Proposals for Energy Saving

tank, Foot type HC03-80-Q4602-25 1 : 10 25 With tank, Foot type CA1LH63-Q7886-50 1 : 10 50 With tank, Foot type TMS80-A2484-178 1 : 10 87 With tank, Foot type CA1LH63-Q8409-100 1 : 10 100 With tank, Foot type CS1LN160-Q3930-147 1 : 10 147 Without tank, Foot type CA1BH100-Q5896-60 1 : 11 60 Without tank, Basic type CDQ2LH140-P6024-90 1 : 12.25 90 Without tank, Foot type 10 to 19.9 CDQ2LH140

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

MHSL3-16D MHSL3-16D 25 25 Pressure 0.6 MPa 20 20 Pressure 0.6 MPa Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 15 15 0.4 MPa 0.4 MPa 10 10 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 5 5 F 0 0 5 5 10 10 20 20 25 25 30 30 15 15 Gripping point L (mm) Gripping point L (mm) F F MHSL3-20D MHSL3-20D 40 Pressure 0.6 MPa 35 MHZ Pressure 0.6 MPa External grip 35 30 0.5 MPa 0.5 MPa MHF 30 25 25 20 20

Air Cylinder Series CA2

M10 x 1.25 7 18 25 16 MB1 +0.3 +0.1 +0.084 0 20 to 750 Up to 750 40 37 102 32 78 61 25 52 14 21 13 M12 x 1.75 10 22 31.5 20 +0.3 +0.1 +0.084 0 20 to 750 Up to 750 40 37 116 41 92 64 30 52 14 21 16 M12 x 1.75 10 26 35.5 25 CA2 CS1 Without rod boot With rod boot P Bore size (mm) MM N RR S U Z L H Z ZZ d e f h Z ZZ l 40 50 63 80 100 CS2 1/4 stroke 30 M14 x 1.5 27 1/4 10 84 16 165 51 165 175

CA2

30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48 58 M14 x 1.5 27 30 31 37 40 10 12 16 20 25 16 19 23 28 36 1/4 3/8 3/8 1/2 1/2 15 18 25 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 84 90 98 116 126 94 100 108 126 136 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x

Table of Contents

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

LX

F A A Lr Lr = 150mm L X F 60 Table displacement (m) Table displacement (m) Table displacement (m) 10 40 LXFH-100 50 LXFH-100 LXFH-100 8 40 30 LXFH-75 LXFH-75 6 30 20 LXFH-50 LXFH-50 LXFH-75 4 20 LXFH-25 LXFH-25 10 LXFH-50 10 2 LXFH-25 0 Weight (kg) 0 Weight (kg) 0 Weight (kg) 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 Displacement at the section indicated by the arrow when a load

KQ2

4 9 4 9 10 8 10 19 32 11 19 32 25 25 32 58 27 35 61 15.5 15.5 2.3 2.5 2.3 2.8 3.6 2.3 15 21.6 14.5 19.6 19.6 18 19.6 24 25.4 21.1 25.5 26.9 23.1 26.5 27.9 32.1 27 28.4 32.6 16.5 16.5 8 10 8 10 10 Applicable tubing 9.6 1 8 1 8 10-32 UNF 5 32 10.4 16 17 1 8 3 16 1 8 11.4 16.5 18 10-32 UNF 11.11 1 8 Connection thread 1 4 13.2 17 19 10 1 4 14.29 17.46 12.7 14.29 17.46 4.6 3 8 1 8

CM2

Z H MM ND +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 9 10 14 18 25 66 41 M8 X 1.25 9 M10 X 1.25 9 10 14 22 25 69 45 9 M14 X 1.5 16 13 25 24 49.7 92 50 12 Double Knuckle Joint (mm) Applicable bore size A1 Applicable pin part No.

Air Fittings & Tubing

3.2 4.1 12 22 33 13 21 35 25 26 36 63 28 38 65 101 105 21.5 25.5 13.7 22.5 24.5 1 8 1 4 10 14 7 8 10 14 7 8 10 14 17 12 14 17 9.6 2.5 3 17.5 15.5 10 M5 X 0.8 M6 X 1.0 3.5 3.5 15.6 15.3 12.7 9.3 14.7 22 26 14.7 15.7 23 27 29 4 1 8 1 4 23 25 4.2 10.4 18 16 4.2 10 M5 X 0.8 M6 X 1.0 3.5 11.6 3.5 16.1 17.4 13.5 6 1 8 25.5 27.5 29 9.0 12.8 20 17 11.4 10 1 4 3 8 28 30 31.5 24.5 28.5

Environment

Duty ratio: 50% 10 10 Duty ratio: 100% 5000 5000 Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 5 10 20 30 15 25 0 5 10 15 Work load [kg] Work load [kg] LEJS40A LEJS63A 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 50% Duty ratio: 25% 10 10 Duty ratio: 100% 5000

AC Servo Motor Driver

10 10 10 Note.

V100

10 units.

LX

/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section C-C, bottom view. 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 13 15 Stroke + 127 3.5 (5) 0.5 46.5 2-

LVQ

Metric sizes 4 8 10 16 22 Millimeter 06 10 12 19 25 6 10 12 19 25 6 10 12 19 25 Inch Valve type Type 1/4 Symbol 3/8 1/2 3/4 1 Basic type N.C. N.C. PA PB PA Inch sizes 07 11 13 19 25 1/4 3/8 1/2 3/4 1 N.O. B A A B A B PB N.C. N.O. Double Double acting N.O. Double acting acting With flow rate adjustment PA PA A B N.C. A B N.C. N.C. With bypass PA PA N.C. A B A B Double acting PB N.C.

Hygienic Design Cylinder Series HY

Standard Stroke Bore size (mm) Standard stroke (mm) 20 25 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Intermediate strokes of 1 mm each can be produced.

5-Port Solenoid Valve

D-sub connector cable assembly terminal numbers Terminal no. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 COM.

Low Friction Cylinders Series MQ

60 20 20 64 20 FV 25 65 22 34 30 72 22 40 FT FX 40 89 22 50 (mm) B + Stroke L FZ A + Stroke Bore size (mm) Stroke range (mm) 4 x FD REA A L 10 10 to 40 75 8 Head side flange type: MQQLG 10, 16, 20 25, 30, 40 REB 16 10 to 60 88.5 10 2 x FD 4 x FD 20 10 to 60 97 10 REC 25 10 to 50,75,100 104.5 12 30 10 to 50,75,100 124 12 CY FV FV 40 M 10 to 50,75,100 124 12 (Dimensions other than A and

Integrated Controller

200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

slotted type For AC Note) P.494 DIN terminal With light/surge voltage suppresser 10-SYJ5000 0.83 4/25/3 (A/BEA/EB) Push-turn locking lever type } (10-SYJ5000/7000 only) P.515 M8 connector 10-SYJ7000 2.9 4/25/3 (A/BEA/EB) } P.537 Note) All standard AC voltage models have built-in surge voltage suppresser. 492 4/5 port solenoid valve Series 10-SYJ3000/5000/7000 Manifold variations Manifold