84 FZ 10 12 FX 59 74 FY 54 68 CA 18 23.5 EC 28 30 EO 40 46 DC 66 82 DO 78 98 M 4 6 B 134 166 K 15 21 AC 6 8 J 38 52 AA 96 122 AB 90 114 NA 34 40 L +0.036 0 +0.036 0 NB Model MHS3-100D MHS3-125D CB 30.6

CG1

87 102 102 122 122 12 12 12 13 14 14 20 20 11 11 11 12 13 13 35 40 40 50 58 58 71 71 11 11 11 12 13 13 18 22 22 30 35 35 40 40 12 14 18 25 30 32 40 50 15.5 19.5 19.5 27 32 32 37 37 2 2 2 2 2 2 3 3 8 10 12 16 20 20 25 30 13 17 13 19 27 27 32 41 14 16.5 20 26 32 38 50 60 6 8 10 14 18 18 22 26 M5 Depth 7.5 M10 X 1.25 M5 Depth 8 M10 X 1.25 M14 X 1.5 M6 Depth 12 M8 Depth 16 M18 X 1.5 M10

AC Servo Motor Driver (Pulse input type/Positioning type ）

47.0 38 501.2 19 52.9 39 571.5 Middle High response response 20 59.6 40 642.7 Setting range: 1 to 40 PA10 INP In-position range Set an in-position range per command pulse.

Table of Contents

T-slot 1 dimensions (Switch groove) 11.5 27 40 80 Stroke + 145 45 9.4 4.5 10 18 The body mounting reference plane should be used as a standard when mounting onto equipment.

CL

140 6 7 7 11 11 44 52 64 78 92 14 18 18 22 26 30 35 35 40 40 16 20 20 25 30 71 80 99 117 131 32 40 40 52 52 27 32 32 37 37 10 10 10 14 14 15 17 17 21 21 85 95 102 113 124 60 70 86 102 116 26 27 26 30 31 54 59 67 72 76 10 13 18 23 25 10 12 15 17 19 M10 X 1.25 M12 X 1.75 M12 X 1.75 W/o out rod boot (Both sides) W/ rod boot (One side) Bore (mm) 40 50 63 80 100 MM N PH TDe8 TT TY TZ W PG PL TX

5-Port Solenoid Valve

or less 22 or less 18 or less 14 or less 18 or less 14 or less Metal seal SY33/4/5l1 18 or less 22 or less 18 or less 14 or less 18 or less 14 or less Rubber seal SY3A/B/Cl0 4-position dual 3-port valve 18 or less 22 or less 18 or less 15 or less 19 or less 15 or less With Residual Pressure Release Valve SY3000 Vacuum Release Valve with Restrictor Rubber seal SY51l0 2-position single 24

Combination Cylinder

25 30 36 36 40 40 50 55 65 80 90 90 90 32 40 40 52 52 6.5 6.0 6.0 8.0 8.0 43 43 43 15 17 17 21 21 16 16 15 17 17 21 21 16 16 11 11 11 11 11 16 16 14 18 18 22 26 31 31 36 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 22 27 27 32 41 59 67 73 77 85 14 14 14 8 11 11 13 16 M8 M8 M10 X 1.25 M12 M12 M14 X 1.5 M14 X 1.5 M16 X 1.5 6 7 7 11 11 15 15 17 9 9 40 45 50 65

Air Cylinder

ZZ 20 62 8 10 32 32 52 108 118 25 62 9 10 40 40 60 112 122 32 64 9 10 40 40 60 114 124 40 88 10 11 53 53 77 143.5 154 Symbol Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 30 36 18 68 81 93 106 131 156 181 25 32 36 18 72 85 97 110 135 160 185 32 32 36 18 72 85 97 110 135 160 185 40 41 46 20 77 90 102 115 140 165 190 Bore size With Rod Boot (mm) l Z ZZ JH