SQ1000/2000

A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

SMC Pneumatic Clean Series

58 64.5 19 17 155 12 12 27 20 45 11 2 7 114 108 62 39 33 12 12 63 Up to 300 35 32 32 27 20 11 45 2 7 72 76.6 50 Up to 300 35 32 30 M18 x 1.5 M18 x 1.5 44 1/4 46 41 50 1/4 64 161 38 32 14, 20 counterbore depth 14 18, 26 counterbore depth 18 Note) < >: Denotes the dimensions for G port. 45 Actuator / Common Precautions 1 Be sure to read before handling.

SY

18 147 28 9.5 22 Grommet .

Guide Cylinder Series MGG

size (mm) 20 25 32 40 50 Bore size (mm) S O P T U V W X Z HN HR Q Y R Y R Q 20 25 32 40 50 20 25 32 40 50 1/8 26 12 82 48 40 39 157 38.5 12(14) 98(106) 12 37 25.3 11 95 M6 x 1 depth 9 1/8 31 13 100 57 46 46 175 39 12(14) 98(106) 12 40 28.3 11 95 M6 x 1 depth 13 1/8 38 16 114 65 52 46 201 40 12(14) 101(109) 12 43 31.3 11 97 M6 x 1 depth 13 1/8 47 20 138 84 62 56 238 41 12(15) 109(118) 13

Air Cylinder Series CS1

Material: Rolled steel +0.084 0 +0.3 +0.1 0.1 0.3 125 140 160 180 200 250 300 Y-12 32 8 46 27 42 25 64 100 M30 x 1.5 H B C D d Part no. 0.1 0.3 +0.084 0 +0.3 +0.1 Y-14 36 8 48 30 47 28 72 105 M30 x 1.5 NT-12 NT-16 NT-18 NT-20 NT-25 NT-30 125, 140 160 180 200 250 300 18 46 53.1 44 M30 x 1.5 0.1 0.3 +0.1 0 +0.3 +0.1 Y-16 8 55 34 46 40 110 32 80 M36 x 1.5 21 55 63.5 53 M36 x 1.5 0.1 0.3 +0.1

High Purity Chemical Valve

5.5 39 46 60 96 68 22 131 55 18 8 42 57 5.5 48 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 58 75 129 84 26 154 68 27.5 8 56 71 6.5 62 58 75 138 84 32 165 77 27.5 8 56 71 6.5 71 465 Series LVC Dimensions With flow rate adjustment With bypass (Max.

CLA

aize (mm) 40 550 63 80 9 12 80 42 100 51 216 43 11.2 59 224 ~6 20 27 % 42 11 20 45 153 8 60 30 ~ 46 10 21 50 168 0 70 9 12 90 50 11 0 58 238 52 11 .2 66 ""246 y. ~ Siroke 13.5 18 130 76 160 71 297 65 12.5 60 ~ 13.5 18 150 92 180 72 316 65 14.0 81 ~ 11 .5 15 105 59 130 58 255 52 11.2 66 0/. 16 31 ~ 48.5 13 23 60 182 0 86 37 ~. 55 15 23 70 208 0 102 1 14 40 \; 56.5 15 25 80 226 0 116 100

Electric Actuator

Compatible Drivers Pulse input type /Positioning type Pulse input type CC-Link direct input type SSCNET III type Driver type LECSA Up to 7 D LECSB D LECSC Up to 255 (2 stations occupied) CC-Link LECSS SSCNET III Series Number of point tables Pulse input Applicable network Incremental 17-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Control encoder

Free Mount Cylinder for Vacuum Series ZCUK

20. 5 27. 5 41. 5 41. 5 41. 5 41. 5 42. 5 42. 5 42. 5 48. 5 ZMA DQ HQ HP 12 21 44 15 21 44 18 23 23 46 28 23 46 35 12 24 47 18 25 48 28 29 52 12 25 48 15 18 29 52 22 27 33 56 34 38 61 ZPT-B6 ZC(D)UKC20 ZC(D)UKQ20 21. 5 23. 5 27. 5 32. 5 44. 5 46. 5 50. 5 55. 5 ZQ DQ HQ HP 43 32 57 53 33 58 28 35 60 43 22 27 39 64 34 44 69 43 53 23 29 54 28 29 54 35 ZPT-B8 ZC(D)UKC25 ZC(D)UKQ25 29. 5 42. 5

Integrated Controller

[mm] Double Clevis Size Stroke range [mm] A CL CB CD CT CU CW CX CZ L RR 16 30 to 100 128.4 119.4 20 8 5 12 18 8 16 10.5 9 25 30 to 100 166.2 156.2 10 5 14 20 18 36 14.5 10 101 to 200 191.2 181.2 32 30 to 100 185.6 175.6 10 6 14 22 18 36 18.5 10 101 to 200 215.6 205.6 Material: Cast iron (Coating) The A and CL measurements are when the unit is in the original position.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

7 9, 14 counterbore depth 9 11, 17.5 counterbore depth 12 38 32 46 41 50 1/4 64 161 63 Up to 300 35 32 32 27 20 11 45 2 7 72 76.6 50 Up to 300 35 32 30 12 12 27 20 45 11 2 7 39 33 18 18 58 64.5 M18 x 1.5 M18 x 1.5 44 1/4 12 12 114 108 62 19 17 155 14, 20 counterbore depth 14 18, 26 counterbore depth 18 (mm) Female rod end A1 8 8 12 13 18 18 MM M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.5

Vacuum Unit

Number of Manifold Stations that can be Operated Simultaneously in page 18.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

GE H Size 10 20 30 50 55.4 50 9.5 34.5 27.8 60 4.5 28.5 45 46 20H9 5 15H9 52.9 44.3 33.5 14 97.2 80 8 4 3 4.5 20 15.6 11 7.5 45.2 13 70.8 65 12 46 30 76 6 30.5 60 61 28H9 9 17H9 61.8 55.3 43 18 117.1 100 10 6 2.5 6.5 25 19.5 14 9.5 56.4 17 75.4 70 12 50 32 84 6.5 33.5 65 67 32H9 9 22H9 63.1 60.3 46 19.5 123.4 110 10 4.5 3 6.5 27 21.5 14 9.5 61.5 17 85.4 80 15.5 63 37.5 100 10 37.5 75 77

Table of Contents

0.40 5.0 20 0.28 5.2 23 0.32 6.2 23 0.27 5.8 25 0.21 6.2 16 0.37 4.6 18 0.41 5.1 20 0.27 5.2 23 0.32 6.1 23 0.26 5.8 25 0.20 6.1 15 0.38 4.1 16 0.31 4.3 17 18 0.31 0.28 4.6 4.7 20 21 0.33 0.30 5.4 5.4 14 0.38 3.6 17 [16] 0.39 [0.35] 4.8 [4.3] 17 0.29 4.6 18 0.29 4.6 21 [18] 23 [20] 0.31 [0.34] 5.6 [5.0] 0.27 [0.33] 5.9 [5.2] 16 [9.4] 0.39 [0.40] 4.2 [2.6] 17 0.36 4.5 20 0.31 5.3 18 [9.7]

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

CL

unlocking cam M5 x 0.8 Pressurized locking port Pneumatic locking and spring and pneumatic locking M5 x 0.8 unlocking port Unlocked when pressurized Lock nut 6 71 46 M5 x 0.8 Rod side cylinder port 31 20 14 M14 x 1.0 M6 x 1.0 M5 x 0.8 Head side cylinder port 5 48.5 6.5 34 5 6 50.5 18 Width across flats 10 20 32 18 2.3 2-5.5 Mounting hole 6 9 9.5 11.5 111 + Stroke 150 + Stroke 65 18 32 39

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

NX NZ Material: Rolled steel C85 Applicable bore size (mm) 125 140 160 180 200 250 300 Y-12 +0.084 0 +0.3 +0.1 0.1 0.3 32 25 64 Part no. 8 46 100 M30 x 1.5 27 42 D C B d H Y-14 125, 140 160 180 200 250 300 NT-12 NT-16 NT-18 NT-20 NT-25 NT-30 0.1 0.3 +0.084 0 +0.3 +0.1 36 28 72 8 48 105 M30 x 1.5 30 47 53.1 44 46 18 M30 x 1.5 C95 Y-16 +0.1 0 +0.3 +0.1 0.1 0.3 40 32 80 8 55 110 M36 x 1.5 34

Table of Contents

18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139 195 60 60 60 66 66 66 70 120 140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264 203 203 266 324 324 324 473 130 130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72

Rotary Table/

GE H Size 10 20 30 50 55.4 50 9.5 34.5 27.8 60 4.5 28.5 45 46 20H9 5 15H9 52.9 44.3 33.5 14 97.2 80 8 4 3 4.5 20 15.6 11 7.5 45.2 13 70.8 65 12 46 30 76 6 30.5 60 61 28H9 9 17H9 61.8 55.3 43 18 117.1 100 10 6 2.5 6.5 25 19.5 14 9.5 56.4 17 75.4 70 12 50 32 84 6.5 33.5 65 67 32H9 9 22H9 63.1 60.3 46 19.5 123.4 110 10 4.5 3 6.5 27 21.5 14 9.5 61.5 17 85.4 80 15.5 63 37.5 100 10 37.5 75 77 35H9

ZP

Model Size C10 A 10 ZP10C B 12 C 4 D 13 E F Y 1.7 7.7 7.7 8.2 9.5 9.5 10 13.7 14.7 12 12 12.5 14 14 14.5 18.5 19.5 3.8 ZP10U to 50U C13 13 ZP13C 15 4 13 1.8 C16 16 ZP16C 18 4 13 1.2 C20 20 ZP20C 23 4 15 1.7 C25 25 ZP25C 28 4 15 1.8 C32 32 ZP32C 35 4 15 2.3 C40 40 ZP40C 43 7 18 3.3 C50 50 ZP50C 53 7 18 Deep (D) ZP10D to 40D Model Size U02 A ZP02U B 2.6 C 1.2 D E F Y 2 4 6 8 10 13 16 20 25