3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(Inch) N1 N3 N7 N9 N11 M5 02 Symbol M5 thread 1/8" 5/32" 1/4" 5/16" 3/8" thread 1 4 Pressure Specifications VQZ100 2(A) port (2) VQZ100 VQZ200/300 Series VQZ200 Metal seal VQZ300 0.1 to 0.7 MPa (1) External pilot pressure range Note) Metric size of One-touch fittings (C) are also available.

5 Port Solenoid Valve SY Series

M5 port block assembly Pilot valve assembly A Bracket Assembly No. B Description No. Caution 3 5 7 SX 000-16-1A (with mounting screw) 3 5 7 SY9000 has no bracket.

ARM10/11

SMC AXT100-DR-8 110.5 84 AXT100-DR-10 135.5 56 AXT100-DR-12 160.5 8 11.5 AXT100-DR-14 185.5 AXT100-DR-16 210.5 AXT100-DR-19 248 AXT100-DR-21 273 SMC SMC AXT100-DR-23 298 K K P P C C U U O O S S L L H H 53 AXT100-DR-25 323 33.5 AXT100-DR-28 360.5 16 14 OUT IN OUT IN 14-4-33 16 Compact Manifold Regulator Option Common Supply Type R side end block Pressure gauge Pressure switch block Courtesy

ARM10/11

SMC AXT100-DR-8 110.5 84 AXT100-DR-10 135.5 56 AXT100-DR-12 160.5 8 11.5 AXT100-DR-14 185.5 AXT100-DR-16 210.5 AXT100-DR-19 248 AXT100-DR-21 273 SMC SMC AXT100-DR-23 298 K K P P C C U U O O S S L L H H 53 AXT100-DR-25 323 33.5 AXT100-DR-28 360.5 16 14 OUT IN OUT IN 14-4-33 16 Compact Manifold Regulator Option Common Supply Type R side end block Pressure gauge Pressure switch block Courtesy

VFS

16 14 16 17 14 16 17 9.0 9.0 9.0 VFS600 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 15 16 17 15 16 17 14 16 16 14 16 17 14 16 18 9.0 9.0 9.0 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 3 8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100

CA2

For more information, refer to page 6-8-16. 6-8-41 42 Series CBA2 Specifications Maintains the cylinders original position even if the air supply is interrupted.

ZX

x 0.8 OXY: M6 x 1.0 Vacuum supply port 2-3.3 mounting hole Vacuum pad connecting port OX: M5 x 0.8 OXY: M6 x 1.0 OX: M5 x 0.8 OXY: M6 x 1.0 OX: M5 x 0.8 OXY: M6 x 1.0 13-2-16 16 Vacuum Module: Ejector System Series ZX Vacuum Pressure Switch Unit/Adsorption Confirmation Switch: ZSP1S B Adsorption Confirmation Switch Specifications Small diameter nozzle/0.3 to 1.2 ZSP1-S ZSP1-B Air 20 kPa

48

OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5 23 23 16 44 28 89 70 98 12.7 33 M6 x 1 9 6 40 (32 x 2) 6.7 11 6 Rc1/8 NPT1/8 G1/8 13 16.5 26 27.5 20 43 33 97 71

MLU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no. MU-C02 MU-C03 MU-C04 MU-C05 Part no.

Plate Cylinder with Lock Series MLU

x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8 36 40 45 53 6 7 8 11 54 68 86 104 26 42 54 64 5 to 300 5 to 300 5 to 300 5 to 300 MLUB25 MLUB32 MLUB40 MLUB50 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc, NPT, 1

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA GB Piping port 2-M5 x 0.8 Clevis pin ( ) MM CA CB D NA A CX + 0.2 + 0.1 U BA S + Stroke Z + Stroke ZZ + Stroke BB H R (mm)

Precision Cylinder Series MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except for lock unit: 0.12MPa for 12 and 16; 0.10MPa for 20 to 40 Piston Speed Order Made Order Made Specifications 8 50 to 500 0.02 12 16 20 25 32 40 50 to 800 Bore size (mm) Piston speed (mm/s) Allowable kinetic energy J Refer to page 20 for series MTS order made specifications. 0.19 0.32 0.55 0.78 1.6 2.8 End Lock Specifications

Applicable Auto Switch Model

(Tolerance 30%) M5 X 0.8 X 25 68(77.5) 57.5(67) * ( ): Values for D-A44C 5.3-18 Reed Switch/Direct Mounting D-A90/D-A93/D-A96 Applicable Actuator Series Grommet Electrical entry: In-line Series Bore size (mm) Series Bore size (mm) CDU MXP 6, 10, 16, 20, 25, 32 10, 12, 16 CDQS MTS 12, 16, 20, 25 20, 25, 32, 40 CDQ2 CXT * 32, 40, 50, 63, 80, 100 12, 16, 20, 25, 32, 40 MY1 MK 16, 20 12, 16

MGG

/8 20 47 M8 x 1.25 depth 16 238 44 11 38.3 12 (15) 25 52.5 53 121 (130) 123 75 94 164 25 Rc 1/4 58 M10 x 1.5 depth 21 285 55 16 44.5 14 (16) 26 58.5 59 137 (149) 140 For long strokes Bracket mounting strokes Note) Dimensions inside ( ) are for long strokes.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

x 0.8 Finger opening port M5 x 0.8 Finger closing port 13 6-M4 x 0.7 thread depth 8 M5 x 0.8 Finger closing port M5 x 0.8 Finger opening port (A, B, C common view) 25 25 3-4 depth 8 +0.02 0 (A, B, C common view) 42 14h9 0 0.043 1.5 9 28.5 18 55.5 (60) 10 21 2 10 0 0.05 3 4 0 0.03 4 0 0.03 Open: 28 Closed: 16 2-M4 x 0.7 thread depth 8 (Thread for mounting attachment) 18.5 18.5 7 7 5.5 5.5

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

X 0.8 Finger opening port M5 X 0.8 Finger closing port 13 6-M4 X 0.7 thread depth 8 (A, B, C common view) M5 X 0.8 Finger closing port M5 X 0.8 Finger opening port 25o 25o 3-4 depth 8 +0.02 0 (A, B, C common view) 42 14h9 0 -0.043 1.5 9 28.5 18 55.5 (60) 10 21 2 10 0 -0.05 3 4 0 -0.03 4 0 -0.03 Open: 28 Closed: 16 2-M4 X 0.7 thread depth 8 (Thread for mounting attachment) 18.5 18.5 SMH03

LEC-OM02904

ON E6,E7 2 ON 1 1 2 16 3. (1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-25 30 60 98 40 42 49 60 23 25 89 75 106 836 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP16 11223 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2 x M5 x 0.8 depth 8 Stroke: S 2 x M4 x 0.7 depth 6 11-/22-MXP16-20 A 4 x M5 x 0.8 depth 7 (Plug: MGP12-08-CA001-R) 2 x M5 x 0.8 Piping port H Width across flats 8

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

20 Width across flats 8 Width across flats 3 A 4-M5 x 0.8 depth 7 (Plug: M-5P) 2-M5 x 0.8 Piping port H 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth 4 4H9 depth 4 4H9 Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 0.50.05 W B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 47 46 13 10.5 depth 2 4H9 J 8 +0.030 0 +0.030 0 depth 2 4H9 16.5 14.5 Section AA 5 Mounting

Compact Hydraulic Cylinder

Bore size (mm) 20 32 40 50 63 80 100 M5 x 0.8 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M10 x 1.5 2 4 4 4 4 4 4 3 3 3 6 11.5 24 34 7. Do not use two cylinders facing one another horizontally or vertically in such a way that their piston rods strike each other. 8.