CNG

2.5 73 154 10 12 10 6.6 35 54.5 40 4.5 49.4 48 22 28 67.7 3 12 M5 x 0.8 6 14 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 10 (12) 14 10 6.6 40 65.5 49 4.5 58.4 56 30 30 78.7 4 12 M6 x 1 Without rod boot With rod boot Bore size (mm) 20 25 32 40 Z l ZZ H Z e f h ZZ 35 165 186 30 16 55 185 206 0.25 x Stroke 202 40 180 201 30 17 62 223 40 184 208 35 17 62 206 230 50 209 (216) 237 (244) 35 17 70 229 (

CNG

35.5 1/8 26.5 2.5 73 154 12 40 20 15 10 6.6 35 4.5 49.4 48 22 28 59.4 3 12 M5 x 0.8 6 14 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 14 49 22 18 10 6.6 40 4.5 58.4 56 30 30 71.4 4 12 M6 x 1 Without rod boot With rod boot Bore size (mm) 20 25 32 40 l ZZ H Z e f h Z ZZ 35 190 211 30 16 55 210 231 0.25 x Stroke 229 40 207 228 30 17 62 250 40 214 238 35 17 62 236 260 50 241 (250) 269 (278) 35 17 70

CNG

12 10 6.6 35 40 4.5 48 28 67.7 3 12 22 M5 x 0.8 49.4 10 (12) 6 14 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 14 10 6.6 40 65.5 49 4.5 56 30 78.7 4 12 30 M6 x 1 58.4 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 Z l H Z 0.25 ZZ 186 e f h ZZ 35 165 30 16 55 185 206 Stroke x 201 40 180 30 17 62 202 223 208 40 184 35 17 62 206 230 237 (244) 229 (236) 50 209 (216) 35 17 70 257 (264)

Cylinder with Lock Series CNG

6.6 35 54.5 40 4.5 48 28 67.7 3 12 22 M5 x 0.8 49.4 10 (12) 6 14 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 14 10 6.6 40 65.5 49 4.5 56 30 78.7 4 12 30 M6 x 1 58.4 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 Z l H Z 0.25 ZZ 186 e f h ZZ 35 165 30 16 55 185 206 Stroke x 201 40 180 30 17 62 202 223 208 40 184 35 17 62 206 230 237 (244) 50 209 (216) 35 17 70 229 (236) 257 (264)

Series AS-FM/AS-M/ASD-FM

Lock nut U-seal Electroless nickel plated Note 3) <M5 type> 32 type> <M5 type> 32 type> NBR POM, Stainless steel NBR NBR NBR NBR NBR 10 Cassette Seal O-ring O-ring O-ring O-ring Spacer 11 12 13 14 15 16 Polyacetal NBR, Stainless steel 17 M5 type only Gasket Note 1) The M5 and U10/32 types are black zinc chromated brass.

Series SV

center [M12 waterproof connector type] SV100(R)-W-01 13.3 14.5 13.5 62.6 51.8 14.3 35 19 19 2-3.2 M5 x 0.8 (External pilot port) 17 17 (Mounting hole) 3 A B 22 A B SMC B A PE X EB EA P Manual override (non-locking) A side: Orange B side: Green (Light/Surge voltage suppressor) M5 x 0.8 (Pilot EXH port) 41 11.3 (L = 300 to 5000) 97.8 92.2 M12 waterproof connector

Parallel Style Air Gripper Series MHZ

27.6 0.05 35 18.6 (34.6) 2 x M5 x 0.8 thread depth 8 (Mounting thread) 4 x M5 x 0.8 thread depth 10 (Mounting thread) Prepared hole dia. 4.3 through (Mounting hole) +0.030 0 depth 4 4H9 7.5 0.02 8 0 0.1 (58) 30 42 32 MHZ 16.8 0.02 MHF MHL 29 +0.052 0 depth 3 21H9 When closed 16.3 0 0.7 When open 26.3 +2.2 0.2 18 20 43.5 MHR 84.8 MHK 2 x M5 x 0.8 thread depth 10 (Mounting thread) MHS M5 x

Air Slide Table

depth 4 +0.030 0 8.5 9 9 19 A NN x M5 x 0.8 Tapped through hole B 5 HA GA 4H9 depth 4 +0.030 0 Section AA Section BB (mm) ZZ 76 76 86 103 113 157 182 M 67 67 77 94 104 148 173 Z 66 66 76 93 103 147 172 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 34 34 42 58 70 110 135 I 12 12 14 15 13 17 17 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 N 4 4 4 6 6 8 10 HA 32 32 40 39 39 72 72 Model

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

/ Elbow type Seal method: Gasket seal For M5, 10-32UNF D3 Applicable tubing O.D. d D1 A L4 L3 M T H (Width across flats) L1 L2 Metric Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS12l1FG-M5-02A 2 5.8 15.8 20.3 11.9 AS12l1FG-U10/32-02A AS12l1FG-M5-23A 3.2 7.2 16.9 5 AS12l1FG-U10/32-23A AS12l1FG-M5-04A 4 8.2 AS12l1FG-U10/32-04A AS12l1FG-M5

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

Battery-less

[mm] Body Bottom Tapped Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 16 10 to 35 15 17 23.5 23 40 M4 x 0.7 5.5 3 4 40 to 100 32 31 105 to 300 62 46 60 15 to 35 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 105 to 120 75 125 to 200 59 49.5 205 to 400 76 58 25 20 29 20 to 35 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 105 to 120 80 125 to 200 53 51.5 205 to 500 70 60 32 40 25 30 69 Battery-less

Metal Seal/Rubber Seal Series VQ Body Ported

(M5 thread) C6 (6) kit VQ5 VQZ N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4")

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

] Unlocked Locked Unlocked Locked AS12l1FSGl-M5-01 1/8" 7.2 9.4 17.2 21.7 16.9 39.0 36.5 35 33.5 13.3 13.6 15.1 5.5 9.6 7 AS12l1FSGl-U10/32-01 AS12l1FSGl-M5-03 5/32" 8.2 AS12l1FSGl-U10/32-03 AS12l1FSGl-M5-07 1/4" 11.2 18.6 23.1 16.5 8 AS12l1FSGl-U10/32-07 M5 x 0.8 10/32UNF 8 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation 692 Speed Controller with Indicator

Speed Controller with One-touch Fitting

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E Body size 1 KE AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

VM

JIS Symbol 2 port Roller plunger VM122-M5-06 VM132-M5-06 VM122-M5-06S VM132-M5-06S Panel mounting hole Polyacetal or hard steel roller Hexagon nut thick 5, across flats 17 3 port 0.5 MPa supply R port (3 port only) 2-M5 x 0.8 depth 4 T.T. O.T. P.T.

AC Servo Motor Driver (Pulse input type/Positioning type ）

Forced stop deceleration function . 17-14 17.6 Explanation of torque limiting function . 17-16 17.6.1 Torque limit and torque . 17-16 17.6.2 Selection of torque limit value . 17-16 17.6.3 TLC (Torque limited). 17-17 17.7 Point table type pushing operation . 17-18 17.7.1 About Point table type pushing operation . 17-18 17.7.2 Parameter setting . 17-19 17.7.3 Point table . 17-20 17.7.4 Point

42

Valve + Release valve spacer (VVQ4000-24A1 5 D) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x 26) 2 Valve Spacer Valve + SUP stop valve spacer (VVQ4000-37A1 5 ) q AXT632-17-10 (M3 x 62) 3 1 w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

6 M5 type U10/32 type M5 type U10/32 type e !0 i t NBR, Stainless steel !1 !6 w y Gasket M5 type only !7 r Note 1) M5 and U10/32 types are black zinc chromate plated. Note 2) AS231FM type is made of steel. Note 3) Meter-in type is black zinc chromate plated. Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM.

MG

MGP MGPA12-150 MGP MGPA12-100 MGPA -200 32 40 MGPA -150 32 40 MGPA -100 32 40 MGPA -200 32 32 40 40 0.2 0.4 MGP MGPA12-75 MGPA12-75 MGPA -150 32 32 40 40 0.15 0.3 MGPA -100 32 32 40 40 0.1 0.2 MGPA12-50 MGPA12-50 MGPA -50 32 40 MGPA -50 32 32 40 40 0.05 0.1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18 18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104 148 173 Z 66 66 76 93 103 147 172 ZZ 95 95 105 122 132 176 201 13-/22-MXQ12L10 13-/22-MXQ12L20 13-/22-MXQ12L30 13-/22-MXQ12L40 13-/22-MXQ12L50 13