Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Stations D side U side SOL.A 1 ( ) ( + ) Black None SOL.B 14 ( ) ( + ) Yellow Black 1 station 1 14 SOL.A 2 ( ) ( + ) Brown None 2 15 SOL.B 15 ( ) ( + ) Pink Black 2 stations 3 16 4 SOL.A 3 ( ) ( + ) Red None 17 5 SOL.B 16 ( ) ( + ) Blue White 3 stations 18 6 19 SOL.A 4 ( ) ( + ) Orange None 7 SOL.B 17 ( ) ( + ) Purple None 4 stations 20 8 21 SOL.A 5 ( ) ( + ) Yellow None 9 22 SOL.B

Round Type Low Pressure Hydraulic Cylinder Series CH
M

19 15 M24 x 1.5 1/8 14.5 81 15 142 156.5 19.5 32 31 f8 to 800 24 22 12 16 16 19 12 8 53 8 40 7.5 M14 x 1.5 13 36 19 15 M30 x 1.5 1/8 18.5 87 20 160 178.5 21 40 34 f8 to 800 24 24 12 24 18 21 14 11 54 10 48 7.5 M16 x 1.5 19 44 24 21 M33 x 2 1/4 22.5 108 20 182 204.5 21 51 Round Type Low Pressure Hydraulic Cylinder: 3.5MPa Series CHM Accessories (Standard) Rod end nut Mounting nut 30 30 d

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

25 14 24 5 14 M4 x 0.7 x 6 6.5 CY1R50 14 14 8.2 5 2 53 8.5 83 81.5 85 80 45 84 45 80 9 45 M10 x 1.5 x 15 17 CY1R63 15 14 8.2 5 3 66 8.5 95 93.5 97 92 51 96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q QW TC W WP WS X Y Z PW T Model CY1R 6 7 34 3.5 3.5 M3 x 0.5 3.5 M5 x 0.8 64 10 10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5

Guide Cylinder Series MGG

21 14 Rc 1/8 M6 x 1 depth 13 90 150mm or more 201 82 37 52 65 114 16 38 12 350 to 600 21 14 Rc 1/8 M8 x 1.25 depth 16 101 200mm or more 238 92 44 62 84 138 20 47 12 350 to 800 15 25 Rc 1/4 M10 x 1.5 depth 21 116 250mm or more 285 104 55 75 94 164 25 58 14 26 350 to 1000 16 17 Guide Cylinder Series MGG Basic type/MGGB 63 to 100 4-F through, counter bore G Bottom 4-H Bracket (See table below

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

28.2 ASD430F-N02-11SD 21 3/8" 18.5 19.7 49.3 31 ASD530F-N02-07SD 17 1/4" 13.2 25.6 48.7 20.3 ASD530F-N02-09SD 49.3 15.4 NPT 1/4 18.5 19 5/16" 55.3 1.2 53.7 9.8 23 19.8 15.2 28.2 51.3 ASD530F-N02-11SD 21 3/8" 23.1 18.5 32.6 54.1 ASD530F-N03-07SD 17 1/4" 13.2 25.6 48.7 20.3 ASD530F-N03-09SD 47.4 14 NPT 3/8 19 18.5 53.7 1.2 53.7 9.8 19.8 23 5/16" 15.2 28.2 51.3 ASD530F-N03-11SD 21 3/8" 23.1

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

17 18.5 21 17 18.5 21 21 23.3 20.7 23.9 25.6 28.2 25.6 28.2 31 25.6 28.2 32.6 25.6 28.2 32.6 32.6 35.2 32.6 38.5 42.2 44.8 43.9 46.5 49.3 48.7 51.3 54.1 48.7 51.3 54.1 64.3 38.9 14 NPT 1/8 10.6 31.6 1.5 35.6 7 11.8 14.2 12.7 38.2 15.8 18 NPT 1/4 11 34.7 1.5 41.7 40.7 7 15 18.5 17.5 19.7 20.3 NPT 1/4 15.4 49.3 1.5 55.3 53.7 9.5 19.8 23 19 23.1 20.3 NPT 3/8 14 47.4 1.5 53.7 53.7 19.8 9.5 23

CLS

For details, refer to page 9-9-21.

CP95

size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12 41 54 24 22 35 16 36 10 18 6.6 8.5 12 50 15 16 50 65 33 30 45 21 45 12 20 9 10.5 15 63 15 16 52 67 37 35 50 21 50 12 23 9 10.5 15 80 18 20 66 86 47 40 60 25 63 14 27 11 11.5 18 100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 6-13-12 12 Series CP95 ISO/VDMA Cylinder: Standard Type

CP95

9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

18 NPT 1/8 AS231FG-01-08 AS231FG-N01-05 36.1 31.1 32.1 27.1 28.2 41.7 18.5 23.9 30.9 26.8 8 15.2 3/16" 11.4 12.9 21 14 10.9 14 16.5 12.7 16.2 AS231FG-02-04 AS231FG-N01-07 21.9 40.1 37.2 16 25.6 30.6 29.9 4 10.4 1/4" 13.2 10.9 32 19 18.5 16.2 12.9 16.2 AS231FG-02-06 AS231FG-N01-09 25.2 42.6 41.7 17 28.2 34 30.9 6 12.8 5/16" 15.2 33 21 21 18.4 R 1/4 40.4 35.4 18.5 17 34.4 29.4 AS231FG-02-08

HRX-OM-R016

": Set to "16 oC". [5] "AS.06: Detection temp. for the circulating fluid discharge temp. drop": Set to "14 oC". [6] "AS.23: Range over detection timer "Set to "600 sec".

Sine Cylinder Series REC

I-020B I-032B I-040B 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 18 41 M8 x 1.25 14 10 11 66 46 16 20 36 M8 x 1.25 10 14 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 22 45 14 10 14 69 48 18 20 38 10 14 M10 x 1.25 M10 x 1.25 0.070 0 0.1 0.3 0.070 0 0.1 0.3 12 16 12 16 24 50 20 14 13 92 69 22 24 55 20 M14 x 1.5 M14 x 1.5 15.5 Double Knuckle Joint Mounting Y (Max.) hole H10 Shaft (mm) H L MM ND NX2

Sine Cylinder Series REC

I-020B I-032B I-040B 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 18 41 M8 x 1.25 14 10 11 66 46 16 20 36 M8 x 1.25 10 14 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 22 45 14 10 14 69 48 18 20 38 10 14 M10 x 1.25 M10 x 1.25 0.070 0 0.1 0.3 0.070 0 0.1 0.3 12 16 12 16 24 50 20 14 13 92 69 22 24 55 20 M14 x 1.5 M14 x 1.5 15.5 Double Knuckle Joint Mounting Y (Max.) hole H10 Shaft (mm) H L MM ND NX2

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

C B D P PF2M705/710/725/750W -01(-L) 86.2 11 14 18.2 2.8 depth 8.4 PF2M705/710/725/750W -N1(-L) 86.2 12 14 18.2 2.8 depth 8.4 8 PF2M705/710/725/750W -F1(-L) 86.2 13 14 18.2 2.8 depth 8.4 2 x P PF2M711/721W-02(-L) 88 13 17 20 2.8 depth 6.2 PF2M711/721W-N2(-L) 88 13 17 20 2.8 depth 6.2 PF2M711/721W-F2(-L) 88 17 21 20 2.8 depth 6.2 22 PF2M7(-L) Series Dimensions PF2M701/702/705/710/725/750/

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

31.9 13.1 9.3 12.7 17.5 30.9 AS231F-01-04SD AS231F-N01-01SD 1/8" 8.4 24.9 4 9.3 21 24.4 7.2 12.7 5/32" 9.3 13.1 12 14.2 1.2 31.6 R 1/8 9.3 17.5 22 34.7 30.9 AS231F-01-06SD AS231F-N01-03SD 13.5 10.9 14 26.9 22.9 6 11.6 36.3 24.9 22 AS231F-01-08SD AS231F-N01-05SD NPT 1/8 12.7 7.2 16.5 14 1.2 3/16" 11.4 14 31.6 18.5 12.9 30.9 10.9 23.9 16.2 28.2 8 15.2 25 40.8 37.3 26.8 34.7 AS231F-02-04SD

HRX-OM-X037

Press Menu (2) (4) (5) (1) (3) (12) (13) (7) (14) (15) (8) (6) (9) (10) (11) Status screen 5.4 Description of the Screen HRL Series 5-14 HRX-OM-X037 Chapter 5 Display and Setting of Various Functions Table 5.4-2 Screen display of status screen No.

HRX-OM-W038

": Set to "16 oC". [5] "AS.06: Detection temp. for the circulating fluid discharge temp. drop": Set to "14 oC". [6] "AS.23: Range over detection timer "Set to "600 sec".

SZ3000

14 185.5 175 155.5 15 198 187.5 166 16 210.5 200 176.5 17 210.5 200 187 12 223 212.5 197.5 13 235.5 225 208 14 L n 12 13 14 15 16 11 10 L n 12 13 14 15 16 11 10 L1 L2 L3 L4 L1 L2 L3 L4 235.5 225 208 14 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5

15

5.2 14 4.5 30 M5 x 0.8 8.5 70 50 4.6 13 60 NY M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 11 4.5 30 M4 x 0.7 7 70 50 4.6 13 60 NW M4 x 12 3.6 M4 x 12 1.5 M6 x 14 5.2 9 4.5 30 M5 x 0.8 8.5 70 50 4.6 13 60 NU M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 11 4.5 30 M5 x 0.8 8.5 70 50 4.6 13 60 NT M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 12 8.5 30 M5 x 0.8 8.5 70 50 4.6 17 60 NM1 M3 x 5 0.63 M4 x 12 1.5 M6 x 14 5.2

MK

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.