LEC-OM02904

() AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) AWG 19(/) (b) 10m 10m 2m 11.5 2m 2m MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H LE-CSM50m 50m MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L CNP3 AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) AWG 19(/) () () b) a) .

VQ5000

Refer to How to Order Manifold. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 D-sub Connector Cable Assembly (Option) Electric Characteristics Multi-core vinyl cable 0.3 mm2 x 25C Item Characteristics Cable length (L) Assembly part no.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

27 37 5 44 MXPJ65 35 53 42 47 10 59 MXPJ6-10 7 Precision Air Slide Table Series MXP Dimensions MXP6 Piping port 2-M3 x 0.5 (Plug: M-3P) AA 42 7 4 H 2.3 11.2 3 1 1 0.05 D B 9.5 3.5 14 18 20 13 6 5 5 8 F 5 6 Width across flats 2 Width across flats 6 13.5 6 2-M4 x 0.7 Prepared hole dia. 3.3 4-M3 x 0.5 depth 3 17 0.05 Mounting reference planes B D Stroke: S M 2 M4 x 0.7 J 3 Z Max. 9.5 (rubber

AC Servo Motor Driver (SSCNET /H Type)

Parameter Configuration using Setup software (MR Configurator2TM) 16 6.1 Setup software (MR Configurator2TM) . 16 6.1.1 Installation Method . 16 6.2 Basic driver set-up for Initial Test Drive . 16 6.2.1 Start up the Setup software (MR Configurator2TM) . 17 6.2.2 System Settings . 18 6.2.3 Model Selection . 18 6.2.4 Driver ON LINE Check . 19 6.2.5 Help Function . 19 6.3 Parameter setting (

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VP7 285.5 21 273 No.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24

VCS

Valve model Port size VCS21 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04A Note 1) 1/2 VCS41 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket

HRL

Laser optical system Laser oscillator Optical system CH2 Oscillator CH1 Oscillator Optical system CH1 CH2 Cooling capacity [kW] 9, 19, 26 1 (Max. 1.5) Temperature stability [C] 0.1 0.5 Set temperature range [C] 15 to 25 20 to 40*1 *1 CH2 CH1 Space saving, Reduced wiring Dual thermo-chiller Thermo-chiller 1 unit 2 units Footprint 22% reduction To oscillator To optical system CH2 To optical

HRX-OM-Y098

(Recommended tightening torque64 to 70Nm) CH2 particle filter Gasket(1/2) Fig. 3-19 CH2 side Installation of particle filter 6. Attach the CH2 filter bracket.

15

Bore size (mm) Contents 6 Set of the nos. 4, 5, 13, 19, 24, 39 CY1S6-Z-PS 10 Set of the nos. 4, 13, 19, 20, 24, 39 CY1S10-Z-PS 15 CY1S15-Z-PS 20 CY1S20-Z-PS Set of the nos. 4, 5, 6, 13, 19, 20, 24, 39 25 CY1S25-Z-PS CY3B CY3R 32 CY1S32-Z-PS 40 CY1S40-Z-PS CY1S CY1S Note 1) Seal kit includes 4, 5, 13, 19, 24, 39 for 6. 4, 13, 19, 20, 24, 39 for 10. 4, 5, 6, 13, 19, 20, 24, 39 are for 15 to

Vacuum Pad

31.5 38 48 11 14.5 20.5 8.4 9.6 11.7 8.5 9.7 11.8 12 15 19 31.5 38 48 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

HRX-OM-R016

Table 9-2 Compliance EMC Directive 2004/108/EC CE Marking Machinery Directive 2006/42/EC NRTL E112803(UL61010-1) HRS Series 9.8 Compliance 9-9 HRX-OM-R016 Chapter 9 Documents 9.9 Sample DoC. Sample DoC.

ZPT/ZPX

Width across flats 24 Hexagon width across flats 19 28 Width across flats 24 ZX ZR A 6 ZM 3 B A ZH B 18 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 18 ZL ZY ZQ (mm) Model A 40 ZPT40H-B8 C M8 x 1.25 40 ZPT40H-B10 42 M10 x 1.5 B 42 ZF (mm) B 42 50 ZPT50H-A14

REA/REB

MK(2) REAR20 30 REAR25 30 RS Q G REAR32 30 REAR40 35 RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-19 19 Series REAR Construction: 10, 15 @1 q i y u e t r o !0 @2 !4 !5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @5 @6 !2 !

REA/REB

MK(2) REAR20 30 REAR25 30 RS Q G REAR32 30 REAR40 35 RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-19 19 Series REAR Construction: 10, 15 @1 q i y u e t r o !0 @2 !4 !5 @5 @6 !2 !7 @7 !9 @3 !8 @0 !1 w N@4 !6 !3 REAR10 Component Parts No. Description No. Material Aluminum alloy Description Note Material Note Hard anodized Wear ring A Special resin Body q !

Basic Type/Direct Mount Type

numbers 15 through 19.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 2 x M2.5 x 0.45 thread depth 3 Operating port 2 x M3 x 0.5 Vacuum suction port M5 x 0.8 2 6 J I 5 Max. 10.5 (With stroke adjuster at retraction end) 4 7 0.5 19 3 5.5 5.5 5.5 3 3 6.5 2 x M2.5 x 0.45 thread depth 3 12.5 K Stroke adjuster at extension end Stroke adjuster at retraction end (With stroke adjuster at extension end) 18 N x M3 x 0.5

SMC

52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6-10 13-/22-MXS6-20 13-/22-MXS6-30 13-/22-MXS6-40 13-/22-MXS6-50 134 MXS Air slide table 1322Dimensions: MXS6 13221322Axial piping type (6): MXS6-P Air cylinder Rotary actuator Air gripper

3 Port Solenoid Valve Series SYJ300/500/700

Type 42 Applicable solenoid valve SYJ314SYJ314MSYJ324SYJ324MHow to Order SS3YJ3-42-05 -M5 Type 42 Type S42 Pilot valve is on the A port side. Valve mounting direction ( ) Stations Pilot valve is opposite the A port side. Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

VCW

Valve model VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket) are included