Compact Vacuum Unit

Maximum operating pressure Minimum operating pressure Response time 79.8 psi (0.55 MPa) 0 psi (0 MPa) ON: 3.5 ms OFF: 2 ms 1 W (42 mA) 1 W (42 mA) 79.8 psi (0.55 MPa) 14.5 psi (0.1 MPa) 5 ms or less 0.7 W (29 mA) Note 2) 14.5 psi (0.1 MPa) 14.5 psi (0.1 MPa) 5 ms or less 0.7 W (29 mA) Note 2) 79.8 psi (0.55 MPa) 14.5 psi (0.1 MPa) 5 ms or less 1 W (42 mA) 1 W (83 mA) 24 VDC 12 VDC Rated coil

VXZ

PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Model AMR3000 AMR4000 AMR5000 AMR6000 Model name 1 4 3 8 1 2 : E4-02 : E4-03 : E4-04 1 4 1 2 : E6-06 : E6-10 3 4 : E3-02 : E3-03 : E5-04 : E5-06 Adapter assembly (7) 3 8 3 4 1 AD33-X203 AD33-X202 AD33-X210 AD33-X201 Float type auto drain (AMR 100) (8) IS10-01 (0.4 MPa setting) Compact pressure switch 135510 135613 Elbow (R x Rc) (9) Note 5) in the gauge part number (e.g.

Compact Cylinder with Air Cushion and Lock Series RLQ

YA 03 YA-03 YA-05 18 20 6.8 9 16 20 6 8 42 50 6.5 6.5 10 12 Applicable air cylinder bore Bore size (mm) 32, 40 50, 63 03 05 32, 40 50, 63 U V W Mass (g) Part No.

VQ5000

04 03 04 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: 3/8 04: 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 179 (plug-in type) 133 (plug lead type) VVQ5000-R-1T (Plug-in type) VVQ5000-R-5T (Plug lead type) 03 04 03 04 32 16 By mounting individual

VK3000

: Base mounted (A, B port side ported) Applicable solenoid valve VK3140-(-Q) VK334-(-Q) Type VK3140 VV5K3 05 42 01 Type VK334 VV061 Solenoid direction Valve stations 01 1 station Applicable blanking plate assembly VK3000-7-1A Solenoid on opposite side of A and B port VV100 Nil A port: Rc 1/8 B port: Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 Thread type Type S42 20 20 stations Solenoid on same

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Calculation of suction flow rate OCalculation 01 Ejector/ average suction flow rate. 01 = ( ~ ~'3) 0 max.

VZ100/300/500

Mounting Screw Tightening Torques M3: 0.8 Nm 4-6-34 35 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 Manifold for Internal Pilot How to Order Applicable solenoid valve VZ512--01 VZ512M--01 VZ522--01 Z522M--01 Applicable blanking plate assembly DXT201-15-4A Type 20/21 VV3Z5 20 05 1 A port A port P/R port thread type Manifold P port Stations 20 21 Type 20 Type 21

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

04 03 04 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: 3/8 04: 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 179 (plug-in type) 133 (plug lead type) VVQ5000-R-1T (Plug-in type) VVQ5000-R-5T (Plug lead type) 03 04 03 04 32 16 By mounting individual

3

Temperature sensor Remote type 3-color display Digital flow monitor CAT.ES100-80C Series PF3W IP65 Digital Flow Switch for Water 40% 40% smaller than existing product Reducing piping space PF3W704-03 66.4 70 Shortened PF2W704-03 (Existing product) 30 50 Straight piping length PF3W704 42 PF2W704 Existing product requires a straight piping length at least 8 times the piping diameter.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

HRX-OM-W032

Setting of the selected alarm Setting range: AL.01 to AL.51 to 63. Press the [MENU] key once. Returns to the main display (which shows the circulating fluid temperature).

Compact Cylinder with Air Cushion and Lock Series RLQ

YA-03 Joint . YU-03 T1 B 2-D through 2-O counterbore (mm) Bore size (mm) B D E J M O Part No. 12 7 25 9 34 11.5 depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5 depth 8.5 YB-05 50, 63 Joint Weight (g) Bore size (mm) T1 RS T2 V W Part No.

RLQ

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com YA 03 YA-03 YA-05 10 12 6.5 6.5 42 50 6 8 16 20 6.8 9 18 20 Applicable air cylinder bore Bore size (mm) 32, 40 50, 63 W V U Weight (g) Part No. 03 05 32, 40 50, 63 Mounting bracket YA-03 YA-05 55 100 56 67 18 22 6 8

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A A1 MM U1 L1 RR1 A1 L1 E1 MM RR1 U1 0.4 0.2 + 0.2 + 0 0.2 0.4 0.2 0.4 10 12 16 20 +0.002 0 5 6.4 8 10 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.002 0 5 6.5 8 10 #8-32UNC 10 12 16 20 12 16 20 25 10 12 16 20 14.6 16.6 21 25.6 RCS-01 RCS-015 RCS-02 RCS-025 RCD-01 RCD-015 RCD-02 RCD-025 21.5 32 34 41 6 6 6 8 16 25 25 30 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6.3 12 10.3 18 7 14 11.5 14

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

ASG22F-M5-04 ASG22F-M5-06 ASG32F-01-04S ASG32F-01-06S ASG32F-01-08S ASG42F-02-06S ASG42F-02-08S ASG42F-02-10S ASG52F-03-08S ASG52F-03-10S ASG52F-03-12S ASG62F-04-12S 4 10.6 23 28.8 11.6 25.2 18.2 M5 x 0.8 8 15.8 37.2 33.7 33.7 30.2 6 13 23.6 30.6 14 34.4 18.8 4 10.6 24.8 32 14.3 39.4 18.2 1/8 12 18.6 44 39 40 35 6 13 25.4 32.6 14.3 42.4 18.8 8 15 27.5 35.5 16 52.4 20.9 6 13 27.3 36.2 17.9

Air Pilot Operated

,|e 4 = \bh unit only (N\6A31 14 only; see page 7) 5 = Foot mounting;pipe tap in body hing 0O = Manilold mounting (NVSA 3114) 01 = 1/8" NPrF 0 SA 31 15, 3125) 02 = 1/4" NPTF (N\6A 3t 15, 3t25) 03 = 3/8" NPTF N\ISA 3135) (X = 1/2" NPTF (N\^sA 31 35, 31 45) 06 = 3/,1" NPTF (N!6A 3145) DIBECTIOI{ALAIBVALYE DIMENSIONS/PARTS LIST SERIES NVSA 3115 NVSA 3115 oPttot{a!l frg. lasE axl 338.

Air Pilot Operated Series NVSA

,|e 4 = \bh unit only (N\6A31 14 only; see page 7) 5 = Foot mounting;pipe tap in body hing 0O = Manilold mounting (NVSA 3114) 01 = 1/8" NPrF 0 SA 31 15, 3125) 02 = 1/4" NPTF (N\6A 3t 15, 3t25) 03 = 3/8" NPTF N\ISA 3135) (X = 1/2" NPTF (N\^sA 31 35, 31 45) 06 = 3/,1" NPTF (N!6A 3145) DIBECTIOI{ALAIBVALYE DIMENSIONS/PARTS LIST SERIES NVSA 3115 NVSA 3115 oPttot{a!l frg. lasE axl 338.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-06 AS121FG-U10/32-07 18.3 23.1 11.7 13.5 18.1 22.9 11.6 12 6 1/4" 13.5 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 14.3 13.5 20.4 27.5 11.6 6 5/32" 14.2 31.1 36.1 12 32.1 27.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 12.7 14.3 23.1 30.2 19 18.5 25.3 32.4 15.2 11.4 8 3/16" 36.1 31.1 32.1 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01

AS-FG/ASD-FG

22.2 18.3 23.1 11.7 AS121FG-M5-06 AS121FG-U10/32-07 13.5 18.1 22.9 11.6 12 6 1/4" 13.5 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 14.3 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 27.5 11.6 6 5/32" R(PT) 1/8 14.3 14.2 31.1 36.1 12 32.1 27.1 17 NPT 1/8 12.7 23.1 30.2 AS221FG-01-08 AS221FG-N01-05 19 18.5 25.3 32.4 15.2 8 3/16" 11.4 36.1 31.1 32.1 27.1 16.5 14.2