Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing

Modular F.R.L. Unit

77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L3 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L3 61 76 76 99 104 AC20C AC25C AC30C AC40C AC40C-06 Attachment Model L1: Dimensions from the end of the IN side to the center of the mounting hole for the first bracket.

Power Clamp Cylinder

Bore size (mm) Tightening torque Description Ibfin Nm 27 to 35 44 to 62 44 to 62 44 to 62 13 to 18 27 to 35 27 to 35 27 to 35 110 to 150 1150 to 1327 1416 to 1770 4248 to 4600 13 to 18 22 to 27 22 to 27 27 to 44 40 50 63 80 40 50 63 80 40 50 63 80 40 50 63 80 3.0 to 4.0 5.0 to 7.0 5.0 to 7.0 5.0 to 7.0 1.5 to 2.0 3.0 to 4.0 3.0 to 4.0 3.0 to 4.0 12.5 to 17.0 130 to 150 160 to 200 480 to 520

0.4

VQ1000 10.5 0.72 1.0 Up to 50 VQ2000 16 2.6 3.2 Up to 80 Flow rate characteristics: 4/2 5/3 (A/B R1/R2) A wide variety of optinal parts The photo does not show an actual use example. Slide locking type (Manual) Regulator unit Built-in One-touch fittings for easy piping This regulator adjusts the SUP pressure of a manifold and reduces the supply pressure from the D-side SUP port.

CQS

CQ2 Mounting Bolt for CDQSK MU Mounting bolt Mounting bolt C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 Special long bolt for through hole mounting is available as an option. How to Order: Specify the required bolts.

5 Port Solenoid Valve, Series VQC

C8: 8 One-touch fitting (mm) Formulas: L1 = 16n + 57, L2 = 16n + 102 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 73 118 137.5 148 2 89 134 150 160.5 3 105 150 175 185.5 4 121 166 187.5 198 5 137 182 200 210.5 6 153 198 212.5 223 7 169 214 237.5 248 8 185 230 250 260.5 9 201 246 262.5 273 10 217 262 287.5 298 11 233 278 300 310.5 12 249 294 312.5 323 13 265 310 337.5 348 14 281 326

7

series Cylinder stroke (mm) 80 100 50, 75, 100, 125, 150, 175, 200 50, 75, 100, 125, 150, 175, 200 CKGA series End bracket Nil Y None Double knuckle joint (with tap) CKPA series Note) A knuckle pin, cotter pins and flat washers are provided as a standard for Y.

energy saving effect

fluid flow rate [L/min] IDH HRSH250/300-A-20/4090 0.9 Usable flow rate range Circulating fluid pressure [MPa] 80 0.8 0.7 70 Pump head [m] 0.6 60 Outlet 0.5 50 0.4 40 0.3 30 0.2 20 Return port 0.1 10 0 0 125 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow rate [L/min] 171 HRSH Series Inverter Type Dimensions HRSH100/150/200-A-20 (Air-cooled 200 V type) HRSH100/150/200-A-40 (Air-cooled

Compact Manifold Regulator

100 0 50 100 150 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM10F-07 ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100 Flow

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25-40 13-/

LJ1H

5.8 1.7 4.8 80 Stroke + 400 A section detail (Switch groove) T-nut 11.5 40 (T-slot pitch) 36 45 4.5 9.4 3 x 5H10 depth 5 10 18 Stroke + 145 80 80 30 T-slot dimensions The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

Compact Guide Cylinder Series MGQ

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGC Made to Order Specifications (For details

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14 240 200 160 120 80 40 0 0 2 4 6 8 10 12 14 60 50 40 30

HRL

Polyester band Hanging position Cardboard box 60 or less Forklift insertion side Forklift insertion side Less than 150 mm Wooden skid Less than 150 mm Forklift insertion side Weights and Dimensions When Packaged Model Weight [kg] Dimensions [mm] HRL100-A-20 300 Height 2020 x Width 1200 x Depth 893 HRL200-A-20 327 Forklift insertion side HRL200-A-20 4.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

200 Overhang L (mm) Overhang L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 20 20 10 10 2 3 4 5 3 4 5 40 40 32 32 Mass W (kg) Mass W (kg) 2 1 1 25 25 20 0.5 0.4 0.3 0.5 0.4 0.3 20 0.2 0.2 0.1 0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke:

LEC-OM02904

(L) W E L d 11 30 11 11.8 (1) ACPWM 30cm 10{IglIgnIgaK(Ig2Igm)}[mA](11.1) K NV M NV-SP NV-SW NV-CP NV-CW NV-HW 1 Ig1 Iga Ig2 Igm Ign BV-C1 NFB 3 NV-L Igl (11.3) Ig2 (11.3) Ign (FR-BIF-(H) ()4.4mA) Iga(11.6) Igm (11.5) 120 120 100 100 80 80 60 60 40 40 [mA] [mA] [mA] [mA] 20 20 0 2 0 2 100 5.5 14 38 14 100 5.5 38 8 3.5 22 60 150 8 3.5 22 60 150 30 80 30 80 2] [mm 2] [mm [mm2] [mm2]

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 175, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200

Cylinder with Turntable Series MGT

150, 175, 200 121.5 145 111.5 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB Nil TN TF NPT 1/4 117 128 168 58 74 89 54 56 71 100 125 150 24 24 35 188 225 272 Rc 1/4 Rc 3/8 Rc 3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 70 80 100 14 14.5 17.5 G 1/4 G 3/8 G 3/8 63 80 100 110 140 166 142 180 210 28 25.5 32.5 NPT 3/8 NPT 3/8 (mm) 25st 50, 75, 100st Larger than 100st

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 L2 max Y 2 Y Y Y Y D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 L2 max Y 2 Y Y Y Y Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7