Thermo-chiller

system Rated flow 50/60 Hz*5 L/min CH1: 21/26, CH2: 2/2 Max. flow rate 50/60 Hz L/min 29/38 Max. pump head 50/60 Hz m 34/50 Min. operating flow rate 50/60 Hz*6 L/min CH1: 15/15, CH2: 1/1 Tank capacity (CH1, 2 total) L Approx. 18 Pump capacity Circulating fluid outlet, Circulating fluid return port CH1: Rc1/2, CH2: Rc1/2 Tank drain port Rc1/4 Fluid contact material Stainless steel, Copper

Process Valve Series VNA

110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other S A 4 CE compliant 4 Slotted locking type B (tool required) Electrical entry B 5 6 5 6 G C T Note 1) Grommet Conduit Conduit terminal DIN terminal Semi-standard 7 7 Electrical entry/ With light/surge voltage

0.4

(R1)5 1 (P) 3(R2) Coil voltage CE-Compliant SQ 3-position exhaust center 1 2 Note) 3 4 Note) 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 2(B) (A)4 4 VFS (R1)5 1 (P) 3(R2) 3-position pressure center VFR 2(B) (A)4 5 (R1)5 1 (P) 3(R2) VQ7 Note) 200 and 220 VAC: F/L kit only Note) For sub-plate single unit type, refer to page 417.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

entry Oil-free option JSXD91 B N 50 1 G None F 2 GS D E 3 DN 4 CS 5 WN 6 7 8 B J JSXD91 Specific Product Precautions 48 JSXD30, 40, 50, 60, 70, 80, 90 Series Table of UL-compliant Products Refer to the table below for UL-compliant products.

Series VQ Base Mounted Metal Seal/Rubber Seal

Coil voltage 3 VZ 1 2(1) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Pilot valve 3 position exhaust center Symbol Specification DC AC VF 3 4(1) (1.0W) (1) 4 VV5Q11-09C6FU2 VQ1100-5 VQ1200-5 VV1000-10A-1 1 set (F kit 9 station manifold base No.) 4 sets (Single solenoid No.) 4 sets (Double solenoid No.) 1 sets (Blank plate No.)

MXS Series Air Slide Table

J 8 Max. 11(With stroke adjuster at retraction end) I 10 5 9.5 8 8.5 5 8.5 5 18.5 NA-M4 X 0.7 thread 5 deep K KA 18.5 2.5(With stroke adjuster at retraction end) Stroke adjuster at extension end 31.5 (With stroke adjuster at extension end) 5 9 Stroke adjuster at retraction end N-M4 X 0.7 thread 5.5 deep (Helisert) 5 1 15 (With stroke adjuster at extension end) 20 50 28 38 F 16 4H9 3.5 deep

MLGP

distance l (mm) 3 50mm stroke or less V = 400mm/s 4 Over 50mm stroke V = 400mm/s 100 100 100 100 50 50 80 80 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 10 40 40 5 5 32 32 25 25 1 20 20 0.7 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 5 Low Profile Guide Cylinder with Lock Series MLGP Operating pressure: 0.4MPa Operating pressure: 0.5MPa

MLGP

distance l (mm) 3 50mm stroke or less V = 400mm/s 4 Over 50mm stroke V = 400mm/s 100 100 100 100 50 50 80 80 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 10 40 40 5 5 32 32 25 25 1 20 20 0.7 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 5 Low Profile Guide Cylinder with Lock Series MLGP Operating pressure: 0.4MPa Operating pressure: 0.5MPa

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

mb1

CA2 Bore size (mm) Bolt Width across flats Tightening torque (Nm) CS1 32, 40 MB-32-48-C1247 4 5.1 C76 50, 63 5 11 MB-50-48-C1249 MB-80-48AC1251 Foot 80 100 C85 6 25 Others MB-80-48BC1251 C95 CP95 NCM NCA D-X 20Data 6-7-3 4 Square Tube Type Air Cylinder: Standard Type Double Acting, Single Rod Series MB1 32, 40, 50, 63, 80, 100 How to Order MB1 L 32 50 Without auto switch 50 L 32 Y7BW MDB1

70astamb1

CA2 Bore size (mm) Bolt Width across flats Tightening torque (Nm) CS1 32, 40 MB-32-48-C1247 4 5.1 C76 50, 63 5 11 MB-50-48-C1249 MB-80-48AC1251 Foot 80 100 C85 6 25 Others MB-80-48BC1251 C95 CP95 NCM NCA D-X 20Data 6-7-3 4 Square Tube Type Air Cylinder: Standard Type Double Acting, Single Rod Series MB1 32, 40, 50, 63, 80, 100 How to Order MB1 L 32 50 Without auto switch 50 L 32 Y7BW MDB1

•

ZPRI6Il is_ f8 .16 25 33. 50 5 I 6 '7 , ZPRlOO 1 0 1 2 15 24 32.9 49 5 6 6 51 , 50 51 51 50 48 ZPR25 I 48 51 50 48 Appl/cable tube (mm) .P Applicable tube 0 .0 Q ' R .s ,.4 4 20.6 15.6 16.6 ZPR32 ZPR40 56 54 56 54 57 55 56 54 lOA 12.8 ,.6 6 .21.6 ZI!

MB1

5 !6 !7 !8 !

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(Same surface) 50 50 50 D-A9 2 pcs. (Different surfaces) 15 15 15 1 pc. 15 15 10 2 pcs. (Same surface) 25 25 25 D-A9V 2 pcs. (Different surfaces) 10 10 10 1 pc. 5 5 5 2 pcs. (Same surface) 30 30 30 D-M9V 2 pcs. (Different surfaces) 10 10 10 1 pc. 5 5 5 2 pcs. (Same surface) 55 55 55 D-M9 D-M9W 2 pcs. (Different surfaces) 15 15 15 1 pc. 15 15 10 2 pcs.

Modular F.R.L. Unit

Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5

High Vacuum Angle Valve, XL Series

Rated voltage 100VAC, 50/60Hz 1 200VAC, 50/60Hz 2 110VAC, 50/60Hz 3 220VAC, 50/60Hz 4 24VDC 12VDC 5 Auto switch type 6 Nil Without auto switch (without built-in magnet) Solid state auto switches Switch quantity/Mounting position F9N F9P D-F9N D-F9P Symbol Quantity Mounting position Nil 2pcs. F9B D-F9B A Valve open/closed B C Note 1) The standard lead wire length is 0.5m.

Series IDG

) With dew point indicator 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 5 S Standard equipment 10 20 30 50 60 75 100 Note) In case of two or more options, indicate them in alphabetical order.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Order the seal kit, based on each bore size. 8-29-5 6 Series CXS Construction: Ball Bushing Bearing CXSL6 y!6 @6 @3r !8 @4 !9 w !3 !0 @2 ut !5 !4 @0 !1 !2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 @0!5 @9@3@4 r!8w!9 !3 i!0 @2ut!

Plate Cylinder

Material: Carbon steel 20 Series MU Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9 D-M9W D-M9AL D-A9 D-M9V D-M9WV D-M9AVL D-A9V B B A A Hs Hv D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL D-A9 D-M9V D-M9WV D-M9AVL Size A B A B Hs Hv A B A B Hs Hv 25 5 5 5 5 7.5 27.5 1 1 1 1 32 5 5 5 5 14.5 30 1 1 1 1 40 5.5 5.5 5.5 5.5 16.5 37 1.5 1.5 1.5 1.5 50 7