MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

Rotary Table/

60 0 6 5 4 3 2 1 0 5 10 15 20 25 30 Load N Load N MSQ20 MSQB2A 300 100 MSQB20 (Basic type) Displacement m Displacement m 250 80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

MPa Valve specifications Electricity specifications 2 position 3 position Min. operating pressure Ambient and fluid temperature Proof pressure 1.5 MPa 10 to 60C (1) Lubrication Pilot valve manual override Shock/Vibration resistance Enclosure Coil rated voltage Allowable voltage fluctuation Coil insulation type Apparent power (Power consumption) Non-lube (2) Non-locking push type (Flush) 150

DOC1023126

(Becomes close to the trapezoidal acceleration as the setting value reaches 0) Acceleration and deceleration ratio 10 10 10 to 100 EQY251 to 50 EQY321 to 70 Torque when held *2 50 70 Sets the torque when stopped after the positioning operation. (Unit: %) H 150 100 Sets the position loop P constant.

Rotary Table/Rack & Pinion Style Series MSQ

25 Size: 10 to 50 Size: 70 to 200 Carbon steel 26 Anodized Anodized Chromated NBR Brass NBR Stainless steel 27 28 29 30 31 Size: 70 to 200 only Size: 70 to 200 only Replacement parts Description Size 10 P523010-5 20 P523020-5 30 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P391070-5 Seal kit No.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8 @4 CS type snap ring Parallel pin Parallel key Seal washer Plug O-ring Steel balls Shock absorber @5 Size: 10 to 50 Size: 70 to 200 Carbon steel @6 NBR Brass NBR Stainless steel @7 @8 @9 #0 #1 Size: 70 to 200 only Size: 70 to 200 only Replacement Parts Description Kit no. Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !

53

Page 150 Circulating Fluid Typical Physical Property Values ... Page 150 Options With Earth Leakage Breaker . Page 145 Specific Product Precautions . Page 151 With Automatic Fluid Fill Function . Page 145 Applicable to Deionized Water Piping . Page 145 Conforming to CE/UL Standards .

SMC Pneumatic Clean Series

, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

Free Mount Cylinder Series CU

Grease pack part no.: GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RZQ Warning 1. It might not be able to control CUX10 by meter-out at a low speed operation. DCaution 1. For CUX10, up to 0.1 Nl/min (ANR) of internal leakage is anticipated due to cylinder structure.

Title not found

CYLINDER AIR CONSUMPTION: 1 STROKE, FULL CYCLE Cylinder 60 70 80 90 100 110 120 130 140 150 Bore PSI PSI PSI PSI PSI PSI PSI PSI PSI PSI 1.50 0.009 0.010 0.012 0.013 0.015 0.016 0.017 0.018 0.020 0.021 2.00 0.018 0.020 0.022 0.025 0.027 0.029 0.032 0.034 0.036 0.039 2.50 0.028 0.032 0.035 0.039 0.043 0.047 0.050 0.054 0.058 0.062 3.00 0.039 0.044 0.050 0.055 0.060 0.066 0.070 0.076 0.081

Title not found

CYLINDER AIR CONSUMPTION: 1 STROKE, FULL CYCLE Cylinder 60 70 80 90 100 110 120 130 140 150 Bore PSI PSI PSI PSI PSI PSI PSI PSI PSI PSI 1.50 0.009 0.010 0.012 0.013 0.015 0.016 0.017 0.018 0.020 0.021 2.00 0.018 0.020 0.022 0.025 0.027 0.029 0.032 0.034 0.036 0.039 2.50 0.028 0.032 0.035 0.039 0.043 0.047 0.050 0.054 0.058 0.062 3.00 0.039 0.044 0.050 0.055 0.060 0.066 0.070 0.076 0.081

Mechanically Jointed Rodless Cylinder Series MY2

Wn Mass mn X-axis Xn Y-axis Yn Z-axis Zn Z X Wa 0.88 kg 65 mm 0 mm 5 mm 111 Wb 4.35 kg 150 mm 0 mm 42.5 mm Y 210 Y Wc 0.795 kg 150 mm 111 mm 42.5 mm Wd 1.5 kg 150 mm 210 mm 42.5 mm n = a, b, c, d 3 Composite Center of Gravity Calculation m3 = mn = 0.88 + 4.35 + 0.795 + 1.5 = 7.525 kg m3 1 X = x (mn x xn) 7.525 1 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 1.5 x 150) = 140.1 mm m3 1 Y = x

MY1

Mass mn Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 5mm 0mm 65mm 0.88kg 210 65 111 Z Wb 42.5mm 0mm 150mm 4.35kg 150 Wc 42.5mm 111mm 150mm 0.795kg Wd 42.5mm 210mm 150mm 0.5kg Y 42.5 5 n = a, b, c, d 3 Composite center of gravity calculation m = mn = 0.88 + 4.35 + 0.795 + 0.5 = 6.525kg 1 m X = x (mn x Xn) 1 6.525 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 0.5 x 150) = 138.5mm 1 m Y = x (mn x

VFS

2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Exhaust NVFR4400 NVFR4410 % 2.8 180 70 or less 1.S1 (0.73) center 1h 2.8 Pressure NVFR4500 NVFR451 0 % 3.S 180 70 or less 1.S1 (0.73) center 1h 3.S The Agures lIated are without subplate.

Booster Regulator/Air Tank

/4 40 60 4 x 5.5 8.5 AMR 70 50 70 (97) (When silencer installed: 107) (When high-noise reduction silencer installed: 126) ARM EXH port 1/4 ARP VBA11A-02 With elbow silencer (Option) 150 Pressure gauge (Option) IR-A Elbow silencer (Option) 33 30 OUT side gauge port Rc 1/8 IN side gauge port Rc 1/8 28 7 28 7 IR Silencer (Option) IRV 113 113 IN port 1/4 OUT port 1/4 IN port 1/4 OUT port 1/4

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Standard stroke (mm) 60C Nylon tarpaulin 110C Neo plain cloth MXQ 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 Maximum ambient temperature for the rod boot itse 300, 350, 400, 450, 500 MXF 25, 50, 75, 100, 125, 150, 175, 200, 250, 50, 63 300, 350, 400, 450, 500, 600 MXW 25, 50, 75, 100, 125, 150, 175, 200, 250, 80, 100 300, 350, 400, 450, 500, 600, 700 MXP Minimum stroke of auto switch