Base Mounted Metal Seal/Rubber Seal Series VQ

3 2 Stations 1 U side D side 2n-C3, C4, M5 1(P) SUP port 2-C6 R(EXH) port 2-C6 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 M5: 5 thread P = 10.7 27 15.5 58 55.5 50 45 30.7 25.4 19.7 16.7 11 7.5 This drawing shows the case of VV5Q05-T2-D. < >: AC Dimensions L n Formula L1 = 10.7n + 36, L2 = 10.7n + 45 n: Station (Maximum16 stations) 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 143

Free Mount Cylinder Series CU

41 45 47 S Z Z 15 st 48 56 60 56 60 62 15 st 76 87 91 90 98 104 15 st 76 87 91 100 108 114 15 st 48 56 60 66 70 72 5 st 56 62 66 65 73 79 5 st 38 41 45 51 55 57 5 st 56 62 66 75 83 89 10 st 43 46 50 46 50 52 10 st 66 72 76 75 83 89 10 st 43 46 50 56 60 62 10 st 66 72 76 85 93 99 6 10 16 20 25 32 500 Series CU Free Mount Cylinder Single Acting, Single Rod, Spring Return/Extend Minimum Stroke

VQ7-6/7-8

-13 AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 Part No.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 (n 2) 2 100 + 100 Same side 100 + 100 (n 2) n = 4, 6, 8 n = 2, 3, 4 1 pc. 75 90 80 10 Different sides 35 75 90 80 Same side 55 75 90 80 90 + 30 (n 2) 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

REC

+Stroke Mounting hole 2-7 Standard port Relieving port B (mm) Bore size FT FX FY FZ B1 D A AL B B2 F G H E Stroke range 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 4 60 75 13 8 18 15.5 34 26 13 10 41 150 to 700 FX 20 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 20, 25, 32 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to 1000 26 36 40 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to 1000 32 S

•

." ~ ' G 1J 2O 8 3 19 19 25 ' 45 14 3 3.5 24 15 1.7 I ZPT20~ 20 23 8 12 4 40 ZPT02U 2 2.6 1.2 ZPT04U ' 4 . .. a:.e 1.6 ZPT06U 6 7 08 '9 ' 12 ZPT2Sg . 25 28 I 14 3 .8 4 25 , 45 , ''24 '' . '5 : .

NAAMS Standards Compliant

45 60 60 75 75 90 90 105 105 120 120 135 135 Clamp arm position L (Left side mounting) R (Right side mounting) R L D Right Left Both sides Switch cassette Switch cassette * Proximity switch mounting surface viewed from the front.

CJ2X/CUX/CQSX/CQ2X/CM2X

Low Speed Cylinder Double Acting, Single Rod Series CJ2X 10, 16 How to Order Bore size 10 16 10 mm 16 mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate stroke other than above is manufactured upon receipt of order.

SMC Pneumatic Clean Series

, 100,125,150, 25, 50, 75, 100, 125,150,200 Relief type Vacuum suction type 1/8 10-/21-CG1RN32 10-/21-CG1RN40 32 40 25, 50, 75, 100, 125,150,200 250,300 50 63 20 25 32 40 50 63 10-/21-CG1RN50 10-/21-CG1RN63 11-/22-CG1RN20 11-/22-CG1RN25 11-/22-CG1RN32 11-/22-CG1RN40 11-/22-CG1RN50 11-/22-CG1RN63 1/4 Non-lube Double acting Not available 25, 50, 75, 100,125,150, Single rod 25, 50, 75, 100

Series IDG

) With dew point indicator 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 5 S Standard equipment 10 20 30 50 60 75 100 Note) In case of two or more options, indicate them in alphabetical order.

5 Port Solenoid Valve Series VQZ1000/2000/3000

(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve and armature when pilot signal is ON and OFF.

CLA

With 1 switch 10 75 80 90 Wrth 1 switCh 10 75 80 90 0-8586 OGSKS Different 35 75 80 90 With 2 surface sWitches Same Surface 35 75 80 90 Av ro SWitch ~'B5 '86 D-GSoK5 '" " .J ~ ~ D-A4 Different SS.. 3O(n-2} 75+JO

Compact Cylinder

L x 100 L 100 100 (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CQUB32-5 CQUB40-5 M5 x 65 L M5 x 65 L 65 65 -10 -10 x 70 L x 70 L 70 70 -15 -15 x 75 L x 75 L 75 75 -20 -20 x 80 L x 80 L 80 80 -25 -25 x 85 L x 85 L 85 85 -30 -30 x 90 L x 90 L 90 90 10.5 10.5 -35 -35 x 95 L x 95 L 95 95 -40 -40 x 100 L x 100 L 100 100 -45 -45 x 105 L x 105 L 105 105

Cylinder with Lock Series CNG

45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 301 to 400 to 300 301 to 400 20 to 300 22 19.5 17 45 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 301 to 450 to 300 301 to 450 20 to 300 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 301 to 800 to 300 301 to 800 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 I J K KA MM NA P PG PH PL S FD

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

. : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48 1.1 33 1.6 t: Rotation time (s) 71 71 54 71 71 1.5 54 2.2 74 107 86 74 78 2.4 78 2.9 Rotary actuator 137 166 197 137 137 4.0 147 4.8 197 233 398 197 363 5.3 196 6.4 296 378 517 296 451 9.7 314 12.0 296 476 12.0 333 493

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

CG5-S

, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L 16 S R 60 H7BAL With Auto Switch With auto switch (built-in magnet) Number of auto switches 2 pcs. 1 pc.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

N.O. 10-SYJ722M 10-SYJ714M 140(80) 1/8 Base mounted (With sub-plate) 10-SYJ724M 135(75) 136(76) 157(97) 10-SYJ714M 1/4 10-SYJ724M Note) Value for DC.

MXW

Data Symbol Specifications Anti-corrosive specifications for guide unit (N) -X42 Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 0.7 0.6 0.5 0.4 0.3 0.2 71 61 51 40 30 20 101 R 4 8 53 45 38 30 23 15 75 L 158 136 113 90 68 45 226 R 6 12 119 102 85 68 51 34 170 L 281 241 201 161 121 80 402 R 8 16 211 181 151 121 91 60 302 L 440 377 314 251 188 126