High Vacuum Angle Valve, XL Series

J 26 28 36 38 45 56 Model XLG-16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80 Model 12 11 11 11 11 39 63 68 69 96 39 63 68 69 96 XLG-50 XLG-63 88 95 110 Note 1) Dimension E applies when heater option is included.

0.55

) 31.5 45 45 (22.5) 40 22 16.3 (50) 4 23.5 39.6 (60) (31.5) (Distance between ports) 1/4, 3/8 1(P), 3(R) port 1P 3R 32 NO 7 2.5 3.8 PE port 30.7 25.6 83.6 Refer to page 24 separately when piping to PE port is required.

REC

tolerance JIS class 2 +1.4 0 CE1 Symbol Stroke length tolerance CE2 Standard Stroke Effective Cushioning Stroke ML2B Max.* manufacturable stroke (mm) Bore size (mm) Bore size (mm) Standard stroke (mm) Effective cushioning stroke (mm) ML1C 20 20 45 150 to 700 REA 25 25 45 1500 32 150 to 1000 32 50 REC 40 200 to 1000 40 60 RHC *Please consult SMC representative for availability of stroke other

LEC-OM07605CN

4000 [rad/s] PB32 VICB 50 [ms] PB26 CDP 0003 () PB27 CDL 50 [pulse] PB28 CDT 100 [ms] 7 19 7.

MGP

MGPS80-100 is selected. 1 50mm stroke or less V = 200mm/s 5 l = 50mm V= 200mm/s 100 200 80 100 80 50 80 40 Load weight m (kg) Load weight m (kg) 50 50 30 50 50 20 10 10 50 100 300 10 10 20 30 40 50 51 100 200 Eccentric distance l (mm) Stroke (mm) 45 Series MGP Compact Guide Cylinder: Heavy Duty Guide Rod Type Operating pressure: 0.4MPa (58 psi) Operating pressure: 0.5MPa (72 psi) or more

energy saving effect

HECR 50 0.43 0.45 Outlet Pump head [m] Pump head [m] Outlet 0.4 0.4 40 40 HEC 0.3 30 0.3 30 HEB 0.2 20 0.2 20 HED Return port 0.1 10 0.1 10 Return port 0 0 0 0 HEA 45 40 50 0 10 20 30 60 70 80 90 100 110 120 Circulating fluid flow rate [L/min] 45 0 20 10 40 30 50 60 70 80 90 100 110 120 130 Circulating fluid flow rate [L/min] IDH HRSH250/300-A-20/4090 0.9 Usable flow rate range Circulating

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

-XB19 45 117 100 CXS10-50-XB19 50 122 105 CXS10-60-XB19 60 132 50 115 CXS10-70-XB19 70 142 125 CXS10-75-XB19 75 147 130 5 Series CXS-XB19 Dimensions CXS15--XB19 S ZZ 12 7 6 18 20 1 30 Z SS 2-3 x 16l AW (spring pin) 12 2-4.3 through 2-8 counter bore depth 4.4 45 0.2 50 0.2 45 0.2 48 25 56 58 6.3 5 2.1 M4 x 0.7 x 14.5l and M4 x 0.7 (hexagon bolt) (hexagon nut) 2-M5 x 0.8 (through) 1 9 2-M3

CC

Double acting, Single rod Double acting, Double rod CE1 50 63 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 CE2 80 100 ML2B C J G5-S CHQB CHQWB CV MVGQ CC For details, refer to the catalog CAT. E111.

CC

Double acting, Single rod Double acting, Double rod CE1 50 63 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 CE2 80 100 ML2B C J G5-S CHQB CHQWB CV MVGQ CC For details, refer to the catalog CAT. E111.

High Power Cylinder Series RHC

(n 2) 2 D-C7 D-C80 15 + 45 10 15 50 50 + 45 (n 2) (n = 2, 4, 6...) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 60 + 45 (n 2) 10 15 60 (n = 2, 4, 6...) (n 2) 2 D-C73C D-C80C D-H7C 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6...) D-B5/B64 D-G5/K59 D-G5W/K59W D-G5BAL D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6...) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6...)

Base Mounted Metal Seal/Rubber Seal Series VQ

Coil rated voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Wiring Specifications The lead wires are connected to the valve as shown below. Connect each to the power supply side.

IDU/IDF

Grommet with waist Power cord outlet Grommet with waist 6 to 12 B A B C C A A 240 240 65 65 30 30 30 30 C 70 70 40 40 50 50 50 50 A 240 240 30 30 50 50 50 50 B 38 38 32 32 45 45 45 45 Model IDU6D IDU8D IDU11C IDU15C IDU22C1 IDU37C1 IDU55C IDU75C B 38 38 50 50 45 45 45 45 C 70 70 49 49 50 50 50 50 Model IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C IDF75C Transformer box (1795) Power cord

HRX-OM-S004

water Operating temperature range1 oC 5 to 35 Cooling capacity 50/60Hz 3 kW 9.0 / 9.5 13.0 / 14.5 Heating capacity4 kW 1.7 / 2.2 2.5 / 3.0 Temperature stability5 oC 1.0 Rated flow rate 50/60Hz (Outlet) 6 L/min 42 / 56 Pump capacity Maximum flow rate 50/60Hz L/min 55 / 68 Maximum lifting height m 50 Minimum operating flow rate 50/60Hz 7 L/min 28 / 42 Circulating fluid system Tank capacity

VM

VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .

High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Air Cylinder

(n 4) 20 + 45 (n 2) (n 4) 105 + 45 (n 4) 110 + 45 (n 4) 2 95 + 45 2 2 2 2 (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 (Different surfaces and same surface) 1 15 85 D-P3DW 15 + 50 (n 2) (n 4) 2 85 + 50 n 2 (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) 2 (Different surfaces and same surface) 1 120 15 130 140 D-P4DW 15 + 65 (n 2) (n 4) 130 +

Cylinder with Lock Series MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0

0.4

Formula: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (For one input block.

RSQ

QA F Q QB QU QW QW QU Bore size (mm) 29 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 32 to 50 20 O counterbore 6.5 depth 4 9 depth 7 9 depth 7 9 depth 7 11 depth 8 A 59.5 67 68 80.5 82 B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 18 22 20 28 28 I 60 69 86 J 4.5 5 7 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 P M5 x 0.8 Rc 1/8 Rc

HRX-OM-R026

5.19.1 Alarm buzzer sound setting . 5-45 5.19.2 Alarm buzzer sound setting and checking. 5-45 5.20 Alarm customizing function . 5-46 5.20.1 Alarm customizing function . 5-46 5.20.2 Alarm customize function setting and checking . 5-50 5.20.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-62 5.21 Communication function . 5-69 5.21.1 Communication function .