C95

Series C95N Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 1000 1000 500 400 300 500 400 300 100 80 200 200 63 100 80 100 100 50 40 100 100 Load weight: m [kg] Load weight: m [kg] CJ1 63 50 40 30 50 40 30 32 50 40 CJP 20 20 32 CJ2 10 10 CM2 5 4 3 5 4 3 C85 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 C76 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ CG1

CXS

10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM CXSL 0.1 10 20 30 40 50 100 5 0.1 5 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) 8-28-12 12 Model Selection Series CXS Horizontal Mounting 6 10 to 32 Graph (7) Up

CXS

40 50 100 5 10 20 30 40 50 100 20Overhang L (mm) Overhang L (mm) Graph (4) V = Up to 800 mm/s (Up to 700 mm/s for 15, 20) Data CXSJM CXSJL Graph (3) V = Up to 600 mm/s CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 8-28-7 7 Series CXS Horizontal Mounting Graph

Series AK1000

in.Hg to 30 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa 0 to 28 MPa Refer to the following porting configurations.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

RS1H63 200 200 0.9 Operating pressure P [MPa] 0.8 100 100 0.7 0 0 10 20 30 40 10 20 30 40 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graph e Graph r Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 5000 0 1000 2000 3000 4000 32 Lateral load F [N] 70 70 60 60 Load mass m [kg] Load mass m [kg] 50 50 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10

MLGP

m (kg) Load weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40

MLGP

m (kg) Load weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40

LEC-OM07605CN

(3) (a) LE-CSS-L [mm] (37.65) (13.4) (15) (6.7) (20.9) 8+0 +50 0 150 (2.3) (1.7) (b) LE-CSS-K, LE-CSS-J, LE-CSS-1, LE-CSS-3 (L)(1) [mm] () () (100) (100) L . LEC-CSS-L 11.2 11.2.1 [W] LECLECMR-RB-032 MR-RB-12 [40] [40] LECSS2-T5 30 LECSS2-T7 10 30 100 LECSS2-T8 10 30 100 LECSS2-T9 20 30 100 11 8 11. 11.2.2 [Pr. PA02] [Pr.

Modular F.R.L. Units

V or less Model A B C D Applicable model IS10M-20-A 10.6 74.2 64.4 28 AC20l-B IS10M-30-A 12.6 84.5 70.5 30 AC25l-B, AC30l-B IS10M-40-A 14.6 93.3 75.3 36 AC40l-B IS10M-50-A 16.6 97.3 77.3 44 AC40l-06-B IS10M-60-A 22 92.5 66.8 53 AC50l-B, AC55l-B, AC60l-B Maximum operating current 12 V to 24 VAC, DC: 50 mA 48 VAC, DC: 40 mA 100 VAC, DC: 20 mA For detailed specifications on the IS10 series

CV/MVGQ

Different sides RZQ 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Different sides MI W S n 100 + 100 (n 2) n = 2, 4, 6, 8 Same side CEP1 10 35 55 75 80 90 100 100 100 75 80 90 1 Different sides CE1 2 Same side 35 + 30 (n 2) n = 2, 3, 4 75 + 30 (

Modular Design with Uniform Body Style

V or less Model P A B C D E F Applicable AC size IS10E-20-D 1/8, 1/4, 3/8 24 77.8 60.3 42 24 AC20-D IS10E-30-D 1/4, 3/8, 1/2 27 85.8 64.3 53 30 AC30-D IS10E-40-D 1/4, 3/8, 1/2, 3/4 30 93.8 68.3 71 36 AC40-D Max. operating current 24 VAC, DC or less: 50 mA 48 VAC, DC or less: 40 mA 100 VAC, DC or less: 20 mA 8.5 IS10E-50-D 3/4 31 96.8 69.8 71 36 AC40-06-D 1 46 * For detailed specifications

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350 kPa 10 70 kPa 70 kPa 350 kPa 00 20 40 60 80 100 Flow [L/min] Flow [L/min] Flow Rate Characteristics (Reference Data) PF2M710(-L) PF2M705(-L) PF2M725(-L) 10 L/min 5 L/min 25 L/min 12 10 8 6 4 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10

Floating Joint

100 100 125 150 150 1.5 1.5 1.5 1.5 1.5 1.5 76 89 106 131 152 159 18 18 24 38 42 49 1.25 2 2 2.5 3 3 43 52 60 73.5 86 86 11 14 18 18 22 22 16 16 20 22 24 28 32 32 41 46 55 70 1.25 2.5 2.8 5.2 9 9.3 Semi-standard: Heavy Load Type Hydraulic: Up to 7 MPa JAHF63-24-200 JAHF80-30-200 JAHF100-42-300 63 80 100 22000 36000 55000 24 30 42 100 125 150 72 82 100 66 79 96 21 24 29 2 2 3 106 131 152

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

JSX20, 30 JSX20U, 30U The grommet type is only available for the JSX20 and 30.

LEC-OM02704CN

-(A534G) CT160-3-TMH5B () LE-CSB-RA LE-CSB-RB 13 8 13 (2) LE-CSB-RA LE-CSB-RB LE-CSB-SA LE-CSB-SB MR -BK S1CBL M-A1-H MR -BK S1CBL M-A 2 H MR-BKS2CBL03M-A1-L MR -BK S2CBL 03 M-A 2 L ( ) AWG 20 B1 AWG 20 B2 . 13 9 13 13.2 (1) [W] LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] LECSC-S5 30 LECSC-S7 10 30 100 LECSC-S8 10 30 100 (2) (2) PA02 PA02 0 0 00 100W 200W / 400W 02 LEC-MR-RB-032

Step Motor Driver （ Pulse input type ）

100 100 100 Trigger LV 100 100 100 100 Pushing speed 30 30 30 30 Moving force 100 100 100 100 Area1 0.00 0.00 0.00 0.00 Area2 0.00 0.00 0.00 0.00 In position 0.50 0.50 0.50 0.50 88 - LEFS Basic parameter default Model LEFS16 LEFS25 LEFS32 LEFS40 Lead[mm] 10 5 20 12 6 24 16 8 30 20 10 Controller ID 1 1 1 1 IO pattern 1 1 1 1 Acceleration/ Deceleration pattern 1 1 1 1 S-motion ratio 0 0 0

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

0 5 10 15 20 25 30 CRA1 0 9 8 7 6 5 4 3 2 1 Load N Load N MSQ2A MSQ20 CRQ2 MSQ 300 MSQB20 (Basic type) MSQB2A (Basic type) 100 MRQ Displacement m Displacement m 80 250 D60 20MSQA2A (High precision type) 10 20 30 40 190 200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement

25

IZS42 Frequency: 30 Hz IZN 1) Supply pressure: 0 MPa IZF Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height from ionizer to workpiece (Charged object location) [mm] Ionizer horizontal direction [mm] ZVB Ionizer front back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(V) 24, 6, 12, 48 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Allowable voltage fluctuation (%) Note) Power consumption (W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

+ Shim thickness 100 + Shim thickness Shim mounting position (Up to 3 mm) Shim mounting position (Up to 3 mm) 30 + Shim 30 + Shim thickness thickness 22 through Description Part No.