VZS

Indicator light U side (n) (2) (1) Stations D side 2-C4, C6 1 A B 9.5 27.3 (Port size: One-touch fitting type) Electrical entry n: Stations L Stations Formula 17n + 19 17n + 28 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8 155 164 9 172 181 10 189 198 11 206 215 12 223 232 13 240 249 14 257 266 15 274 283 L1 L2 3-7-17 18 Series VZS2000 Non plug-in type Manifold VV5ZS2-51Station

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

U side 1 2 3 4 5 6 7 8 n 2-C10 R(EXH) port DIN rail clamping screw EXH EXH SMC SMC SMC SMC SMC SMC SMC 2-C10 P(SUP) port R R X B B B B B B B B X P 49 P 31.6 9.5 24.5 16 A A A A A A A A (12) (7.5) 23 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads 41 P = 16 Broken lines and dimensions inside ( ) indicate type [-D] (with

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

) (12) (12) (12) With manual operation of the pressure adjustment screw (14) SOL.a (14) SOL.a (14) SOL.a (14) SOL.a 22.5 90.5 22.9 56.2 Note) Reduces supply pressure from the D side of manifold.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(M): VQZ115-lMl-C3, C4, C6, M5-PR (Lead wire) Cover dia 1.5 Cross section 0.23mm2 300 60.5 65.5 300 55.5 59 (Lead wire) Indicator light Indicator light 40.5 41.5 Cover dia 1.5 Cross section 0.23mm2 : AC : AC 2.10-8 VQZ100/200/300 Body Ported VQZ200 Valve single unit 2-C4, C6, M5 Grommet (G): VQZ2l2(R)-lGl-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 2-3.5 Mounting

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

LOCK FREE LOCK FREE Pilot type Nil Internal pilot R External pilot Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Stations Stations Symbol Symbol 02 02 2 stations 2 stations Connector mounting position Double wiring Note 1) Double wiring 12 12 12 stations 12 stations Symbol Mounting position 02 02 2 stations 2 stations D D side Specified layout (Up to

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

D: Push-turn locking slotted type E: Push-turn locking lever type (With gasket and screws) Body option Nil: Individual pilot exhaust style Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC M plug connector DIN terminal M8 connector R port P, E port M: Common exhaust for the pilot and main valve MN: Without

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

123 162.5 139 17 187.5 171 237.5 219 12.5 13.5 11.5 14.5 12.5 Stations L1 L2 L3 L4 13 14 15 16 11 298 12 323 348 373 310.5 300 283 360.5 350 331 287.5 267 312.5 299 12 337.5 315 362.5 347 13 15.5 13.5 16.5 14.5 49 5 Port Solenoid Valve Series SY3000/5000 Stations SS5Y5-45GDUC4 C6 C8 C4 C6 C8 C4 C6 C8 Note) L1 to L4 dimensions of SS5Y5-45GDStations Dare the same as SS5Y5-45GDStations U.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

VZ100/300/500

C6 B3 B7 2 stations 02 M5 x 0.8 1/8 Tube Nil Rc G NPT NPTF F N T 20 stations 20 One-touch fitting for 4 One-touch fitting for 6 A port M5 x 0.8, 1/8, C4, C6, B3, B7 One-touch fitting for 5/32" One-touch fitting for 1/4 Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port.

Table of Contents

-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color (Mounting hole) B C D E F G H Model A ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 12 12 12 12 110 52.45 42

smcmaintenancepartslist

-12 MI-A2002-20 MI-A2502-25 MI-A3202-32 MI-A0801-8 MI-A1201-12 MI-A2001-20 MI-A2501-25 MI-A3201-32 MH-G01 (contents quantity 30 g) Main parts No. e (1 pc.) !

2-Color Display High Precision

-T/-V PNP (2 outputs) + Auto-shift input Brown DC (+) Brown DC (+) Brown DC (+) Gray Analog output Gray Analog output Gray Auto-shift input Main circuit Main circuit Main circuit Load Load 12 to + 12 to + 12 to + Black OUT1 OUT1 OUT1 Black 24 VDC Black 24 VDC 24 VDC Load Load Load OUT2 White OUT2 OUT2 White White Load Load Load Blue DC () Blue DC () Blue DC () Max. 80 mA Residual voltage

Manifold Specifications

One-touch fitting type) VFN n: Stations L Stations 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8 155 164 9 172 181 10 189 198 11 206 215 12 223 232 13 240 249 14 257 266 15 274 283 16 291 300 Formula 17n + 19 17n + 28 L1 L2 With attachment plug lead wire: VV5ZS2-51GStation 1Port size 4-4.5 mounting hole Manual override Indicator light U side (n) (2) (1) Stations D side 2-C4, C6

Compact Manifold Regulator Series ARM5

P U C S O H L 7 26 (Max. 28) 12 7 IN OUT 12 Panel cutout dimensions 28 ARM10F1-06GPC 08GPC 4 x R1 or less 28 to 28.5 IN OUT 38 58 34 23 20 Plate thickness: Max. 2.1 30 15 6 OPEN 34 14 0.6 0.4 0.2 0.8 1 0 MPa 62 SMC P K U C S O H L 7 26 (Max. 28) 7 IN OUT 12 522 Regulator/Single Unit Type Options Pressure Gauge One-touch Fittings for Regulator VVQ1000-50A C4 Part no.

Digital Flow Switch (Integrated display type)

-L) 68 2.8 depth 6.2 PF2M711/721-N7(-L) 64.6 2.8 depth 6.2 -99No.PF-OMW0007-E PF2M#L-C4/C6/C8/N7(-L) (mm) Model A C P PF2M701/702/705/710L-C4(-L) 84.4 7.6 2.8 depth 8.4 PF2M701/702/705/710/725/750L-C6(-L) 84.4 8 2.8 depth 8.4 PF2M725/750L-N7(-L) 84.4 11.8 2.8 depth 8.4 PF2M711/721L-C8(-L) 88 12 2.8 depth 6.2 PF2M711/721L-N7(-L) 88 10.3 2.8 depth 6.2 -100No.PF-OMW0007-E PF2M7#-#1/2(-L) (mm

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

Large Size Vacuum Module: Series ZR

ZR1-SR3-70-A(a set of four threads) ZR1-SR3-75-A(a set of four threads) ZP ZR1-SR3-19-A(a set of six threads) 15 ZR1-SR3-24-A(a set of six threads) M12 x 12 SP 16 Note 1) Standard Note 1) Screw M12 x 12 screws (Hexagon socket head set screws) in until the head aligns with the manifold base surface.

ZR

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B 13-3-12 12 Series ZR Large Size Vacuum Module: Ejector System Vacuum Pressure Switch Unit/Pressure Switch for Vacuum: ZSE2-0R-15 Specifications Quick response: 10 mS Vacuum pressure switch part no.