Piping: Base Mounted, Stations: 5 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 5 Stations, A, B Port: NPTF1/8

Piping: 41 (Base Mounted), Stations: 5 Stations, A, B Port: 01T (NPTF1/8)

Piping: 40 (Base Mounted), Stations: 5 Stations, A, B Port: 01T (NPTF1/8)

Piping: 42R (Base Mounted), Stations: 5 Stations, A, B Port: 01T (NPTF1/8)

Piping: 41R (Base Mounted), Stations: 5 Stations, A, B Port: 01T (NPTF1/8)

CEx-OMQ0011

5m 10 10m 15 15m 20 20m C A B CD E F G () 25 7-1 AA BB CC DD EE HA KA KB KK 9 45.5 5.5 M5x0.8 9.5 69 30.5 16 M6x1 11 54 6.5 M6x1 12 84 32 15 M8x1.25 14 64 8.5 M8x1.25 12 102 41.5 19 M10x1.5 R S T U V W X Y Z 22 63.5 23.5 22 41 16 9 30 34.5 26 77.5 32.5 27 56 19 10 37 42 37.5 95 50.5 35 68 23 23 45 51 I J K L M N O P Q 76.5 40 46 28 11 14.5 28 15 16 91 46.5 58 32 15 16 30.5 16 21.5 110 55

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 13.8 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V 1. It is able to change the cylinder port between side ported and top ported.

AC Servo Motor Driver (SSCNET Type)

Project will be loaded. -42- 6.9 Acquisition of motion waveform with graph monitor With the setup software (MR Configurator2TM: LEC-MRC2E) monitor graph function, the motion waveform during electric actuator operation can be obtained as described below. Click Monitor Graph of Setup software to display Graph window.

Piping: Base Mounted, Stations: 7 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 11 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 13 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 15 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 17 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 18 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 19 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 2 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 3 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 4 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 6 Stations, A, B Port: NPTF1/8