Basic type / Direct mount type Series CY3B/CY3R 2.5 118 16.5 9.2 115 M6 x 1 8 7.5 Rc (PT) 1/8 50 100 138 87 79.5 29 17 22 115 46 27 3.5 155 29 Note 1) These dimension drawings indicate the case of piping port location Nil.
26.5 27 48 21 40 5/16 3/8 KQY09-U03 17.46 15.2 12 23.5 25.5 43 18.5 6 10 12 KQY10-U04 22 18.5 17 26.5 30 49 21 40 3/8 1/4 KQY11-U02 17.46 17.9 17 25.5 26.5 46 21 7 12 14 KQY12-U02 17 20.9 17 28.5 27 49.5 22 57.4 3/8 3/8 KQY11-U03 17.46 17.9 17 25.5 27 46.5 21 7 12 38 KQY12-U03 17 20.9 17 28.5 28 50.5 22 57.4 3/8 1/2 KQY11-U04 22.23 17.9 17 25.5 30 47.5 21 7 12 12 KQY12-U04 22 20.9 17 28.5
VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-02S-02S 1 4 1 4 1 4 17 VHK-03S-02S 22 46 85.1 44.3 40.8 44.3 88.6 21.5 4 14 13.7 16.1 3.2 65 17 72 73 76 19 VHK-B2A 49 17 1 30 25 21.5 31 VHK-03S-03S 3 8 3 8 3 8 19 VHK-04S-03S 22 46 93 48.7 44.3 48.7 97.4 21.5 4 14 15.1 17.5 3.2 90 19 22 101 79 81 22 VHK-B2A 49 17 1 30 25 21.5 31 VHK-04S-04S 1 2 1 2 3 port valve Reference dimensions after insertion
x M5 x 0.8 thread depth 10 5 +0.03 +0.01 depth 5 Auto switch mounting groove (2 locations)5 17 5 +0.03 +0.01 depth 5 6 7.5 A 53.4 46 45 44 29 45 24 A 32 C 22.5 51.7 0.3 46 (D/21) x C 65 51 Table operating range1 2 [2] Origin2 21 E D x M5 x 0.84 [Stroke end] 6.54 9 Stroke end [Origin]3 26 A-A G 116 + Stroke 23.5 Stroke F 4H9 ( +0.030 0 ) depth 4 41 29 5 4H9 ( +0.030 0 ) depth 4 42 6 x M5 x
[mm] Size Stroke range (mm) A B C D EH EV H J K L M O1 R S 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 105 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 105 to 500 178.5 160 63 50 to 200 192.6 155.2 21 40 76 82 M16 x 2 44 36 37.4 60 M8 x 1.25 16 80 205 to 500 227.6 190.2 505 to 800 262.6 225.2 Size Stroke range
CAT.ES70-17 C High Purity Fluoropolymer Fittings & Tubing PAT.
Z ZZ H G (NN 1) x H 26 10.5 26 10.5 A B 9.5 5.1 5.1 11 11 29 1.5 A B NN x M6 x 1 thread depth 12 6 5H9 ( ) depth 5 +0.030 0 GA HA B-B A-A 5H9 ( ) depth 5 +0.030 0 (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56 56 56 59 62 NN 2 2 2 2 3 3 4 4 4 GA 18 18 18 22 48 73 74 96 118 HA 50 50 50 56 48 56 112 118 124 I 16 16 16 16 18 23 25 18 21
36 19 106 338 9 118 275 30.5 M16 x 1.5 46 Up to 1800 1801 to 2000 30 63 60 204 106 36 167 195 3/8 162 45 115 70 48 17 18.5 149 86 135 20 41 24 125 398 10 132 320 35 5 M18 x 1.5 16 118 Up to 1800 1801 to 2000 34 63 60 226 124 40.5 187 216 3/8 182 50 115 74 48 17 18.5 165 97 135 20 46 24 132 418 10 150 348 35 5.5 M20 x 1.5 21 131 Up to 2000 2001 to 2400 42 71 67 277 152 58 237 261.5
1.25 17 4.5 4 6 6 5.1 2 37 254 63 Up to 2000 69 4 M16 x 1.5 14 200.5 5 8 16 56.5 M8 x 1.25 17 5.5 4 9 9 6.3 2 37 273.5 80 Up to 2000 86 5 M20 x 1.5 20 238 10 16 72 M10 x 1.5 22 7.5 4 11.5 11.5 6 6 46 328 100 Up to 2000 91 5 M20 x 1.5 20 261.5 10 18 89 M10 x 1.5 26 9.5 4 17 17 10 3 51 356.5 With Rod Boot [mm] Bore size d e f h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400
17 Series CY3R Construction Both sides piping type CY3R15 to 40 !
Refer to page 17-6-3 for Safety Instructions and 17-5-41 to 17-5-42 for High Purity Chemical Valve Precautions. Piping Caution 1. Connect tubing with special tools. Refer to pages 17-5-35 through 17-5-37 regarding tubing connection and special tools. 2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below.
32 36 17 72 85 97 110 135 160 25 37.5 50 75 100 12.5 185 125 17 72 32 36 85 97 110 135 160 25 37.5 50 75 100 190 12.5 125 41 46 19 77 90 102 115 140 165 25 37.5 50 75 100 Long stroke type includes ones for strokes more than 301 mm. 10-15-21 22 Series CVM5 Axial Foot Style (L) Bore size Stroke CVM5L Manual override Width across flats B1 Width across flats B2 Width across flats NA Mounting
0 0.039 154 88 M32 x 2 42.5 21.5 M14 x 1.5 50 14.2 16 46.5 29.8 24 84.5 21 16 Up to 300 22 41 8 10 32 With Rod Boot h Bore (mm) f B3 e 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 20 25 32 40 68 12.5 81 93 106 131 25 37.5 50 75 17 30 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 77 12.5
Bore size [mm] B TA TL TU TC TX TE TO TR TT TS TH TF Z TDH10 Bore size [mm] Z MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12+0.070 0 32 92 40 96 50 109 63 109 80 134 100 134 125 163 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 105 20+0.084 0 80 95 100 70 15
Description Material Part no. 20 25 32 40 17 Rod seal NBR CM20Z-PS CM25Z-PS CM32Z-PS CM40Z-PS DVAir-hydro -X 17 Rod seal NBR CM2H20-PS CM2H25-PS CM2H32-PS CM2H40-PS Technical Data * Since the seal does not include a grease pack, order it separately.
to 1000 3/4 +0.100 0 +0.3 +0.1 0 0.2 18.5 M16 x 1.5 80 M36 x 1.5 56 182 20 59 17 39 53 144 40 43 36 36 90 14 40 80 32 Up to 1200 -X 3/4 +0.100 0 +0.3 +0.1 0.1 0.3 115 18.5 M18 x 1.5 90 M40 x 1.5 63 60 204 162 23 45 70 48 20 41 39 44 17 50 100 40 Up to 1200 3/4 1 +0.100 0 +0.3 +0.1 0.1 0.3 115 18.5 M20 x 1.5 90 M45 x 1.5 63 60 226 182 25 50 74 48 20 46 39 44 17 Lube Non-lube 50 100 40 Up to
Bore size B TA TL TU TC TX TZ TO TR TT TS TH TF TY1 TY2 Z TDH10 32 151 40 169 50 187 63 199 80 247 100 266 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 49 71 148 12+0.070 0 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 58 77.5 166 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 71 91 183 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 87 103 195 20+0.084 0 80 95
17 20 50 50 56 63 63 71 47 47 53 60 60 67 1/4 1/4 1/4 3/8 3/8 1/2 17 17 20 23 25 30 36 36 40 45 50 60 59 59 59 70 74 86 43 43 43 48 48 60 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 145 75 18 110 136 115 25 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 65 Up to 1000 3 5 30 46 +0.084 0 +0.100 0 0.1 0.3 161 78 18 110 146 128 28 16 114 64 110 M14 x 1.5 75 Up to 1000 182 95 23 132