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DC Specification Temperature increase (C) Note) Power consumption (W) (Holding) 24 VDC 0.19 0.29 0.44 Inrush current (A) (Inrush time: 200 ms) Model 12 VDC 0.38 0.58 0.88 25 25 30 1.5 2.3 3 VXE21 VXE22 VXE23 Note) Value for ambient temperature at 20C and when the rated voltage is applied.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

1.1

This is sewed onto the male side of the surface fastener, and has adhesive tape backing for fixing to the female side. w Remove the paper covering of the adhesive tape and affix the loop tape to the external panel of the ventilation hole on the Thermo-cooler. e Simply press the hook tape on to the loop tape to mount the dustproof filter. 195 210 130 130 140 140 200 200 210 210 Mounting Example

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

Compact Electric Actuator Series LG1

Nonstandard Compatible Motors: Motor model Corresponding driver model Power supply voltage (AC) Motor output (W) MSM011P1A Matsushita Electric Industrial Co., LTD 100/115 MSD011P1E MSM012P1A 100 200/230 MSD013P1E 100/115 MR-C10A1 Mitsubishi Electric Corporation HC-PQ13 100 200/230 MR-C10A Yaskawa Electric Corporation 100/115 SGDE-01BP 100 SGME-01BF12 200/230 SGDE-01AP SGME-01AF12 Refer to

Parallel Style Air Gripper: Wide Type Series MHL2

200 300 300 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MPa 200 200 0.3 MPa 0.3 MPa 100 100 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80 120 160 200 Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) 476 Parallel Style Air Gripper: Wide Type Series MHL2 Model Selection

10

Mounting side Closed C B A A Open D Open E F F Mounting side MHL2-25DZ-X86/X86A MHL2-25D Z-X86/X86A 1 2 200 200 160 160 Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 120 120 0.5 MPa 0.4 MPa 0.4 MPa 80 80 0.3 MPa 0.3 MPa Closed F (Fingers closed) 40 40 0 0 40 80 120 160 200 0 0 40 80 120 160 200 [mm] Model A B C D E F Weight [g] MHL2-25DZ-X86(A) 9 106 128

MHL2

200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80

MHL2

Fingers synchronized by a rack and pinion mechanism Model/Stroke Max operating frequency (c.p.m) Opening/closing stroke (L2L1)(mm) Weight (g) Width at closing (mm) (L1) Width at opening (mm) (L2) Bore size (mm) Model Built-in dust proofing mechanism 60 20 40 60 30 60 80 40 80 100 50 100 120 70 120 160 100 160 200 56 78 96 68 110 130 82 142 162 100 182 200 150 198 242 188 246 286 76 118 156

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

After returning to the origin position, the SETON and INP signals are output. 0 Absolute: 200 Operation w [Specify Step No.2 to input the DRIVE signal.] 200 Absolute: 100 Step data No. defining operation The operation starts by specifying a registered step data No. to input the DRIVE signal.

VZ5000

) [Current mA] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Refer to pages 3-3-60 to 3-3-65 for manifold use.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

PVC (Light gray) PUR (Black-Gray (RAL 7021 equiv.)) 1.5 m: Approx. 65 g 3 m: Approx. 130 g 5 m: Approx. 195 g 1 m: Approx. 85 g 3 m: Approx. 215 g 5 m: Approx. 345 g 1.5 m: Approx. 65 g 3 m: Approx. 130 g 5 m: Approx. 195 g Weight 1 m: Approx. 80 g 5 m: Approx. 395 g 1 m: Approx. 85 g 5 m: Approx. 400 g Power Supply Cable For PROFINET For EtherNet/IP For DeviceNet For PROFIBUS DP For EtherCAT

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

(different sides/same side) 15 120 120 130 140 D-F5W, D-J59W D-F5BA D-F5F D-F5NT (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 130 + 55 "n" pcs. (same side) 15 + 55 120 + 55 120 + 55 140 + 55 n = 4, 8, 12, 16 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 120 90 Different sides 2 pcs. "n" pcs. 2 pcs. "n" pcs. 2 pcs.

Parallel Style Air Gripper Series MHZ

250 460 28 60 130 255 465 28 60 130 255 460 4 4 6 10 14 4 4 6 10 14 4 4 6 10 14 6 10 16 20 25 6 10 16 20 25 6 10 16 20 25 Double acting Single acting type, Normally closed Normally closed Normally open MHZ MHF Single acting 3.7 12 31 56 83 MHL Refer to pages 436 to 440 for the specifications with auto switch.

MHZ

Model MHK MHS Gripping force (1) Bore size (mm) JIS Symbol Double acting Opening/ Closing stroke (Both sides) (mm) Gripping force per finger Effective value (N) Weight (2) (g) Action Model MHC External Internal MHT 28 60 130 250 460 28 60 130 255 465 28 60 130 255 460 6 10 16 20 25 6 10 16 20 25 6 10 16 20 25 6.1 17 40 66 104 3.3 9.8 30 42 65 1.9 6.3 24 28 45 4 4 6 10 14 4 4 6 10 14 4 4 6

MHZ

Gripping point L (mm) Gripping point L (mm) DMHZ2-40 MHZ2-16/11-MHZ2-16 200 2060 50 150 Overhang H (mm) Overhang H (mm) Pressure 0.2 MPa Pressure 0.2 MPa Pressure 0.2 MPa Pressure 0.2 MPa 40 0.3 MPa 0.3 MPa 100 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.3 MPa 30 0.4 MPa 0.4 MPa 0.4 MPa 0.5 MPa 0.5 MPa 0.5 MPa 0.6 MPa 0.6 MPa, 0.7 MPa 0.6 MPa, 0.7 MPa 20 0.7 MPa 50 10 0 50 100 150 200 0 10

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

P When mounted on the manifold, the common exhaust discharges the pilot and main valve exhaust through a common exhaust port to enable simple exhausting. 700 B 600 Max.operating speed (mm/s) Piping length1m JIS Symbol B A 500 Piping length5m A D SY (Single) 400 R P SYJ C 300 SX How to order valve with built-in speed controller SYJ5l 5l--lll l--l 200 VK Port size VZ 100 Config.

Micro Mechanical Valve Series VM1000

Side mounting Panel mounting VM100/Bottom ported only 3 (R) (3 port) Pneumatic indicator 2 (A) 1 (P) Series VM100/200 CAT.ES12-8A a Series VM100/200 Actuator Variations * It is possible to change the actuator assembly and mount to basic type.

Power Valve: Economy Valve Series VEX5

Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800

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CYLINDER AIR CONSUMPTION: 1 STROKE, FULL CYCLE Cylinder 60 70 80 90 100 110 120 130 140 150 Bore PSI PSI PSI PSI PSI PSI PSI PSI PSI PSI 1.50 0.009 0.010 0.012 0.013 0.015 0.016 0.017 0.018 0.020 0.021 2.00 0.018 0.020 0.022 0.025 0.027 0.029 0.032 0.034 0.036 0.039 2.50 0.028 0.032 0.035 0.039 0.043 0.047 0.050 0.054 0.058 0.062 3.00 0.039 0.044 0.050 0.055 0.060 0.066 0.070 0.076 0.081