Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D 35 40 45 50 55 60 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 50 55 60 65 70 75 80 D' 85 90 95 120 145 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D' 40 45 50 55 60 65 45 50 55 60 65 70 45 50

Modular F.R.L. Units

IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Made to Order

115 74 48 17 135 20 46 M45 x 1.5 260 50 71 67 140 86 60 20 160 25 56 M56 x 2.0 285 60 71 67 140 86 60 20 160 25 56 M56 x 2.0 296.5 60 80 76 140 96 60 20 175 30 65 M64 x 2.0 325 70 ZZ + Stroke 80 76 140 96 60 20 175 30 65 M64 x 2.0 325 70 1728 Made to Order Common Specifications: -XB6: Heat Resistant Cylinder (10 to 150C) Symbol -XB6 Heat Resistant Cylinder (10 to 150C) 2 Air cylinder which

42

Seal Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC Series Enter in order starting from the first station on the D side.

Battery-less

5 r t w q y !6 !

CV/MVGQ

75 41 20 0 0.033 Up to 300 17 32 37 6 8 22 10 70.5 19.5 13 40 7 4 60 75 45 26 0 0.033 RS Q G Up to 300 17 32 37 6 8 22 12 76.5 19.5 13 40 7 4 60 75 45 26 0 0.033 Up to 300 22 41 47.3 8 10 24 14 84.5 21 16 52 7 5 66 36 82 50 32 0 0.039 RS H A K MM N NA NN Q QY S Z ZZ I Bore size (mm) 20 25 32 40 RZQ 5 M8 x 1.25 15 24 M20 x 1.5 19.8 14 62 107 116 28 5.5 M10 x 1.25 15 30 M26 x 1.5 22 14 62

CV/MVGQ

4 34 7 15.5 13 18 8 65.3 Up to 300 13 26 30 5 8 20 0 0.033 45 75 60 4 40 7 19.5 13 22 10 70.5 Up to 300 17 32 37 6 8 26 0 0.033 RS Q G 45 75 60 4 40 7 19.5 13 22 12 76.5 Up to 300 17 32 37 6 8 26 0 0.033 50 82 36 66 5 52 7 21 16 24 14 84.5 Up to 300 22 41 47.3 8 10 32 0 0.039 RS H A ZZ Z S QY Q NN NA N MM K I Bore size (mm) 20 25 32 40 RZQ 116 107 62 14 19.8 M20 x 1.5 24 15 M8 x 1.25 5

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

Hydraulic

Q: Required fluid volume for extension (l/min) Q: Required fluid volume for retraction (l/min) D: Bore size (cm) d: Piston rod diameter (cm) : Piston speed (mm/s) Q = D __ 4 6 _ 1000 Formula (1) Q = (D d) __ 4 6 _ 1000 ..

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

Air Slide Table

1,950 (60) 2,250 (60) 2,350 (60) 60 (25) MXQ25A 1,880 1,920 2,020 2,020 2,420 2,520 2,930 3,530 3,730 100 * Value in ( ) is the additional weight of the shock absorber.

One-touch Fittings

57.4 45.4 9 18.4 L M L D L L M Q Q D 2 x N 2 x O Q Q Different Diameter Cross: KQ2TX Applicable tubing b Applicable tubing O.D.

Thermo-chiller

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation T1: Outlet Thermo-chiller temperature amount Customer equipment T = T2 T1 7325 [W] = 7.3 [kW]

Table of Contents

Hz) Three phases 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Single phase 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Power source 90 130 0.4 0.45 1.44 1.4 50 60 0.4 0.35 55 65 0.8 0.9 38 46 132 x 2 170 x 2 0.23 0.26 50 Hz 60 Hz 50 Hz 60 Hz Power consumption (W) 0.46 0.52 Current (A) Compact size and lightweight Uses minimal floor space Built-in

High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base Sub-plate 10-SS3YJ3-41(-Q) 10-SS3YJ3-S41(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base 10-SS3YJ3-20(-Q) Manifold base Manifold base Manifold base Note) Add suffix -Q for the CE-compliant product.

Air Cylinder Series CM2

2 x FD FX FZ FT N K A AL Mounting hole QY NA N S + Stroke ZZ + Stroke CG1 Width across flats KA H 40 MB P 32 to 40 (Rod side pressure port) MB1 CA2 4 x FD Mounting hole (mm) CS1 G FZ FY FX FT FD FB F H1 MM B1 D H K KA N NA NN H2 AL B2 A I C2 P Q ZZ Z S QY Bore size 8 1 20 75 60 4 7 34 13 8 41 5 6 15 24 5 18 13 28 8 26 37 62 14 30 M8 x 1.25 M20 x 1.5 103 15.5 19.8 CS2 8 1 25 75 60 4 7

Electric Actuator

(50/60 Hz) 200 to 230 VAC (50/60 Hz) Three phase 200 to 230 VAC (50/60 Hz) Regeneration Page 79 option PC Part no.: LEC-MR-RB-m Analog monitor output RS-422 communication Q Motor cable Page 79 Standard cable Robotic cable LE-CSM-Smm LE-CSM-Rmm Q Control circuit Q Lock cable Page 79 power supply connector Accessory Page 76 Standard cable Robotic cable LE-CSB-Smm LE-CSB-Rmm Q I/O connector