CL

Load weight (kg) 40 32 40 30 25 20 32 20 25 20 10 0 50 100 200 400 300 500 Regarding the installation position and the mounting height of the auto switch, refer to page of Series CDM2 air cylinder (Double acting, Single rod), since the dimensions are the same. Piston speed (mm/s) (mm) Stopping Accuracy (Not including tolerance of control system.)

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

AC Servo Motor Driver

The upper limit value of the actual arc part time is limited by 20 STA 20 STB for acceleration or by for deceleration. At the setting of STA 20, STB 5000 and STC 200, the actual arc part times are as follows. (Example) Limited to 100[ms] since During acceleration: 100[ms] 20 20 100[ms] 200[ms]. 200[ms] as set since During deceleration: 200[ms] 20 5000 400[ms] 200[ms].

V

20 Stations H O W T O O R D E R S E R I E S V Q Z 1 0 0 / 2 0 0 / 3 0 0 B O D Y P O R T E D P L U G L E A D T Y P E V A L V E 2 VQZ P O R T S I Z E 2(A) P O R T S E R I E S C3 One Touch Fitting for 3.2 (VQZ100) C4 One Touch Fitting for 4 (VQZ100/200) C6 One Touch Fitting for 6 (VQZ100/200/300) C10 One Touch Fitting for 10 (VQZ300) M5 M5 Thread (VQZ100/200) 02 Rc(PT)1/4 (VQZ300) 1 VQZ100

NCQ8

220 348 32.7 60.6 124 249 443 697 45.9 84.4 171 344 612 961 Inlet Outlet 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 0.76 0.67 1.42 1.33 2.50 2.47

Rotary Table/

Size: 10 to 50 Size: 1 to 7 Size: 70 to 200 Note) Only sizes 10, 20, 30 and 50 are available in clean series.

Series IDG

0.7MPa 20 20 30 30 40 40 50 50 600 0 200 400 800 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet

NCQ8

961 012(1/8") to 100(1") 125(1 1/4") to 200(2") 012(1/8") to 100(1") 125(1 1/4") to 200(2") 012(1/8") to 100(1") 125(1 1/4") to 200(2") 012(1/8") to 100(1") 125(1 1/4") to 200(2") 012(1/8") to 100(1") 125(1 1/4") to 200(2") 012(1/8") to 100(1") 125(1 1/4") to 200(2") 0.76 0.67 1.42 1.33 2.50 2.47 056(9/16") 3.06 075(3/4") 3.42 106(1 1/16") 3.73 150(1 1/2") 4.00 6.79 Single Acting, Spring

Rotary Clamp Cylinders

on 4 surfaces Bore size 20, 25 Rod cover Guide roller Series MK2T/MK2/MK CAT.ES20-67F Series MK/MK2/MK2T Model Selection Series Item MK MK2 MK2T 12, 16 200 Max. piston speed Note) [mm/s] 20, 25 180 200 32 to 63 200 12 1.4 16 1.2 Non-rotationg accuracy (Clamp part) 20, 25 1.2 1.0 32, 40 0.9 0.5 50, 63 0.7 0.5 Rotation angle 9010 905 Horizontal mounting Not allowed Allowed Note) Maximum

Proposals for Energy Saving

, 25, 32, 40 32, 40, 50, 63 40, 50, 63, 80, 100 125, 140, 160, 180, 200, 250, 300 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 32, 40, 50, 63, 80, 100 32, 40, 50 Wiper ring SCB scraper CVM5: Rubber bumper CV3, CVS1: Air cushion None Rubber bumper Rubber bumper (base cylinder unit) Air cushion (base cylinder unit) Rubber bumper Air cushion

MY1

200 100 1 2 3 4 5 10 20 30 100 2 3 4 5 10 20 30 0.5 40 50 100 Load mass (kg) Load mass (kg) 40 Horizontal collision: P = 0.5 MPa 20 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 100 1 2 3 4 5 10 20 30 1002 3 4 5 10 20 50 Caution 40 50 Load mass (kg) Load mass

e

30 30 30 20 20 20 E-MY2HT16 10 10 10 E-MY2HT16 E-MY2HT16 8 8 8 5 5 5 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Load Mass: E-MY2HT (Double Axis) E-MY2HT/m1 E-MY2HT/m2 E-MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) E-MY2HT25 E-MY2HT25 E-MY2HT25

Cylinder with Lock

10 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 32 12 OUT 804 161 241 322 402 482 563 643 724 804 5 4 3 IN 691 138 207 276 346 415 484 553 622 691 40 16 OUT 1257 251 377 503 629 754 880 1006 1131 1257 IN 1056 211 317 422 528 634 739 845 950 1056 2 50 20 OUT 1963 393 589 785 982 1178 1374 1570 1767 1963 1 IN 1649 330 495 660 825 989 1154 1319 1484 1649 300 400 500 1000 50 100 200 63 20 OUT 3117 623

Combination Cylinder

, 25, 32, 40, 50 63, 80, 100, 125, 140, 160 CL MLG Variations Series Page Bore (mm) CNA Standard stroke (mm) Fine lock cylinder Series CLJ2 CNG 15 to 200 MNB 16 3.1-8 CNS CLS Series CLM2 20 25 32 40 CB 25 to 300 3.1-15 CV/MVG CXW Series CLG1 20 25 to 200 CXS 25 25 to 300 3.1-25 CXT 32 40 MX Series CLA 40 25 to 500 MXU 50 63 3.1-33 3.1-43 25 to 600 MXH 80 100 25 to 700 MXS Lock-up cylinder

VFS

VVFS2000-30A-6 15 m VVZS3000-21A-6 15 m VVFS2000-30A-7 20 m VVZS3000-21A-7 30 m VVZS3000-21A-8 20 m Option Option Cable Color List of Each Terminal No.

Secondary Batteries

Bore size 12 16 20 25 Cylinder stroke (mm) 32 40 50 63 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300 350, 400 20, 25 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 400 32 to 63 *Specifications and dimensions for the 90-series are the same as standard products.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation A 800 700 600 500 400 300 200 100 0

MNB

500 400 300 80 80 63 63 100 100 MLGP 200 200 50 50 40 40 80 80 100 100 RLQ 63 63 50 50 Load weight: m (kg) Load weight: m (kg) 32 32 50 40 30 50 40 30 MLU 40 40 32 32 20 20 ML1C [Example] 10 10 D5 4 3 5 4 3 -X 2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500

MNB

100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40 80 80 200 200 63 63 100 100 32 32 50 50 40 40 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 32 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100

LEF-OM002xx

V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0