Membrane Air Dryer

300 500 500 110 Drain discharge method Symbol Note H L S Manual valve Nil 75 170 240 100 300 150 C D N.C. auto-drain N.O. auto-drain Auto-drains listed on 50 page 17 are attached.

V

) YO Terminal without Connector (VQZ200/300) YZ DIN Connector (VQZ200/300) YOS DIN Terminal without Connector (VQZ200/300) Note 1) Applicable to DC Specification Note 2) Optional Specification Note 3) When specifying more than one option, combine symbols in alphabetical order.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

Compact 5-Port Solenoid Valve

This allows for space saving , weight reduction , and a large flow rate . 1 The cylinder speed is 300 mm/s.

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

VFR

400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

CS1

Bore (mm) 125 140 160 180 200 250 300 H A H1 L1 H A I type single knuckle Y type double knuckle 125 65 125 140 160 180 / 200 250 300 100 156.5 I-12 Y-12 125 3.5 65 50 110 105 161.5 I-14 Y-14 140 3.5 76 50 110 110 170.5 I-16 Y-16 155 3.5 83 56 120 125 193.5 I-18, I-20 Y-18, Y-20 160 3.5 88 63 135 160 245.5 I-25 Y-25 195 3.5 106 71 160 175 266.5 I-30 Y-30 210 3.5 115 80 175 Accessory SCS1

Electric Actuators

30 to 300 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 200 30 to 300 30 to 300 Size 16 25 32 Size 16 25 32 Size 16 25 32 Size 16 25 32 CAT.NAS100-83 RodType AC Servo Motor (100/200 W) Basic type In-line motor type Series LEYmD Series LEY Stroke 30 to 400 30 to 500 Stroke 30 to 400 30 to 500 Size 25 32 Size 25 32 CAT.NAS100-83 SliderType Step Motor

48

30 to 300 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 300 30 to 400 30 to 500 Stroke 30 to 200 30 to 300 30 to 300 Size 16 25 32 Size 16 25 32 Size 16 25 32 Size 16 25 32 CAT.NAS100-83 RodType AC Servo Motor (100/200 W) Basic type In-line motor type Series LEYmD Series LEY Stroke 30 to 400 30 to 500 Stroke 30 to 400 30 to 500 Size 25 32 Size 25 32 CAT.NAS100-83 SliderType Step Motor

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

] 36.2 67 [69.2] 52.2 58.7 76.1 Max. 10 66.1 77 Pg7 65.2 [72.2] Approx. 300 (Lead wire length) 41.1 M8 x 1 58.6 68.1 38.7 Approx. 300 (Lead wire length) 79.4 54.1 [61.1] 86.9 Applicable cable O.D. 3.5 to 7 Refer to the page 68 for dimensions with connector cable.

HRX-OM-Q026

HRSH250/300-A HRSH250/300-A Sets threshold detection pressure Series, Other Series, Other for Circulating fluid discharge HRSH100/150/200/250models HRSH100/150/200/250models pressure rise alarm generation.

VDW

Series 2 3 200 Nil Option 300 None F Foot bracket C.O. Valve type Note) The foot bracket is packed with a valve.

3 Port Solenoid Valve Series SYJ300/500/700

connector cable L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) M: Common exhaust for the pilot and main valve + + + D: Push-turn locking slotted type + R port P, E port H: Lead wire length 600 mm Pilot valve exhaust is centralized to main valve.

240

) Lead 10 (LEPY10LJ) 0.5 1 0 400 300 0 100 Speed [mm/s] 0 400 300 0 100 Speed [mm/s] 200 200 LEPY10 (Motor size: Basic) Horizontal Vertical 7 3 Lead 5 (LEPY10K) 6 2.5 5 2 Work load [kg] Work load [kg] 4 Lead 5 (LEPY10K) 1.5 3 1 2 Lead 10 (LEPY10J) Lead 10 (LEPY10J) 0.5 1 0 400 300 0 100 Speed [mm/s] 0 400 300 0 100 Speed [mm/s] 200 200 Note) The maximum value of the work load for the positioning

Manifold Specifications

EVS (Pitch) Manual override (Non-locking) VFN M5 x 0.8 (PE port) 4-4.5 Mounting hole 2-Rc 1/8 (1(P) port) (4(A), 2(B) port) 300 (Lead wire length) (Pitch) (5(R1), 3(R2) port) (mm) Stations 2 3 50 40 66 56 20 338 328 L1 L2 4 82 72 5 98 88 6 114 104 7 130 120 8 146 136 9 162 152 10 178 168 11 194 184 12 210 200 13 226 216 14 242 232 15 258 248 16 274 264 17 290 280 18 306 296 19 322 312 3-3

Digital Flow Switch

Hysteresis 5 Variable Protection Short circuit protection -65No.PF-OMO0005-F Model PFMB7201 Output type Voltage output: 1 to 5 V, Current output: 4 to 20 mA Voltage output Output impedance approx. 1 k Analogue output 6 Impedance Current output Maximum load impedance: 600 at 24 VDC 300 at 12 VDC Response time 7 Linked with the response time of the switch output.

Digital Flow Switch (Integrated display type)

Set flow 1.05 2.1 5.25 10.5 26.3 52.5 105 210 range Accumulated flow [L] 0.00 to 9.99 0.0 to 9.9 0 to 9 Instantaneous flow [L/min] 0.001 0.01 0.1 1 Min. setting unit Accumulated flow [L] 0.01 0.1 1 Accumulated volume per pulse [L/pulse] 0.01 0.1 1 Accumulated value hold 2 Select from 2 minutes and 5 minutes Operating pressure range -0.1 to 0.75 MPa Pressure spec.

EXxx-OMN0029CN

(/) Max(512 /512 ) Duplicate MAC ID Check Message Group 2 Only Unconnected Explicit Message Explicit Message (Group 2) Poll I/O Message (Predefined M/S Connection set) TM DC1125 V DeviceNet () 55 mA PNP() NPN() 32 (8 /16 /24 /32 ) DC24 V 1.5 W LED (SMC ) DC24 V2 A HOLD / CLEAR / ON 1 IP67() -1050 -2060 3585%RH() AC500 V1 FE DC500 V10 M FE 3(UL508) CE UL(CSA)RoHS 300

End Lock Cylinder Series CBG1

Stroke Table Long strokes (mm) Max. manufacturable stroke (mm) Bore size (mm) Standard strokes (mm) Note 1) Lock Unlock 20 25, 50, 75, 100, 125, 150, 200 201 to 350 25 301 to 400 32 301 to 450 25, 50, 75, 100, 125, 150, 200, 250, 300 40 1500 301 to 800 50, 63 301 to 1200 80 301 to 1400 Locked condition Unlocked condition 100 301 to 1500 Note 1) Intermediate strokes other than the above are

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

wire, 3 wire) 2 color indication solid state switches (2 wire, 3 wire) Auto switches +1 0 mm Stroke length tolerance Theoretical Output MXP16 (N) Operating pressure (MPa) Cylinder bore size (mm) 6 10 12 16 Piston area (mm) 0.2 6 16 23 40 0.5 14 40 57 101 0.7 20 55 79 141 0.4 11 32 45 80 0.3 8 24 34 60 0.6 17 47 68 121 28 79 113 201 Weights Standard Strokes (g) (mm) Body weight 80 105 130 210