7ND9071en

9.4 Adjustment.41 9.5 Removal of the limit switches for accessing the valve controller.41 9.6 Circuit diagrams.41 9.7 Maintenance .41 10 TOOLS.41 11 ORDERING SPARE PARTS .41 12 DRAWINGS AND PARTS LISTS.42 12.1 Exploded view ND9100, ND9400, ND7100 .42 12.2 Exploded view ND9100_/D__, ND9100_/I__, ND9100_/K0_ and ND9100_/B06.43 12.3 Exploded view ND9200, ND9300, ND7200 44 12.4 Exploded view

High Power Cylinder Series RHC

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39

IDG

IDG60S to IDG100S IDG3 to IDG50 IDG3H to IDG50H IDG30L, IDG50L Port size Symbol Bore Size V IDG60 to IDG100 IDG60H to IDG100H IDG60L to IDG100L 3 5 10 20 30 50 60 75 100 01 1/8 02 1/4 IDG60S to IDG100S Note) Note) 03 3/8 04 1/2 Note 1) Element service indicator is also available. Refer to Made to Order Specifications on page 14-19-48.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Features .pages 4-5 Preferred Options Guide.page 7 Q Q Base Mounted Valves and Manifolds.page 9 Specifications.pages 10-11 How To Order .pages 12-15 Options .page 16 Q Q Q Body Ported Valves and Manifolds .page 17 Q Specifications.pages 18-19 How To Order .pages 20-23 Options .page 24 Q Q Technical Reference .page 25 Q Dimensional Drawings.pages 26-39 Operations Guide .pages 41

CL

20 25 32 40 0 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 to 400 to 450 to 450 to 500 0 26 20 57.5 69 69 76 73.5 0.033 64.5 83.5 0.033 0 0.033 0 0.033 26 64.5 70 83.5 100.5 90.5 32 Boss cut (mm) MM Bore 20 25 32 40 N 15 15 15 NA 24 30 S 127 137 139 167 Bore ZZ 168 182 184 217 H1 5 6 6 8 K 5 5.5 5.5 7 PL 20 24 24 24 PW 38 41 41 41 I 28 H 41 45 45 50 PH 19.5 24 24 24 ZZ 181 195 197 233 P Z 37 41 41 45

CL

66 22 16 52 14 7 21 47.3 82 4 Up to 500 24 76 90.5 8 70 100.5 11 Boss-cut Bore (mm) PH GL H2 H1 K I NA N S PW ZZ Z PG P NN MM ZZ PL H GR GQ Bore (mm) 20 168 1/8 1/8 1/8 1/4 20 24 15 20 22 5 37 28 181 8 4 6 M20 x 1.5 38 4 5 127 41 M8 x 1.25 19.5 25 182 25 30 24 15 27 5.5 41 33.5 195 7 8 M26 x 1.5 41 9 7 6 137 45 M10 x 1.25 24 32 184 32 34.5 24 15 27 5.5 41 37.5 8 197 7 M26 x 1.5 41 9 7 6

CL

66 22 16 52 14 7 21 47.3 82 4 Up to 500 24 76 90.5 8 70 100.5 11 Boss-cut Bore (mm) PH GL H2 H1 K I NA N S PW ZZ Z PG P NN MM ZZ PL H GR GQ Bore (mm) 20 168 1/8 1/8 1/8 1/4 20 24 20 15 22 5 37 28 181 4 8 M20 x 1.5 38 4 6 5 127 41 M8 x 1.25 19.5 25 182 25 30 24 15 27 5.5 41 33.5 195 7 8 M26 x 1.5 41 7 9 6 137 45 M10 x 1.25 24 32 184 32 34.5 24 15 27 5.5 41 37.5 197 7 8 M26 x 1.5 41 7 9 6

reduces flow setting time

30.2 (30.3) 23 (24) AS221FS-02-03 (S) 5/32" 8.2 AS221FS-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FS-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FS-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8"

Table of Contents

Driver Non-standard motor electric actuator Standard motor electric actuator Controller How to Order How to Order B LG1 02 1 Compatible model 1 G LG1 05 Cable length G R Y Matsushita Electric Industrial Co., Ltd. Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

20.9 30.2 (30.3) 23 (24) AS221FSG-02-03 (S) 5/32" 8.2 AS221FSG-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FSG-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FSG-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FSG-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FSG-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-02-

25

IZS 41 IZS 42 IZF Sensor not connected Offset voltage (V) 30 Total number of ionizers that may be connected IZS41: Max. 8 units. IZS42: Max. 5 units.

ZX

(ZX1A) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] None K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Release valve None [ ]: Weight (g) How to Order Refer to page 13-2-4 for details.

MY1

Blue [Black] Lead wire length: 0.5m 7 7 6 7 8 8 D-A96(V) Lead wire length: 3m 35 35 30 35 41 41 DC(+) Brown [Red] LED (+) Resistor Reed switch Load OUT Black [White] Reverse current prevention diode DC power () DC() Blue [Black] Dimensions D-A90, D-A93, D-A96 D-A90V, D-A93V, D-A96V The dimension inside ( ) is for D-A93. 13 Reed Switches: Direct Mounting Type D-Z73, D-Z76, D-Z80 Specifications

Electric Actuators

Performance/Specifications General specifications LC5-1-T1-02 Part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

L d m t l IY-G012 IY-J015 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 NTJ-015A NT-015A NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 Type C 5 for axis M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 5 5 6 8 11 13 16 8 10 13 17 22 27 32 41 9.2 11.5 15.0 19.6 25.4 31.2 37.0 47.3 5 5 8 10 10 14 18 22 14.6 16.6 21 25.6 41.6 50.6 64 72 4.8 4.8 7.6 9.6 9.6 13.4 17 21 10.2 12.2

Modular Type Regulator Series AR

type GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 Round G46-2-02 G46-2-02 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

Air Cylinder

35 37 34.5 36.5 31 33 35.5 37.5 29.5 31.5 32 34.5 Rod end 48 27 (36) 44 23 (32) 43.5 22.5 (31.5) 40 19 (28) 44.5 23.5 (32.5) 38.5 17.5 (26.5) 41 20.5 40 (29.5) Double end 48 41 44 37 43.5 36.5 40 33 44.5 37.5 38.5 31.5 41 34.5 Head end 46 49 42 45 41.5 44.5 38 41 42.5 45.5 36.5 39.5 39.5 42.5 Rod end 58 32 (44) 54 28 (40) 53.5 27.5 (39.5) 50 24 (36) 54.5 28.5 (40.5) 48.5 22.5 (34.5) 51.5

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Option Body material Nil N Body only With silencer 1 2 ADC12 (aluminum) SCS14 (stainless steel) For AIR EXH: AN200-02 Connection port size 1/4 (8A) 3/8 (10A) Diaphragm material 02 03 1 PTFE (fluororesin) Symbol Type of operation Thread type FLUID OUT AIR SUP Nil T F N Rc NPTF G NPT Automatically operated type with built-in pulsation attenuator 2 AIR EXH FLUID IN Built-in pulsation attenuator

LEC-OM02904

B2B2 3 rev 1 (2) (1) 200 TM MR Configurator2 PC02 MBR (MBR)OFF(Tb) 0 ms 0 1000 PC03 *ENRS 0h 0 0 A B AB CCW CW A A 0 B B A A 1 B B 0 1 0 1 PC04 **COP1 C-1 0h 0 0 0 02 14 1()(16) 11.1.2 02 1: 4 116 11.1.2 5 21 5 No.

High Power Cylinder:

D d H Part no B C 30 M22 X 1.5 26 8 26 SOR-20 20 15.0 12.5 M8 X 1.25 5 13 NT-02 20 36.9 M24 X 1.5 32 8 32 SOR-25 25 19.6 16.5 M10 X 1.25 6 17 NT-03 25/32 43.9 M30 X 1.5 38 9 38 SOR-32 32 25.4 21.0 M14 X 1.5 8 22 NT-04 40 47.3 M33 X 2.0 41 11 41 SOR-40 40 4.10-6 High Power Cylinder Series RHC How to Rotate the Relief Valve Body The relief adjustment screw can be placed in any direction by