0.4

RD SD LRUN PW 93.5 116 B RATE 42 (35) 66 75 80 x 1 x 10 STATION NO.

Compact Cylinder with Air Cushion Series RQ

x 140L Mounting bolt size M5 x 65L x 70L x 75L x 85L x 95L x 120L x 145L M6 x 85L x 95L x 105L x 130L x 155L M8 x 90L x 100L x 110L x 135L x 160L M10 x 105L x 115L x 140L x 165L M10 x 120L x 130L x 155L x 180L R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63-30 -

MXF

F A A MX Lr MTS MXF16 Lr = 40 mm MY 0.20 0.07 0.07 CY 0.06 0.06 MXF16-75 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.16 MXF16-75 MXF16-75 MXF16-50 MXF16-30 0.05 0.05 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Compact Cylinder

S, Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% Operating pressure (MPa) Operating direction 0.5 Bore size (mm) 0.3 0.7 181 IN 302 422 32 Standard Stroke 241 OUT 402 563 317 IN 528 739 40 (mm) Bore size (mm) Standard stroke 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 377 OUT 628 880 495 IN 825 1150 32 1 50 589 OUT 982 1370 40 50 2 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15,

CJ5-S

18 12 40 6 38 M5 x 0.8 5.5 10 7.2 25 59 3 44 60 3.5 M10 x 1.25 35.5 1/8 85 16 6 131.5 40 Up to 800 30 27 19 53.5 26 16 19 13 50 8 47 M6 x 1.0 6 14 7.2 30 66 3 54 75 4 M14 x 1.5 44 1/8 93 16.5 6.5 150 50 Up to 1200 35 32 27 69 32 20 21 14 58 11 58 M8 x 1.25 7 18 10 40 74 4 66 90 5.5 M18 x 1.5 55 1/4 21.5 11.5 176.5 109 63 Up to 1200 35 32 27 81 38 20 21 14 58 11 72 M10 x 1.5 7 18 12 45 74

CJ5-S

1.25 29 1/8 83 15 7 124 25 Up to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12 18 12 40 6 38 M5 x 0.8 5.5 10 7.2 25 59 3 44 60 3.5 M10 x 1.25 35.5 1/8 85 16 6 131.5 40 Up to 800 30 27 19 53.5 26 16 19 13 50 8 47 M6 x 1.0 6 14 7.2 30 66 3 54 75 4 M14 x 1.5 44 1/8 93 16.5 6.5 150 50 Up to 1200 35

air-filter-e

Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S BT-3S Replacement Parts *BLUE links will lead to purchase pages. 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

Air Preparation Equipment

Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S BT-3S Replacement Parts *BLUE links will lead to purchase pages. 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

CLA

l~ length 01 thread wnhoul boot With boot --l ~ 40 500 20-500 27 30 60 96 V. y, 44 16 32 10 85 15 26 54 10 10 M8X1.25 100 -750 20750 37 40 11 6 140 V. y, 92 30 52 14 124 21 31 76 25 19 M1 2Xl .75 50 600 20-600 32 35 70 108 Yo V. 52 20 40 10 95 17 27 59 13 12 M 8X 1. 25 63 -600 20-600 32 35 86 11 5 'I, 'I, 64 20 40 10 102 17 26 67 18 15 Ml 0Xl .25 80 750 20750 37 40 102 129 'I.

Compact Hydraulic Cylinder Series CH
KGB

Standard Strokes Bore sizes (mm) Standard strokes (mm) 20 & 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75 40, 50, 63, 80, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Made to Order Pages 22 to 24 Manufacture of Intermediate Stroke Cylinders Hydraulic Fluid Compatibility Intermediate strokes in 5mm increments can be manufactured by installing spacers

90

60 0 15 30 45 60 75 90 40 Suction flow (Port exhaust) Suction flow (Silencer exhaust) 20 Port exhaust Silencer exhaust 0 0 20 40 60 80 100 Suction flow [L/min (ANR)] 6 Series ZK2 Vacuum Pump System Flow-rate Characteristics/ZK2P00 Release Flow-rate Characteristics The graph shows the flow-rate characteristics at different supply pressures when the vacuum break flow adjustment needle is opened

Compact Cylinder

, 30, 35, 40, 45, 50 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Other intermediate strokes can be manufactured upon receipt of order.

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

High Vacuum Angle Valve

50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 XLG-50-2 70 181 79 31 11 75 52 76 29 9 XLG-63-2 88 206 100 39 11 87 95 70 77 33 9 XLG-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

Electric Actuators

40 40 40 0 0 0 0 0 0.44 0.88 0.32 1.76 2.2 0.0 0.88 1.76 2.64 3.53 4.4 0 0.44 0.88 0.32 1.76 2.2 0.0 0.88 1.76 2.64 3.53 4.4 Work load [lb] Work load [lb] Work load [lb] Work load [lb] 0 50 100 150 200 250 300 200 0 50 100 150 200 250 300 200 Overhang: L2 [mm] Overhang: L2 [mm] Overhang: L2 [mm] Overhang: L2 [mm] 160 160 L2 120 120 80 80 40 40 Horizontal mounting Wall mounting 0 0 0 0.44

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

bearing CY1S6 to 40 !

Modular Type Filter Regulator Series AW

54 54 M 30 41 50 50 K 5 3.5 1.5 1.2 J 27 30.5 38.5 38.5 H 63 66 76 76 E 40 57 73 73 D 52 59 75 75 C 73 86 92 93 B 160 201 239 242 A 40 53 70 75 G 40 55 80 80 AW20K AW30K AW40K AW40K-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model Port size B 160 214 251 255 B 234 272 275 B 208 246 249 B 209 247

MXW

40 40 (Y) (Y) 10 Operating direction (B) 6H9 +0.030 depth 5.5 0 41 160 (Hexagon socket head taper thread plug) 10.5 Operating direction (B) (A) 9.5 11 24 24 16 12.5 A 30.5 60 50 32.5 A Cross section AA Z 5-M6 x 1 thread depth 12 4 x H G depth 5.5 6H9 +0.030 H 7 Bottom through-hole 5.1 0 F E 6H9 +0.030 depth 5.5 0 (mm) Z H G F E Model MXW20-100 337 48 75 168 87 MXW20-125 362 52 79.5 185 91