SQ1000/2000

Note) When using the negative COM specification, use valves for negative COM. 31 Plug-in Type Series SQ2000 L3 L4 67 10 L2 Indicator light L1 48.7 P = 17.5 28.8 1 Manual override 131.5 [Single, double, dual 3 port valve] D side U side 2-M4 Clamp screw 5.5 147 (3 position) Approx. 12 (131.5) 122.3 4 A 35 56 53.6 2 B 37.6 18.5 M5: External pilot port Approx. 12 58 EXH outlet 77 D side U side

ITV

wiring diagram Analog output, voltage type Brown Blue White Breathing hole M3 x 0.5 Monitor output voltage Black 2 14-8-11 12 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 14-8-12 13 Electro-pneumatic Regulator Series ITV1000/2000/3000 F.R.L.

Clamp Cylinder with Lock

x 6 11 31 Dust cover 20 60 25 34 + Stroke 5 6 12 53 4 12 3 x Rc1/8 Retraction port 3 x Rc1/8 Extension port Head end cushion valve 47 45 9.5 M10 x 1.25 12 40 47 10 26 Width across flats 10 Width across flats 36 26 R12 12 +0.5 +0.2 0.040 0.076 Shaft: 10d9 Hole: 10H8 +0.022 0 26 12 6 55 41.2 102 + Stroke 169 + Stroke Note) Refer to page 14 and 15 for Accessories.

•

ZPR10g 10 12 12 21 29.9 46 20 67 25 72 3 17 27 ( ::) 2PR02 26 '-I 26 27 ('J;) \ .2PR08 ZPR13g 13 15 12 21 29.9 46 20 67 25 72 3 1.B ( '2~4' ZPR16g 16 '8 12.5 21 .5 29 30 30.4 46.5 20 67.5 25 72.5 3.5 1.2 ZPR'1O 29 31 29 31 29 31 ZPR13 Deep type (mm) Model A 'B C D E F 1:M5xO.a 1:M6x1 Y' .,G H 1 ZPRl6 31 31 G H ..

Micro Mechanical Valve Series VM1000

Panel mounting hole VM120-01-30R/B/G/Y-X219 VM130-01-30R/B/G/Y-X219 40 T.T. 30.5 31 1.5 1.5 0.8 to 7.5 Symbol (85.1) 3 (A) 2 2 port 29.1 10 12 (54.1) 1 (P) P A 3 port 17 5.5 (A) 2 25 R port (3 port only) 14.5 14.5 10 12 1 (P) 3 (R) 25.4 2 x 1/8 17 17 44 0.5 MPa supply T.T.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

max. m2, m3 max. m1 max.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

-42 Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Round head combination screw M3 x 31, Matt nickel plated (with spring washer) Round head combination screw M3 x 31, Matt nickel plated (with spring washer) Individual EXH Spacer Assembly SYJ7000-17-1 A SYJ7000-17-2 A Thread type Thread type Nil F N T Nil F N T Rc G NPT NPTF Rc G NPT NPTF Round head combination screw M3 x 47 Matt nickel

Fieldbus system EtherCAT compatible SI Unit

Enum081C 0=No error 1=Error 50x1:0 Over counter limit error UNSIGNED8 Number of Channels 50x1:01 50x1:20 Channel 0 Channel 31 Enum081C 0=No error 1=Error 50x2:0 Open circuit error UNSIGNED8 Number of Channels 50x2:01 50x2:20 Channel 0 Channel 31 Enum081C 0=No error 1=Error 50x3:0 Counter value UNSIGNED8 Number of Channels 50x2:01 50x2:20 Channel 0 Channel 31 UNSIGNED32 0 to 0xF 50xE

PSxx-OMT0001CN

3 () 2 E210-U01 ZS-31-C ZS-31-B Y200T-A ISA-18 2.6 ISA-15 ISA-16ISA-17 ISA-12-41No.PS-OMT0001CN-E 4 80 kPa220 kPa (ON/OFF) OFF ON (43 ) 1 5 2 OUT1 OUT2 / (62 ) (48 ) (45 ) ,[F10](56 ) -42No.PS-OMT0001CN-E 4 () (ON/OFF) () (45 )OUT1

Rotary Table/Vane Style Series MSU

MSUA1 MSUA1-S,SE C 8 x M3 x 0.5 depth 5 51 31 38 23.5 B 25 4 x M4 x 0.7 depth 4 22.5 4.5 +0.025 0 2.5H9 A Long groove depth 4 (Positioning pin hole) 35h9 0 0.062 22.5 3 x 3H9 depth 3 +0.025 0 +0.043 0 17 H9 ( A , B , C ) 27 2.5 2 2 x 4.5 through 12.5 37 8 6.5 10.3 6.5 31 4.2 2 31.5 2 36h9 0 0.062 27 16 9 5 4.5 Angle adjustment bolt 2 x 4.5 through 2 x M3 x 0.5 1 5 Adjustment: Max. 7.5 B port

Compact Cylinder with Lock Series CLQ

CNG YA-03 YA-05 YA-08 YA-10 18 6.8 16 6 42 6.5 10 YA 03 20 9 20 8 50 6.5 12 MNB Applicable air cylinder bore 26 11 25 10 62 8.5 16 31 14 30 12 76 10.5 18 CNA 03 05 08 10 32, 40 50, 63 80 100 Bore size (mm) 32, 40 50, 63 80 100 Mounting bracket U V W Mass (g) Part no.

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

PSxx-OMR0001CN

DCVX2 (2 )VX2 -37No.PS-OMR0001CN-J 3 ISA-19ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 2.6 ISA-14 -38No.PS-OMR0001CN-J 3 () ISA-19ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 ISA-20 E210-U01 2 ISA-17 2.6 2.6 Y200T-A -39No.PS-OMR0001CN-J 3 () 2 2 E210-U01 ZS-31-C ZS-31-C ZS-31-B Y200T-A Y200T-A ISA-18 2.6 ISA-15 ISA-16ISA-17 ISA-12-40No.PS-OMR0001CN-J 4 80 kPa220 kPa

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

, B , C ) 27 2.5 2 3-R1.5 2-4.5 through 12.5 37 8 6.5 10.3 6.5 31 4.2 2 31.5 2 36h9 0 0.062 27 16 9 5 4.5 Angle adjustment bolt 2-4.5 through 3-R1.5 2-M3 x 0.5 1 5 Adjustment: Max. 7.5 0.5 B port A port +0.025 0 3-3H9 long groove depth 2.5 4g6 0.004 0.012 ( A , B , C ) 9h9 0 0.036 29 4-M4 x 0.7 depth 8 2-M3 x 0.5 depth 4 0 0.062 36h9 Top ported: MSUA1-SE A port B port 9.5 2-M3 x 0.5 8.5 11

1.1

Refer to page 12 for details.

17

(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5

AC Servo Motor Driver

1 12.

ZSE30A(F)/ISE30A

0 0.4 31 x n pcs. + 3.5 x (n pcs. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less 24 or more Multiple (2 pcs. or more) vertical mounting 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 40 ZSE30A(F)/ISE30A Series 2-Color Display High-Precision Digital Pressure Switch The F in ( ) shows the function code number.

10

The KQ2 series information can be downloaded from the following SMC website, http://www.smcworld.com 6, 8 8, 10 10, 12 53.5 66 68 29 36 37 65.5 (71.5) 76.5 (84.5) 84 (92) 30 35 40 13.5 15 16.5 20 22 24.5 22 27 31 52 62 67 26 31 33.5 30 35 40 Electrical entry Size One-touch fitting P Grommet Grommet (with surge voltage suppressor) DIN terminal Conduit terminal Q 42.5 (48) 51 (59) 56.5 (64.5

MXW

For details, refer to page 8-30-31. 8-7-22