The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, MANIFOLD ASSY, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING

1

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

Table of Contents

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

2

Thread type Nil R N NPT G G Port size 01 1/8 02 1/4 03 3/8 04 1/2 INDEX 474 Series AS-FG Needle Valve/Flow-rate Characteristics AS1201FG-M5, AS1211FG-M5 AS1301FG-M5, AS1311FG-M5 AS2201FG-01, AS2211FG-01 AS2301FG-01, AS2311FG-01 AS2201FG-02, AS2211FG-02 AS2301FG-02, AS2311FG-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23

Table of Contents

(mm) M5 x 0.8 M6 x 1.0 L2 Effective area (mm2) Nylon Note) <M5> <M5, M6> Weight (g) Model M D1 D2 L1 L1 Urethane KQ2LF04-M5 KQ2LF04-M6 KQ2LF04-01 KQ2LF04-02 KQ2LF06-M5 KQ2LF06-M6 KQ2LF06-01 KQ2LF06-02 KQ2LF06-03 KQ2LF08-01 KQ2LF08-02 KQ2LF08-03 KQ2LF10-02 KQ2LF10-03 KQ2LF10-04 KQ2LF12-02 KQ2LF12-03 KQ2LF12-04 14.5 8 8 5 3.5 3.5 15.5 21 24.5 15 16 22 25.5 26 10.4 4 16 18.5 D1 1 8 1 4 14 17

V100

port External pilot specifications (1) NM N1 N3 N7 N9 N11 M5 01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.

CATALOG

M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62

Micro Mechanical Valve Series VM1000

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

5 Port Solenoid Valve Series SY3000/5000/7000/9000

A, B port size Thread piping 3 5 7 SY3000 SY5000 SY7000 Thread type CE-compliant Rc Nil Nil Port size M5 x 0.8 Symbol M5 01 02 Applicable series SY3000 SY5000 SY7000 F G Q CE-compliant Type of actuation N For DC only except DIN terminal.

AC

10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%F.S. 0.5%F.S. 16 0.9 25 1.4

VM

One way roller lever VM123-M5-02 VM133-M5-02 VM123-M5-02S VM133-M5-02S JIS Symbol 2 port Polyacetal or hard steel roller R port (3 port only) 3 port 0.5 MPa supply 2-M5 x 0.8 depth 4 3.2 mm P.T. 10 N F.O.F. 2-4.6 mounting hole 2.3 mm O.T. 5.5 mm T.T.

ZP

Vacuum Inlet Dimensions ZP3-T08UM;J -B5 ZP3-T08UM;K -B5 Barb fitting One-touch fitting M5 x 0.8 7 ZP3-T04UM; -02 ZP3-T06UM; -02 ZP3-T08UM; -02 ZP3-T04UM; -U2 ZP3-T06UM; -U2 ZP3-T08UM; -U2 Width across flat 6 Width across flat 10 0.8 4 0.9 Width across flat 7 2 2 D (8.7) (13.9) A B (6.5) M8 x 0.75 Width across flat 7 Width across flat 7 6 M-5AU-2 [Weight: 1.5 g] 2 KJH02-M5 [Weight: 1.9 g]

ZP

Vacuum Inlet Dimensions ZP3-T08UM;J -B5 ZP3-T08UM;K -B5 Barb fitting One-touch fitting M5 x 0.8 7 ZP3-T04UM; -02 ZP3-T06UM; -02 ZP3-T08UM; -02 ZP3-T04UM; -U2 ZP3-T06UM; -U2 ZP3-T08UM; -U2 Width across flat 6 Width across flat 10 0.8 4 0.9 Width across flat 7 2 2 D (8.7) (13.9) A B (6.5) M8 x 0.75 Width across flat 7 Width across flat 7 6 M-5AU-2 [Weight: 1.5 g] 2 KJH02-M5 [Weight: 1.9 g]

KJ

(mm) M5 x 0.8 M6 x 1.0 L2 Effective area (mm2) Nylon Note) <M5> <M5, M6> Weight (g) Model M D1 D2 L1 L1 Urethane KQ2LF04-M5 KQ2LF04-M6 KQ2LF04-01 KQ2LF04-02 KQ2LF06-M5 KQ2LF06-M6 KQ2LF06-01 KQ2LF06-02 KQ2LF06-03 KQ2LF08-01 KQ2LF08-02 KQ2LF08-03 KQ2LF10-02 KQ2LF10-03 KQ2LF10-04 KQ2LF12-02 KQ2LF12-03 KQ2LF12-04 14.5 8 8 5 3.5 3.5 15.5 21 24.5 15 16 22 25.5 26 10.4 4 16 18.5 D1 1 8 1 4 14 17

VM

One way roller lever VM123-M5-02 VM133-M5-02 VM123-M5-02S VM133-M5-02S JIS Symbol 2 port Polyacetal or hard steel roller R port (3 port only) 3 port 0.5 MPa supply 2-M5 x 0.8 depth 4 3.2 mm P.T. 10 N F.O.F. 2-4.6 mounting hole 2.3 mm O.T. 5.5 mm T.T.

Table of Contents

E100-M5 02 03 04 06 (6) IS1000E-20 01 02 03 IS1000E-30 02 03 04 IS1000E-40 Pressure switch with piping adapter (6) Y14-M5 Y2401 02 Y3401 02 Y4402 03 Y5403 04 Cross interface Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

ZP

Vacuum Inlet Dimensions ZP3-T08UM;J -B5 ZP3-T08UM;K -B5 Barb fitting One-touch fitting M5 x 0.8 7 ZP3-T04UM; -02 ZP3-T06UM; -02 ZP3-T08UM; -02 ZP3-T04UM; -U2 ZP3-T06UM; -U2 ZP3-T08UM; -U2 Width across flat 6 Width across flat 10 0.8 4 0.9 Width across flat 7 2 2 D (8.7) (13.9) A B (6.5) M8 x 0.75 Width across flat 7 Width across flat 7 6 M-5AU-2 [Weight: 1.5 g] 2 KJH02-M5 [Weight: 1.9 g]

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

VM

Roller Lever/VM123-M5-01, VM133-M5-01 VM123-M5-01S, VM133-M5-01S JIS Symbol 2 port SlA VlA 3 port VM/VR 10N F.O.F. 0.5MPa supply VH 3.2mm P.T. 2.3mm O.T. 5.5mm T.T. One Way Roller Lever/VM123-M5-02, VM133-M5-02 VM123-M5-02S, VM133-M5-02S JIS Symbol 2 port 3 port 10N F.O.F. 0.5MPa supply 3.2mm P.T. 2.3mm O.T. 5.5mm T.T.

Vacuum Pad

Vacuum Inlet Dimensions ZP3-T08UM;J -B5 ZP3-T08UM;K -B5 Barb fitting One-touch fitting M5 x 0.8 7 ZP3-T04UM; -02 ZP3-T06UM; -02 ZP3-T08UM; -02 ZP3-T04UM; -U2 ZP3-T06UM; -U2 ZP3-T08UM; -U2 Width across flat 6 Width across flat 10 0.8 4 0.9 Width across flat 7 2 2 D (8.7) (13.9) A B (6.5) M8 x 0.75 Width across flat 7 Width across flat 7 6 M-5AU-2 [Weight: 1.5 g] 2 KJH02-M5 [Weight: 1.9 g]