Micro Mechanical Valve Series VM1000

F.O.F. 5.8 mm 52 N 2 x 4.6 mounting hole VM220-02-30R/B/G/Y-X219 VM230-02-30R/B/G/Y-X219 40 Panel mounting hole T.T. 30.5 31 EXH port (3 port only) 1.5 1.5 0.8 to 7.5 3 29.1 Symbol (112.1) (OUT) 2 2 port (81.1) OUT 10 12 1 (IN) IN VM2 SMC 52 22 13 3 port (OUT) 2 32 10 16 12 1 (IN) 3 (EXH.) 30 25 0.5 MPa supply T.T.

Compact Cylinder with Lock Series CLQ

1.5 12 14 32, 40 I-G04 10 18 42 14 22 30 M14 x 1.5 12 14 10 50, 63 Y-G05 56 20 28 40 M18 x 1.5 16 20 50, 63 I-G05 14 22 56 18 28 40 M18 x 1.5 16 20 14 80 Y-G08 71 23 38 50 M22 x 1.5 21 27 80 I-G08 18 28 71 21 38 50 M22 x 1.5 21 27 18 100 Y-G10 79 24 44 55 M26 x 1.5 24 31 100 I-G10 22 32 79 21 44 55 M26 x 1.5 24 31 22 Applicable bore size (mm) Applicable pin part no.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

-42 Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Round head combination screw M3 x 31, Matt nickel plated (with spring washer) Round head combination screw M3 x 31, Matt nickel plated (with spring washer) Individual EXH Spacer Assembly SYJ7000-17-1 A SYJ7000-17-2 A Thread type Thread type Nil F N T Nil F N T Rc G NPT NPTF Rc G NPT NPTF Round head combination screw M3 x 47 Matt nickel

AC Servo Motor Driver

bits M0 Error flag D1 ABS data: Upper 16 bits M1 ABS data transmission start D2 Checksum addition counter M2 Retry command D3 Check data in case of checksum error M3 ABS data read D4 Transmission retry count in checksum discrepancy M4 M5 Servo-on request reset permission Servo-on request D24 Home position address: Lower 16 bits M6 Retry flag D25 Home position address: Upper 16 bits M10 M11

PSxx-OMT0001CN

ISA-14 2 ISA-16-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 ZS-31-B ZS-31-C 4 6 DIN ISA-5L ISA-5-1 73.0 1 ISA-5-2 135.5 2 ISA-5-3 173.0 3 ISA-5-4 210.5 4 ISA-5-5 248.0 5 ISA-5-6 285.5 6 ISA-12ISA-15 Rc1/8 ISA-12-A CF G1/8 ISA-12-C -11No.PS-OMT0001CN-E 2 ISA-21ISA-20 2 ISA-21-2 3 ISA-21-3 4 ISA-21-4 5 ISA-21-5 6 ISA-21-6 AR20-02-1-B 0.4MPaMPa 0.2MPaMPa 60PSI0.4MPa PSI 2

High Purity Chemical Valve

Inch sizes (1/8), (3/16), 1/4 Lock nut Locks the adjustment knob position.

SV

to 16 solenoids possible.)

17

(mm) Model M1 M2 m2 M3 m3 1.

MXW

For details, refer to page 8-30-31. 8-7-22

NCG/CG1

WH Rod End Lock: -R Head End Lock: -H Bore size (mm) Bore size (mm) WH W P WA WB WH W P WA WB 20 M5 x 0.8 16 15(16) 30 M5 x 0.8 16 16 30 23 23 20 25 M5 x 0.8 16 15(16) 30 30 M5 x 0.8 16 16 25 25 25 32 Rc 1/8 16 15(16) 25 Rc 1/8 16 16 25 28.5 28.5 32 40 20 Rc 1/8 16 15(16) Rc 1/8 16 16 20 33 33 40 50 20 Rc 1/4 18 17(18) 40.5 Rc 1/4 18 18 20 40.5 50 63 47.5 20 Rc 1/4 18 17(18) Rc 1/4 18 18

IZx-OMR0035

Accessories Emitter cartridge Power supply cable Filter Fan type Nil None Model U with Filter Symbol Max. air flow Automatic cleaning unit, Louver 21 1.8 m3/min Nil None 31 4.4 m3/min S with Automatic cleaning unit Input/Output specifications W with Louver Nil NPN Input/output Y with Automatic cleaning unit and Louver P PNP Input/output Bracket Nil None Power supply cable, AC adapter Nil

1.1

Fluid Material 4 to 16 Air, Water Nylon 4 to 16 Air, Water Polyurethane 4 to 12 FEP (Fluoropolymer) Air, Water, Inert gas 4 to 12 Air, Water, Inert gas Modified PTFE (Soft fluoropolymer) Deionized water, Chemicals, etc.

Low Profile Guide Type

Find the value of M1 max at 300 mm/s in Graph (1). 2a =M1/M1 max =1.47/14 =0.105 M1 L1 M3 = m x g x L2 = 3 x 9.8 x 0.04 = 1.176 [Nm] m x g Investigate M3. M3 Find the value of M3 max at 300 mm/s in Graph (3). 2b = M3/M3 max = 1.176/14 = 0.084 L2 m x g 3.

Air Cylinder Series CM2

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 6, 8 3.2, 4 8, 10 3.2, 4, 6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" Inch size 5/32" 3/16" 7 12 Air flow (l/min (ANR)) 38 Controlled flow 0.1 0.2 Effective area (mm2) 0.6 230 180 460 100 Flow rate (l/min (ANR)) 260 390

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Flow Rate and Sonic Conductance AS121F-M3 AS121F-M5 AS131F-M5 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS131F-M3 Model AS121F-M5-02 2, 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size Tubing O.D. 1/8" , 3/16" 1/8" , 5/32" 1/8" , 5/32" 3/16" , 1/4" , 1/4" , 5/16" , 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 1/4" , 5/32" 5/16" 3/8" Controlled

Sine Rodless Cylinder Series REBR Direct Mount Type

REBH25 Load weight W (kg) 25 REBH15 10 REBHT25 9 40 REBHT32 5 4 3 W 2 W 1 0.5 70 100 300 500600 Maximum speed U (mm/s) Moment M1, M3 M2 (Static moment/Dynamic moment ) Allowable moment 100 100 85 96 REBHT32 REBHT32 64 56 50 40 30 50 40 30 (Nm) REBHT25 REBH25 REBHT25 REBH25 Model REBH15 REBH25 REBHT25 REBHT32 M2 16 26 85 96 M3 10 28 56 64 M1 10 28 56 64 28 26 20 20 16 REBH15 REBH15

3 Port Air Operated Valve Series SYJA300

plated Round head combination screw M3 x 31, Matt nickel plated Round head combination screw M3 x 31, Matt nickel plated SYJ700-10-2 Blanking plate V100 SYJ700-5-1 Gasket SY SYJ VK VZ VT Gasket Gasket SYJ700-5-3 SYJ700-5-4 VP VG Applicable base Sub-plate SS3YJ7-40 SS3YJ7-41 SS3YJ7-42 SS3YJ7-41R SS3YJ7-42R VP Applicable base SS3YJ7-20 SS3YJ7-21 SS3YJ7-21R Manifold base S070 Manifold base

AHC System Series MA

Tool adapter <10/15> MA 210 A M3 A210 10 MHR2 Cylinder bore For MA2 With adapter Air connection size 10 mm 15 mm 10 15 Auto hand changer M3 M3 x 0.5 <10/16> MHZ Tool adapter A210 D 16 MHZ2 Y69A N Transportable mass MHF Transportable mass 3 kg 2 Cylinder bore MHL For MA2 With adapter 10 mm 16 mm 10 16 MHR Finger position MHK Standard Narrow type Nil N MHS Auto switch type Nil Without auto

Vacuum Unit Ejector / Vacuum Pump System

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 11. Note 2) A model with PD port (M3) is available as an option. Refer to page 11.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,