125

How to Order Sub-plate and Base Gasket Body size 22 42 VEX VEX VEX1 2 9 A VEX4 2A 1 A Port size Thread type Port size Thread type Symbol Port size A 1/8 B 1/4 Symbol Thread type Nil Rc F G N NPT T NPTF Symbol Port size A 1/4 B 3/8 C 1/2 Symbol Thread type Nil Rc F G N NPT T NPTF Sub-plate Base gasket VEX1 11 2 VEX4 4 Options/Part Number Description Part number VEX312-01 02 VEX322-01 02 VEX33202

5 Port Air Operated Valve

How to Order Valve VFA 3 1 3 0 01 VFA 3 1 3 0 01 Pilot port direction Series 1 3 5 Nil: Upward P: Lateral VFA1000 VFA3000 VFA5000 Pilot port Type of actuation 1 2 3 4 5 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center Pilot port Only 1 and 2 are available with the VFA1000.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A A1 MM U1 L1 RR1 A1 L1 E1 MM RR1 U1 0.4 0.2 + 0.2 + 0 0.2 0.4 0.2 0.4 10 12 16 20 +0.002 0 5 6.4 8 10 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.002 0 5 6.5 8 10 #8-32UNC 10 12 16 20 12 16 20 25 10 12 16 20 14.6 16.6 21 25.6 RCS-01 RCS-015 RCS-02 RCS-025 RCD-01 RCD-015 RCD-02 RCD-025 21.5 32 34 41 6 6 6 8 16 25 25 30 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6.3 12 10.3 18 7 14 11.5 14

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 (A port) 18 8.5 2-4.5 (For mounting) 4 34 Manual override A 24 P R 33.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] (Light/surge voltage suppressor) M5 x 0.8 (X port) 49.6 [56.6] + 34.2 8.5 16.5 21 X 6 32 24 15 17 9 1/8 (P, R port) 42 L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (W0): SYJ54-W0-01 Approx.

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

Pressure Gauge Guide

VE 3 Bleed port Model (Made to Order) Pressure range Note) Indication unit Connection thread VY1 Note Model MPa G43-2-01 to 02-X2 G43-4-01 to 02-X2 G43-6-01-X2 G43-7-01 to 02-X2 G43-10-01 to 02-X2 G43-2-01 to 02-X3 G43-4-01 to 02-X3 G43-6-01-X3 G43-7-01 to 02-X3 G43-10-01 to 02-X3 G43-2-01 to 02-X4 G43-4-01 to 02-X4 G43-6-01-X4 G43-7-01 to 02-X4 G43-10-01 to 02-X4 0 to 0.2 0 to 0.4 0 to 0.6

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

HRX-OM-M090

AL.01 Contact output 2 function Sets output signal function of contact output 2. RMT Contact output 2 operation Sets output signal operation of contact output 2. A Contact output 2 selected alarm Sets alarm which is selected for contact output 2. AL.01 Contact output 3 function Sets output signal function of contact output 3.

HRX-OM-O021

AL.01 Contact output 3 function ALM Contact output 3 operation B Selected for contact output 3 AL.01 5.2 Function HRS Series 5-6 HRX-OM-O021 Chapter 5 Display and setting of various functions 5.3 Main screen 5.3.1 Main screen Displays the current temperature and the set temperature of the circulating fluid.

HRX-OM-R005

AL.01 Contact output 3 function ALM Contact output 3 operation B Selected for contact output 3 AL.01 5.2 Function HRS Series 5-6 HRX-OM-R005 Chapter 5 Display and setting of various functions 5.3 Main screen 5.3.1 Main screen Displays the current temperature and the set temperature of the circulating fluid.

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

1

188 42 170 42 42 Series MXH Series MGC/MLGC Series MGG Table material: Aluminum Front plate material: Steel Front plate material: Steel NCA 2-D A B 2-C 2-E DMounting side Connecting port side Mounting side Connecting port side -X 20Data D LX B C D A 4-C2 Dimensional Range Not Possible to Machine Additionally E A B C D Bore size (mm) 20 25 32 40 50 63 80 100 Dimensional Range Not Possible

5

01 03 50 12 Part no.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(For type 20, 41, 42 and 45) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 Pilot pressure MPa Specify the part numbers for valves and options together beneath the manifold base part number. (Example) SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.) SYA5240 1 set (Double air operated valve part no.)

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

AS2200-01-X12 Ex.) AS2200-01-X21 Note 1) Not particle-free Note 2) Throttle valve is only compatible with the part no. of the meter-out type. Throttle Valve (Without Check Valve) X214 Ex.)

HRX-OM-R016

AL.01 Contact output 2 function Sets output signal function of contact output 2. RMT Contact output 2 operation Sets output signal operation of contact output 2. A Contact output 2 selected alarm Sets alarm which is selected for contact output 2. AL.01 Contact output 3 function Sets output signal function of contact output 3.

VK3000

: M5 x 0.8 Thread type R port: Rc 1/8 20 Solenoid on same side of A and B port 20 stations Type S41 Nil F N T Rc S Type VK334 Type VK3140 Port size G M5 M5 x 0.8 C4 4 cassette NPT P port: Rc 1/8 NPTF R port: Rc 1/8 B port: M5 x 0.8 A port: M5 x 0.8 Type 42: Base mounted (A, B port side ported) How to Order Applicable solenoid valve VK3140 VK334 Type VK3140 VV5K3 42 05 01 Type VK334 Applicable

REA/REB

-06-X214 AS2301F-01-06-X214 2.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VS7 38 22 Dimensions 13 Silencer P/N Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP(For VQZ1000/VQZ2000) VVQZ2000-CP(For VQZ3000) Used to block an unused cylinder port when using a 4 way valve as a 3 way valve. 1.12-23 VQZ1000/2000/3000 Body Ported Manifold Option Double check block (Externally placed downstream): For VQZ1000 only VQ1000FPGll