LEC-OM02704CN

BMJ-8() 7. n32(32) 8.

VQ5000

Outstanding response times and long service life kit (Lead wire) F L (Metal seal with light/surge suppressor) kit (D-sub connector) VQ5100 32 mS (Single) Enclosure IP65 compliant Dust tight/Low jetproof type 100 million cycles According to SMC life test conditions VQ5200 17 mS (Double) Accuracy 3 mS Enclosure For applications which demand high speed, high frequency, long life

Table of Contents

Thread type 20 25 32 40 50 63 80 M5 x 0.8 Rc NPT Stroke (mm) Refer to Standard Stroke on page 8-25-21.

ZX

Individual air supply port PV Individual air supply port PV Adapter D Adapter D M5 (or M6) Pitch = 21 Individual air supply port (PV port) M5 (or M6) Individual air supply port (PV port) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) (or M6) Vacuum pad connection port (V port) M5 x 0.8 M5 x 0.8 (or M6) Adsorption nozzle piping port 13-2-35 35 Series ZX Vacuum pad connection

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

22.1 AS121F-M5-23D 3.2 8.4 5/32" 9.3 12.7 12.7 22.1 17.3 12.3 12.3 AS121F-U10/32-03D AS121F-M5-04D M5 x 0.8 8 9.6 4.7 4 9.3 0.7 27.4 10 31 0.7 27.4 10-32 UNF 8 9.6 4.7 10 31 AS121F-U10/32-05D AS121F-M5-06D 3/16" 11.4 21.3 26.1 16.5 13.5 6 11.6 22.9 18.1 11.7 11.7 AS121F-U10/32-07D AS221F-01-23SD 12 18.3 23.1 13.5 1/4" 3.2 8.4 20 12.7 AS221F-N01-01SD AS221F-01-04SD 1/8" 8.4 27.5 20.4 4 9.3

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

7.4

. 20 stations 75 10 M5 thread SS0755-VC Page 742 Body Ported C2 (2) C4 (4) N1 (1/8") N3 (5/32") C2 (2) C4 (4) N1 (1/8") N3 (5/32") Connector kit Single Unit S076-5-Page 747 Base Mounted M5 thread M5 thread Connector kit 14 Note 4) S075-5-M5 Note 1) Maximum stations in the case of mixed single and double wiring (special wiring specifications) Note 2) Differs depending on the serial unit type

CA2

XC6 CA2 CA2W MK ML+ Adjustment CA2 Piston rod and rod end nut made of stainless steel Stroke MH + Stroke + Adjustment length CS1 ZZ + 2 strokes + Adjustment length (A: 25, B: 50) Specifications Action Cushion Double acting, Single/Double rod Air cushion C76 Bore size (mm) ZZ 180 197 205 253 267 MA 27 32 32 36 46 MK 12 15 15 20 20 MI 32 38 38 45 55 MH 45 49 49 66 69 ML 20 21 21 32 32 MM 14

CL

(R) MLGC Manual unlocking cam M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking 71 46 6 M5 x 0.8 unlocking port Unlocked when pressurized CNG 31 M5 x 0.8 Rod side cylinder port Lock nut MNB M14 x 1.0 M6 x 1.0 5 M5 x 0.8 Head side cylinder port 5 32 34 6.5 48.5 CNA 6 20 18 24 CNS 2.3 18 54 42 32 CLS 2-5.5 Mounting hole 9.5 11.5 65 14 39 20 111 + Stroke 150

CL

Area: (800) 258-9200-www.stevenengineering.com M14 x 1.0 M5 x 0.8 Head side cylinder port 5 5 32 34 48.5 6.5 M6 x 1.0 6 20 18 Width across flats 10 18 9.5 11.5 65 39 20 14 32 111 + Stroke 150 + Stroke Axial Foot Style (L) E D P CLJ2L1619 16 LOCK FREE 2 42 54 6 Silencer 12 Piping port M5 x 0.8 25.5 Spring lock Head cover port in axial direction (R) Manual unlocking cam M5 x 0.8 Pressurized

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (Female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc 1/8 Connection/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 20 to 32 Pad dia.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Symbol Manifold Without port Nil 0 2 3 5 Filter only Vacuum pressure switch 0 1 2 3 4 5 Without fitting (M5 x 0.8) Without fitting (M5 x 0.8) VVQ1000-50A-M5 KJS04-M5 4 (Straight) 3.2 (Straight) KJS23-M5 VVQ1000-50A-C3 Single unit KJS06-M5 6 (Straight) 4 (Straight) KJS04-M5 VVQ1000-50A-C4 KJL04-M5 4 (Elbow) 6 (Straight) KJS06-M5 VVQ1000-50A-C6 3.2 (Elbow) KJL23-M5 VVQ1000-F1-LC3 4 (Elbow

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Standard Specifications Weight Table (g) Pad diameter (mm) Vacuum entry (female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc(PT)1/8 Mounting/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 Pad diameter (mm) 20 to 32 Rc(PT)1/8 M8 x 1.25 40, 50 Rc(PT)1/8 Ball joint rotation 15 Pad Types Ball joint Pad

Vacuum Pad: Ball Joint Type

Mounting female thread Vacuum entry port 6 tube 4 tube 8 tube Mounting Connection 10 to 16 One-touch fitting M5 x 0.8 19 18 Female thread 4 tube M5 x 0.8 22 23 20 to 32 M5 x 0.8 10 to 16 6 tube M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 40, 50 Pad dia.

SZ3000

KQ2P-04 KQ2P-06 KQ2P-08 4 6 32 16 6 8 35 18 8 10 39 20.5 A A A B A B A FREE LOCK 1-3-11 12 Series SZ3000 Manifold Option DIN rail dimensions/Weight D-sub connector (25 pins)/Cable assembly AXT100-DS25015 030 050 VZ1000-11-1Refer to the L dimension tables Enter a number from the DIN rail dimension table below.

Air Cylinder Series CA2

MQ Bore size (mm) A AL B B1 C CD CX CZ D E F G H1 J K KA L MM RHC 40 +0.3 +0.1 +0.058 0 30 27 60 22 44 29.5 16 32 10 15 8 M8 x 1.25 6 14 30 M14 x 1.5 15.0 10 50 +0.3 +0.1 +0.070 0 35 32 70 27 52 38 20 40 10 17 11 M8 x 1.25 7 18 35 M18 x 1.5 18.0 12 RZQ 63 +0.3 +0.1 +0.070 0 35 32 85 27 64 49 20 40 10 17 11 M10 x 1.25 7 18 40 M18 x 1.5 25.0 16 80 +0.3 +0.1 +0.084 0 40 37 102 32 78 61 25 52

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(R)wYwC4, C6, M5 L plug connector (L): VQZ222 (R)wLwC4, C6, M5 VZS Indicator light VFS 135 <137> 300 VS (Lead wire length) 67.5 <68.5> VS7 32 <35.5> Pg.7 142.5 MAX.10 71.5 Applicable cord O.D.

Fieldbus System

(32 pins) Note1) 2) Note 1) Cannot be communicated with the EX600-HT1-l.

Fieldbus System

Cylinder port size C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow with 3.2 One-touch fitting Top ported elbow with 4 One-touch fitting Top ported elbow with 6 One-touch fitting M5 thread Bottom ported elbow with 3.2 One-touch fitting Bottom ported elbow with 4

SZ3000

KQ2P-04 KQ2P-06 KQ2P-08 4 16 32 6 6 18 35 8 8 20.5 39 10 A A A B A B A FREE LOCK 1-3-11 Series SZ3000 Manifold Option DIN rail dimensions/Weight D-sub connector (25 pins)/Cable assembly AXT100-DS25015 030 050 VZ1000-11-1Refer to the L dimension tables Enter a number from the DIN rail dimension table below.