Table of Contents

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

Air Cylinder

10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 62 9 32 22 19.5 17 32 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 64 9 40 24 21 22 41 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 88 10 Female Rod End (mm) (mm) (mm) With Air Cushion Bore size WA 20 12 25 12 32 11 40 16 Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 102 25 8 20 M5

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Proper tightening torque of thread: 0.18 to 0.25 Nm 2-8-5 6 Series VQD1000 Dimensions L plug connector: VQD1121-L-M5 M plug connector: VQD1121-M-M5 Lead wire length 300 mm 2-M5 x 0.8 4(A), 2(B) port Direct manual override Indicator light 0.5 0.5 4 (11) 11 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area:

CL

50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Symbol Description Pilot valve common exhaust Main valve fluoro-rubber All fluoro-rubber X30 X90 X113 937 Series VQZ1000/2000/3000 Dimensions: VQZ1000-SA: EX510 Gateway System Serial Transmission System U side D side L4 L3 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" Output no. 4 L5 46.2 (For M5) 12.5 + + Manual override 13 11 M5 x 0.8 [4(A), 2(B)

MHZ

30 42 32 0.02 Misc. 16.8 D29 +0.052 0 depth 3 21H9 2018 0 -0.05 When closed 16.3 0 0.7 20 43.5 84.8 2-M5 x 0.8 thread depth 10 (Mounting hole) M5 x 0.8 (Finger closing port) 4-M4 x 0.7 (Thread for mounting attachment) M5 x 0.8 (Finger opening port) Auto Switch Mounting Groove Dimensions 15 5 9 Auto switch mounting groove (Both sides) 10 8.5 4 23 14 For single action, the port on one side

MHZ

9 32, 40: Nitrided hard anodized i Cap Piston seal 32, 40: Aluminum alloy NBR @0 Gasket Urethane rubber NBR o @1 Bumper Synthetic rubber !

Table of Contents

M5 x 0.8 Rc 21 18.5 11 35 31 26 18.5 22 12 31 31 40 55 36 45 24 44 38 32 38 40 90 77 P A P B A EA B EB Effective area at supply side (mm 2) S at P1 = 0.7 MPa/P2 = 0.5 MPa 31 Effective area at exhaust side (mm 2) S at P2 = 0.5 MPa Note 1) Maximum operating pressure of solenoid valve is 0.9 MPa.

Valve Single Unit

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Base Mounted Metal Seal/Rubber Seal Series VQ

fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread n L 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 L1 L2 L3 31 50 60.5 53 75 85.5 64 87.5 98 75 100 110.5 86 112.5 123 97 125 135.5 108

Stability of suction position,

ZP3EU-F6-TB12 [Weight: 236 g] ZP2 ZP2V 26 18 26 18 ZP Width across flats 22 M12 x 1.75 M12 x 1.75 Width across flats 22 ZPT ZPR 6 27 19 52 6 27 19 52 11 11 XT661 32 32 4 4 11.11) 11.11) 30 30 (Rotating angle) (Rotating angle) Applicable pad part no. ZP3E-125UM ZP3E-100BM 93.8 78.6 Applicable pad part no.

V

Model A L D Applicable Fitting Size d KQP-04 16 32 6 4mm KQP-03 16 32 6 5/32 KQP-06 18 35 8 6mm KQP-07 18 35 8 1/4 KQP-08 20.5 39 10 8mm KQP-09 20.5 39 10 5/16 KQP-10 22 43 12 10mm KQP-11 22 43 12 3/8 Phillips /Ordinary Round Head Screw Gasket Series SY3000-23-4 (M2x21) SY3000-11-8 SY3000 M3x26 (Non Glare Nickel Plating) SY5000-11-2 SY5000 M4 x 31 (Non Glare Nickel Plating) SY7000-11-2 SY7000

CL

Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40 50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25

SYJ300/500/700

Base mounted (with sub-plate) 53(32) 58(37) M5 x 0.8 54(33) Note) Value for DC.

Sine Rodless Cylinder Series REA/REB

20 68 80 8 M3 x 0.5 4.5 3.5 26 M5 x 0.8 4 38 9 REAR15 21 18 54.5 18 25 98 84 7 M4 x 0.7 6 4.3 32 M5 x 0.8 5 53 14 REAR20 20.5 22 64 40 17 NPT 1/8 107 95 7 M4 x 0.7 7 5.6 38 Rc 1/8 5 62 11 REAR25 21.5 28 72 40 20 NPT 1/8 105 7 117 M5 x 0.8 6.5 5.6 43 Rc 1/8 G 1/8 6 70 15 REAR32 24 35 79 26 50 NPT 1/8 116 130 7 M6 x 1 8.5 7 54 Rc 1/8 G 1/8 7 76 13 REAR40 26 40 93 34 60 NPT 1/4 148 134

MXQ

end) 14 6.5 F 4-M5 x 0.8 thread depth 7 49 3.5 1 14.5 28 24.5 24.5 29 24 58 Retraction end adjuster 6 N-M5 x 0.8 thread depth 6 11 5.5 Adjuster at extension end 5H9 depth 5 +0.030 0 36.5 (Adjuster at extension end) Bottom view of MXQ16L-50 1 11 5.5 11 12 I J 5.5 3 11 2-M5 x 0.8 thread depth 8 Operating port 2-M5 x 0.8 5H9 depth 5 +0.030 0 Max. 12 (Retraction end adjuster) 13 35 45 HA GA

Speed Controller with Indicator

-U10-32/23 AS131FSG1-M5-04 4 8.2 11.5 19.8 AS131FSG1-U10/32-04 AS131FSG1-M5-06 6 10.4 20.9 20.4 36.6 8 AS131FSG1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-01 1/8 7.2 9.4 9.4 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10/32-01 AS131FSG1-M5-03 5/32 8.2 19.8

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Nil TN TF Rc NPT 21 22 Relief type Vacuum suction type G Cylinder stroke (mm) Rubber bumper only Model Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 1/8 Relief type Vacuum suction type 25, 50, 75,

REA/REB

M5 x 0.8 26 68 8 80 14 19.5 20 15 39.5 9 38 4 REAR15 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 18 21 25 18 54.5 14 53 5 REAR20 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 17 20.5 40 22 64 11 62 5 REAR25 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 20 21.5 40 28 72 15 70 6 High Precision Guide Type REBH Order Made Auto Switches REAR32 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 26 24 50 35 79 13 76 7 REAR40 7 M6 x 1 11 Rc 1/

CG5-S

x 0.8 5.5 8 14 3.5 M10 x 1.25 29 1/8 9 83 13 32 10 24 to 300 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 M10 x 1.25 35.5 1/8 11 85 15 40 10 to 500 24 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 21 109 63 14 40 to 600 35 32 27 38 60 20 21 14 58 11 72 M10