5

Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) YU-03 32, 40 17 11 15.8 14 M8 x 1.25 8 7 6 25 YB-03 32, 40 6.5 10 18 50 9 80 DYU-05 50, 63 17 13 19.8 18 M10 x 1.5 10 7 6 40 YB-05 50, 63 6.5 12 22 60 11 120 YU-08 80 22 20 24.8 23 M16 x 2 13 9 8 90 YB-08 80 8.5 16 28 75 14 230 -X YU-10 100 26 26 29.8 28 M20 x 2.5 14 11 10 160 YB-10 100 10.5 18 36 90 18 455 245 CQ2Y Series Auto Switch

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

EB:3/8 NPTF) O.08(:::2.!

Table of Contents

-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

Smooth Cylinder/Low Speed Cylinder

B J Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 CY 50, 63 YU-05 YA-05 YB-05 Material: Stainless steel CX CX 80 YU-08 YA-08 YB-08 (mm) 100 YU-10 YA-10 YB-10 Bore size (mm) B D E J M O Part no.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

06 FH440-08 FH440-10 FH440-12 FH640-03 FH640-04 FH640-06 FH640-08 FH640-10 FH640-12 3/8 3/8 10 10 FH441-04 FH441-06 FH441-08 FH441-10 FH441-12 FH441-16 FH441-20 FH441-24 FH641-04 FH641-06 FH641-08 FH641-10 FH641-12 FH641-16 15 (1/2B) 15 (1/2B) 1/2 1/2 20 20 20 (3/4B) 20 (3/4B) 3/4 3/4 50 50 Max. 21 MPa 25 (1B) 25 (1B) 1 1 80 80 Max. 7 MPa 32 (1 1/4B) 32 (1 1/4B) 1 1/4 1 1/4 120 120 40

SX

(R)-LM plug connector (M): SX7 40(R)-M02 03 Manual override (Press and turn for the locking type.)

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

0.4

P=17.5 1 2 3 4 5 6 7 8 n: Stations 53 Silencer cover Blanking plug (For One-touch fitting) L Dimensions 04 06 08 10 Applicable fittings size d 4 6 8 10 A A L D Model KQ2PKQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 16 18 20.5 22 32 35 39 43 6 8 10 12 It is inserted into an unused cylinder port and SUP/EXH ports.

Vacuum Pad

Bolt Bolt tightening torque ZP (40/50) H ZP (40/50) HB 0.7 to 0.9 Nm 40, 50 M3 x 8 ZP (63/80) H ZP (63/80) HB 0.9 to 1.1 Nm 63, 80 M4 x 8 100, 125 ZP (100/125) H ZP (100/125) HB 2.3 to 2.7 Nm M5 x 10 Assemble parts with recommended tightening torque.

Vacuum Pad

Bolt Bolt tightening torque ZP (40/50) H ZP (40/50) HB 0.7 to 0.9 Nm 40, 50 M3 x 8 ZP (63/80) H ZP (63/80) HB 0.9 to 1.1 Nm 63, 80 M4 x 8 100, 125 ZP (100/125) H ZP (100/125) HB 2.3 to 2.7 Nm M5 x 10 Assemble parts with recommended tightening torque.

Vacuum Pad

Bolt Bolt tightening torque ZP (40/50) H ZP (40/50) HB 0.7 to 0.9 Nm 40, 50 M3 x 8 ZP (63/80) H ZP (63/80) HB 0.9 to 1.1 Nm 63, 80 M4 x 8 100, 125 ZP (100/125) H ZP (100/125) HB 2.3 to 2.7 Nm M5 x 10 Assemble parts with recommended tightening torque.

Vacuum Pad

Bolt Bolt tightening torque ZP (40/50) H ZP (40/50) HB 0.7 to 0.9 Nm 40, 50 M3 x 8 ZP (63/80) H ZP (63/80) HB 0.9 to 1.1 Nm 63, 80 M4 x 8 100, 125 ZP (100/125) H ZP (100/125) HB 2.3 to 2.7 Nm M5 x 10 Assemble parts with recommended tightening torque.

Flow Control Equipment

2.5 to 6 6 to 20 20 to 40 40 to 63 63 to 100 AS13l1F AS13l1F AS23l1F AS33l1F AS43l1F / 1 8, / 1 4 / 1 4, / 3 8 / 1 2 Elbow (Metal Body) M5 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l1 AS22l1 AS22l1 AS32l1 AS42l1 / 1 8 4.1-7 / 1 4 / 3 8 / 1 2 In-line 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS1001F AS2001F AS2051F AS3001F AS4001F 4.1-9 Dual Speed Controller 6 to 20 20 to 32 20

Compact Manifold Regulator Series ARM5

Flow rate l/min (ANR) Flow rate l/min (ANR) ARM10F-08 ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa 0.35 0.7 0.30 0.6 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 200 150 250 300 0.00 0 50 100 150 200 Flow rate l/min (ANR

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

or less Exhaust center VFS2420 VFS2430 600 40 or less 0.42 Pressure center VFS2530 VFS2520 0.42 600 40 or less Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.

KR

Connection thread 17 15.2 1 4 KGU08-02 18.5 8 15.2 3 8 KGU08-03 2-applicable tubing 1 4 KGU10-02 40 28.4 30 40 65 61 62 65 19 18.5 3 8 KGU10-03 21 10 18.5 1 2 KGU10-04 22 1 4 KGU12-02 64.5 65.5 68.5 57.4 45.4 32 40 65 3 8 KGU12-03 20.9 22 20.9 12 22 1 2 KGU12-04 Note) D: Max. diameter Reference dimensions after R thread installation.

SQ1000/2000

08 Dual flow fitting SSQ1000-52AP. 39 P. 41 P. 42 P. 43 C8 N9 P R D side U side Silencer (for EXH port) Port plug VVQZ100-CP Individual SUP spacer SSQ1000-P-3EXH block plate SSQ1000-B-R P. 39 P. 41 P. 42 P. 43 C6 L6 P R D side SMC AN200 U side Built-in silencer (-S) Back pressure check valve (-B) SSQ1000-BP Special wiring specification (-K) Individual EXH spacer SSQ1000-R-3P. 40 P. 41 P.

SY

plug (16.5) 56 L type plug connector (L): SY5 40(R)-L-02 M type plug connector (M): SY5 40(R)-M-02 DIN terminal (D): 3 4 5 3 4 5 3 4 5 SY5 40(R)-D-02 Applicable cable O.D. 3.5 to 7 81.7 74.2 157.8 Max. 10 62.9 Pg.7 18 18 159.6 28 58.1 9.5 22 Grommet .

V

www.stevenengineering.com I 6.12 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H B U F F E R ZPT N P A D D I A M E T E R M O U N T I N G T H R E A D 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 Symbol Thread dia. 2~8 10~32 40~50 A8 M8X1 Male thread A10 M10X1 A14 M14X1 V A C U U M E N T R Y Symbol Port size 2~8 10~32 40~50

Magnetically Coupled Rodless Cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with