CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Round Type Hydraulic Cylinder

30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 19 44 24 21 (mm) Foot bracket plate thickness is dimension LT + 1 mm.

Modular F.R.L. Unit

Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

for 21-/22-CJ2.

Vacuum Pad

Dimensions: With Buffer ZP3P-T20PTSFJM-B5 ZP3P-T20PTSFKM-B5 Width across flats 8 M5 x 0.8 Width across flats 8 M5 x 0.8 5 1.6 5 Width across flats 14 Width across flats 14 3 3 3 3 17 21 A D B 17 21 A D B M10 x 1 M10 x 1 M5 x 0.8 Gasket M5 x 0.8 Gasket Width across flats 14 Width across flats 14 20 2.5 20 2.5 1.6 Dimensions Dimensions Part no.

2/3 Port Valve

Refer p.4.1-20, 4.1-21 for specifications and models.

VM

Push button (Flush) VM120-01-33 VM130-01-33 Panel mounting hole JIS Symbol 2 port 3 port R port (3 port only) 0.5 MPa supply 4.9 mm P.T. 21 N F.O.F. 2-4.6 mounting hole 1.6 mm O.T. 6.5 mm T.T. 5-6-15 14 Series VM100 Series VM100/Side Ported Twist selector (2 position) VM120-01-34R/B/G/Y VM130-01-34R/B/G/Y JIS Symbol 2 port Panel mounting hole 3 port R port (3 port only) Courtesy of Steven

IDG

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and pages 14-14-6 to 14-14-8 for Precautions on every series. 5. Tightening torque for installing the membrane module and the case (for IDG5/10/20/5H/10H/20H) Use caution not to tighten excessively.

HRX-OM-X071

output is set) Elapsed time Alarm manual reset Alarm manual reset State : An alarm "AL.14" is issued when the chiller is activated.

Series: VQZ300, Stations: 14 Stations, Option: DIN Rail Mounting, Thread: 00T, CE Compliant: -

Series: VQZ200, Stations: 14 Stations, Option: None, Thread: 00T, CE Compliant: -

Series: VQZ300, Stations: 14 Stations, Option: None, Thread: 00T, CE Compliant: -

Series: 2 (VQ20), Stations: 14 Stations, Option: DO (DIN Rail Mount w/o DIN Rail), Thread: 00T (NPTF3/8)

Valve Mounting Direction: Solenoid on the Side Opposite to A Port, Piping: 20R (Body Ported), Stations: 14 Stations, A Port Size: None, P R Port Thread: 00T (NPTF)

Piping: 20 (Body Ported), Stations: 14 Stations, A, B Port: 00T (NPTF)

Piping: 21R (Body Ported), Stations: 14 Stations, A, B Port: 00T (NPTF)

Series: 3 (VQZ300), Stations: 14 Stations, Option: D (DIN Rail Mounting), Thread: 00T

Series: 2 (VQZ200), Stations: 14 Stations, Option: None, Thread: 00T

Series: 3 (VQZ300), Stations: 14 Stations, Option: None, Thread: 00T