CP95

52 28 36 11 4.5 163 161 36 12 10 72 90 55 50 45 25 12 155 12 15 170 32 68 9 80 60 32 45 12 5.5 175 170 45 12 10 90 110 70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120 80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60 100 120 75 35 16 205 14 20 140 25 230 110 60 20 75 16 6.5 230 220 71 14.5 150 178 120 6-13-18 18 18

CP95

52 55 28 36 11 4.5 163 161 36 12 10 72 90 50 45 25 12 155 12 15 170 32 68 9 80 60 70 32 45 12 5.5 175 170 45 12 10 90 110 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 80 16 10 100 120 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 100 16 12 126 153 60 100 120 75 35 16 205 14 20 140 25 230 110 60 120 20 75 16 6.5 230 220 71 14.5 150 178 6-13-18 18 18

Integrated Controller

The load factor for each direction can be found as follows. x = 0/350 = 0 y = 50/250 = 0.2 z = 200/1000 = 0.2 5. x + y + z = 0.4 1 1000 1000 Lz 1000 800 800 800 600 600 600 L2 [mm] L3 [mm] L1 [mm] 400 400 400 Lx Ly 200 200 200 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 0 0 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 15 Easy to Operate Model Selection EQFSH Series

MB1

75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 Standard Type/with Mounting Brackets Dimensions not shown are the same as the basic type (drawing above).

Square Tube Type Air Cylinder Series MB1

75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 Standard Type/with Mounting Brackets Dimensions not shown are the same as the basic type (drawing above).

Vacuum

Construction/Seals Spring pin Set screw 75 NztA Senies I Single/ Dimensions inch (mm) Note) The diagram on th lett is lor NZFA200. The bracket localion shown is on the left sid.

Vacuum

(M) zsE40 (F) rsE40N-70 (LHrr) Wilh ado shitt input With auto shift inpul 91 zsE4o(DnsE4F9i 2-[t3 x 0-5 it]r6ad dep$ 4 . Fo. sla*' FEol use (1P65), ins.t n air tn ino the alnGpherc rele*e porl.

mb1

75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 Standard Type: With Mounting Bracket Dimensions not shown are the same as basic style.

70astamb1

75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 Standard Type: With Mounting Bracket Dimensions not shown are the same as basic style.

5 Port Solenoid Valve Series VQZ1000/2000/3000

70 Note) The L dimension of 2 to 6 stations is the same.

Series AP500

(70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

MGC

Data View A-A Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 25 38 80 60 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 32 46 95 70 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95

ZPT/ZPX

-B01-A18 75-B01-A18 154 209 143 198.5 ZPT50HBJ25-B01-A18 ZPT80HBJ25-B01-A18 88.5 144 75.5 131 50-B01-A18 50-B01-A18 123.5 179 24 50 51.9 35.7 54 35.5 110.5 166 16.5 80 83 58.5 85.1 37 27.5 48.5 75-B01-A18 159.5 75-B01-A18 215 202 146.5 100 125 ZPT HBJ-B01-A22 (Male thread) Rc 1/8 Hexagon width across flats 17 M22 x 1.5 Hexagon width across flats 30 9.5 10 50 9.5 Width across flats 19 H 70

Shock Absorbers and Rate Controls

UN .75 1.98 5.50 |,l/A 1.50 1.15 N/A N/A Pn?r 00rt t2.9 rI.) 2.48tln ?Yr-l? ul .75 L98 2.257.50 [/A 1.503.75NlA r{/A Pl 2t 50tt t, -2, .3 t7.9i18.62 2.48{ln 2Y2'12 UN .75 2.38 2.38 9.50 N/A t.50 4.15 N/A N/A All dimensions in nches. Sh*ck Absorbens Non-Adjustable Hydraulic Series qigfE.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

C D depth E F F (B) MHZ D MHF MHL (E) MHR F-F MHK MHS MHC MHT (mm) MHY D E 0.5 A Model MHSL3-16D MHSL3-20D MHSL3-25D MHSL3-32D MHSL3-40D MHSL3-50D MHSL3-63D MHSL3-80D MHSL3-100D MHSL3-125D B C 12.5 16 18.5 25 27 35 44 54 70 80 5.5 18 21.5 24 34 37 44 56 70 90 110 MHW 0.6 M2 x 0.4 5.4 -X 5.2 0.8 1 8 M3 x 0.5 MRHQ MA 9.5 1.5 M4 x 0.7 D595 Parallel Style Air Gripper/4-Finger Type Series MHS4

XL

Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11

Title not found

Assume 75% of line pressure (PSI) is actually working on the load. The remaining 25% is consumed by flow losses in the valve, and connecting lines. Calculate 75% of your line pressure (PSI) and find it in the first column in the chart below. Move across the table to the column which is the actual port size of your valve.

Title not found

Assume 75% of line pressure (PSI) is actually working on the load. The remaining 25% is consumed by flow losses in the valve, and connecting lines. Calculate 75% of your line pressure (PSI) and find it in the first column in the chart below. Move across the table to the column which is the actual port size of your valve.

High Vacuum Angle Valve, XL Series

Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11

AC Servo Motor Driver

44 140 70 M5 M4 12 33 12.