VQ7-6/7-8

Fluid Maximum operating pressure 1.0 MPa Valve specifications Solenoid specifications Single 0.20 MPa 0.15 MPa Min. operating pressure Double 0.15 MPa 0.15 MPa 3 position 0.20 MPa 0.15 MPa JIS Symbol 10 to 60C (1) 5 to 60C (1) Ambient and fluid temperature 2 position single 2 position double (Metal) Not required Lubrication (A) 4 (B) 2 (A) 4 (B) 2 Push type (Tool required) Manual override 150

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 101 102 100h9 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 119 120 116h9 118h9 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

JXCx-OMT0023

(Target position) time constant time constant speed [r/min] [ms] function [10STMm] [ms] [ms] 1 5.00 3000 100 150 100 1 2 -6.00 2000 100 100 0 3 3 3.00 3000 50 50 0 0 (Note) Note.

Modular Design with Uniform Body Style

1/8, 1/4 40 87.6 17.5 21 25 21 30 27 22 5.4 8.4 60 2.3 28 104.9 AF30-D 1/4, 3/8 53 115.4 21.5 26.5 30 35 26.5 41 35 25 6.5 13 71 2.3 32 157.1 AF40-D 1/4, 3/8, 1/2 70 147.1 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 186.9 AF40-06-D 3/4 75 149.1 27 35.5 38.4 40 35.5 50 52 34 8.5 12.5 88 2.3 43 188.9 AF50-D 3/4, 1 90 220.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.9 AF60-D 1 95

Free Mount Cylinder

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

Electric Rotary Table

Load A Displacement LER50 LER10 LER50 (Basic type) LER10 (Basic type) 200 Displacement (m) Displacement (m) 400 150 350 120 10 20 30 40 LERH50 (High precision type) 50 LERH10 (High precision type) 0 20 40 60 80 100 120 0 5 10 15 20 25 30 Load (N) Load (N) LER30 300 LER30 (Basic type) 250 Displacement (m) 200 50 130 150 LERH30 (High precision type) 0 10 20 30 40 50 60 70 Load (N) Deflection

VXP21/22/23

97 97 62 64 64 125 132 150 128 (145) 144 (159) 160 (175) 26.5 30 35.5 57.5 60 69 23 25.5 25.5 35 40 40 92 (102) 103 (113) 114 (124) 25.5 28 28 84 (94 ) 95 (105) 106 (117 ) 41.5 84 (94) 95(105) 106(117) 60 62 62 84 (94) 95(105) 106(117) 2 VXP2382 VXP2392 1 12 44.5 44.5 ( ): N.O. 17-3-51 10 The VX series will be revised shortly.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

2/3 Port Valve for Various

128 (145) 144 (159) 160 (175) 26.5 30 35.5 43.5 46.5 52 51.5 54.5 59 53 60 71 67.5 72 81 57.5 60 69 23 25.5 25.5 35 40 40 92 (102) 103 (113) 114 (124) 25.5 28 28 84 (94 ) 95 (105) 106 (117 ) 41.5 84 (94) 95(105) 106(117) 60 62 62 48 50 50 84 (94) 95(105) 106(117) 95 97 97 62 64 64 2 VXP2382 VXP2392 1 12 44.5 44.5 ( ): N.O. 17-3-51 The VX series will be revised shortly.

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

Air Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

SYJ Conduit terminal: VP3165-T A B DIN terminal: VP3165-D A B VQZ VP [105] Light (For TL, TZ) 76 30 Max.12 31.3 G1/2 VG Applicable cable 6 to 12 Light position (For DL, DZ) VP3 VP3 G1/2 NO NO [221] 215.6 219 206.5 PE PE 191 26 26 108 108 45 45 36 36 95 95 [ ]: With indicator light (TL, TZ) 1311 VP3185 Series Dimensions: VP3185 Grommet: VP3185-G A B 140 87.4 54 35 81 106 G1/2 1/4 (PA port

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Series AMG 99% Oil smell 14-20-3 3 m (95% capture of the particle diameter) Main line filter Eliminates impure particles such as oil and foreign objects, etc. in compressed air.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

/50 m/s2 (2) (A) 4 (B) 2 VF IP65 (Dust/Splashproof type) 12 VDC, 24 VDC 15 to +10% of rated voltage Equivalent to Class B 1.8 W DC (75 mA) 1.8 W DC (150 mA) VFR 1 (P) 5 (R1) 3 (R2) Allowable voltage fluctuation Type of coil insulation Power consumption 24 VDC 12 VDC 3 position closed center VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

21

M9BW With auto switch CDM3 L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil S n Mounting Bore size 2 pcs. 1 pc. n pcs.

SMC Pneumatic Clean Series

45, 60, 75, 100, 125, 150, 175, 200 Standard Non-lube Double acting Single rod 15, 30, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

Compact Cylinder/Guide Rod Type Series CQM

100 125 150 65 70 75 80 85 90 95 100 105 130 155 75 80 85 90 95 100 105 110 115 140 165 40 45 50 55 60 65 70 75 80 85 110 135 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L

LEC-OM069xx

Analog monitor output voltage 1 [V] Gain adjustment 1000 [min-1] Motor speed Item Specifications Gain-adjustment Range 10050% Adjustment Unit 0.4%/LSB The gain adjustment range is made with a 100% output set as a center value (adjustment range: 50% to 150%). The following is a setting example.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

160.5 4 101.5 119 150 160.5 3 90 107.5 137.5 148 2 78.5 96 125 135.5 1 67 84.5 112.5 123 L1 L2 L3 L4 2-3-15 16 Series SQ1000 Kit (PC Wiring System compatible flat ribbon cable kit) J Manifold Specifications PC Wiring System compatible.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Relative: 150 Numerical data defining operation The operation starts by changing the Movement MOD and Position in step data No.1 temporarily by defining numerical data from the PLC. 160 Operation t [Define numerical data in the Movement MOD and Position in Step No.1.] Movement MOD: 2 (Relative) and Position: 150 are defined from the PLC.