MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Thread size M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D.

Slider Type/Ball Bushing Bearing

54 63 HA 33.5 42.5 46 HB 33.5 41.5 46 HC 45 53 61.5 HG 17 16 25 HP 42 50 58.5 HT 19 23.5 28 J M5 x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1L CY1H15 CY1H20 CY1H25 CY1H CY1H Model P M5 x 0.8 Rc1/8 Rc1/8 PA 50 50 65 PB 62 65 75 PP 21 23 27 S 161 169 209 TW 65 70 75 W 88.5

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Note 4) Based on dynamic performance test, JIS B 8375-1981. (0.5 MPa, Coil temperature: 20C, at rated voltage, without surge voltage suppressor) Note 5) For VFR400-FZ, ( ): VFR410DZ, < >: VFR440-GVFR410 VFR411 VFR414 3 8 1 2 3 8 1 2 3 8 1 2 3 8 1 2 3 8 1 2 3.2 14 0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4

5 Port Solenoid Valve Series VQZ1000/2000/3000

INA-25-46 AN101-01 Series One-touch fitting KJS04-M5 IN-457-32L (for 6) KQ2H06-01S VQZ1000 VQZ2000 VQZ3000 KQ2H06-M5 KQ2S06-01S KQ2H08-02S The diameter of the above fitting and silencer is the maximum diameter to in the EXH port.

Vacuum System Peripherals:

Mist separator: Series AM/AFM 13-14-13 Fittings & Tubing 1. Compact One-touch mini: Series KJ 13-14-14 2. One-touch fitting: Series KQ 13-14-14 3. One-touch fitting manifold: Series KM 13-14-14 4. Miniature fitting: Series M3/M6/R 13-14-14 5.Tubing 13-14-15 Flow Control Equipment 1. Speed controler: Series AS 13-14-15 2.

Pin Cylinders Series CJP2/CJP

B1 A' Rod end nut Width across flats B2 30 D-1 D E J C MM Without rod end thread NN W B (mm) Symbol A A' B B1 B2 C D E F F' GA GB H J MM NN P S W Z Bore size 6 10 16 7 9 14 14 5.5 2 3 16.5 8 6.5 5.5 6.5 17 6 M3 x 0.5 M10 x 1.0 M3 x 0.5 16 3 33 10 12 15 17 7 2.5 4 19 8 6.5 6 7 20 7 M4 x 0.7 M12 x 1.0 M3 x 0.5 19.5 3 39.5 12 14 20 19 8 3 6 24.5 10 8.5 6.5 7.5 24 10 M5 x 0.8 M14 x 1.0 M5 x

MLGP

44 52 64 77 40 46 58 12 16 16 10 11 13 16.5 27 32 39 44 47 50 14 54 64 78 6.5 6.8 7.5 14 19 19 4 7 6.5 40 50 63 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 107 M8 39.5 14 44 11 12 115 M10 46 16.5 49 13.5 16.5 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st25 25

MLGP

44 52 64 77 40 46 58 12 16 16 10 11 13 16.5 27 32 39 44 47 50 14 54 64 78 6.5 6.8 7.5 14 19 19 4 7 6.5 40 50 63 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 107 M8 39.5 14 44 11 12 115 M10 46 16.5 49 13.5 16.5 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st25 25

Table of Contents

44 45 46 46 47 48 49 50 50 51 52 54 56 56 57 58 58 59 60 How to Order .

Vacuum

Port srze M5 ( 10 32 nom.)

MLGP

78 14 19 19 6.5 6.8 7.5 27 32 39 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 M8 11 12 39.5 107 14 44 M10 13.5 16.5 46 115 16.5 49 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st 25 25 < st 100 100 < st 200 200 < st 300 300 < st 350 38 47 55 30 40 50 13 9 14 18 104 44 60 70 72 92 110 40 50 63 1/8 1/4 1/4 20 22 22 6.6 8.6 8.6 124 124 128 11 14 14 200 200 200 24

MLGP

78 14 19 19 6.5 6.8 7.5 27 32 39 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 M8 11 12 39.5 107 14 44 M10 13.5 16.5 46 115 16.5 49 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st 25 25 < st 100 100 < st 200 200 < st 300 300 < st 350 38 47 55 30 40 50 13 9 14 18 104 44 60 70 72 92 110 40 50 63 1/8 1/4 1/4 20 22 22 6.6 8.6 8.6 124 124 128 11 14 14 200 200 200 24

Auto Switch Guide

mounting screw M5 x 0.8 x 16 l 1.

Auto Switch Guide

mounting screw M5 x 0.8 x 16 l 1.

Auto Switch Guide

mounting screw M5 x 0.8 x 16 l 1.

CV/MVGQ

28 32 14 24 1.6 4.5 8 4 14 84 12 M8 x 1 72 15 M4 x 0.7 9.5 60 34.5 12.5 52.5 28 42 20 33 2.3 5.5 8 5 20 85 18 M10 x 1 73 15 M5 x 0.8 9.5 61 40.5 12.5 52.5 10-15-15

Fieldbus System

14 14 14 14 14 14 D side U side For the I/O Unit part number mounted, refer to the following pages.

Compact 5-Port Solenoid Valve

Connector entry direction SY30M-14-9A1 Upward SY30M-14-9A2 Lateral Series Part no.

Modular Type Regulators Series AR

Recommended torque: 12 to 14 Nm.