CLS

60 67 43 43 43 48 48 60 14 14 14 17 17 20 31 31 36 41 46 56 19 19 19 24 24 29 50 50 56 63 63 71 1/4 1/4 1/4 3/8 3/8 1/2 36 36 40 45 50 60 59 59 59 70 74 86 15 15 17 20 20 25 8 9 9 10 10 12 145 75 18 110 136 115 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 85 298 100 221 27 Up to 1400 1401 to 1600 3 5 30 46 M14 x 1.5 161 78 18 110 146 128 16 114 64 110 100 298 112 246 27 Up to 1400 1401

42

Seal Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC Series Enter in order starting from the first station on the D side.

One-touch Fittings

Possible to use in vacuum to 100 kPa.

C76

) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100)

C76

) (100) 0.3 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) U 92 85 0.5 Center trunnion: O Head side trunnion: U 77 71 0.7 Series CS1 only W W 57 53 0.3 T 43 40 0.5 35 33 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W W F (100) (100) 0.7 83 77 0.3 G 63 58 0.5 52 48 0.7 Foot: L Rod side flange: F Head side flange: G (100) (100)

Compact and Lightweight

100 25 100 100 Vacuum pressure Vacuum pressure Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 20 80 80 20 80 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Air consumption 15 60 60 15 60 60 Suction flow rate Air consumption 10 40 40 10 40 40 Suction flow rate 5 20 20 5

MXS Series Air Slide Table

-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 49 MXS Series Air Slide Table Table Deflection Table deflection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table pitch deflection due to static pitch moment

Vacuum Unit

Exhaust Characteristics Flow Rate Characteristics 150 100 100 Vacuum pressure [kPa] 80 Suction flow (Port exhaust) 135 90 60 Air consumption 120 80 40 Vacuum pressure 70 105 Port exhaust 20 Vacuum pressure [kPa] Silencer exhaust/Complex exhaust 0 0 20 40 60 80 100 60 90 Suction flow [L/min (ANR)] 50 75 Flow Rate Characteristics 60 40 100 Suction flow (High-noise reduction silencer exhaust

energy saving effect

[MPa] Circulating fluid pressure [MPa] Usable flow rate range Usable flow rate range 0.5 0.5 50 HECR 50 0.43 0.45 Outlet Pump head [m] Pump head [m] Outlet 0.4 0.4 40 40 HEC 0.3 30 0.3 30 HEB 0.2 20 0.2 20 HED Return port 0.1 10 0.1 10 Return port 0 0 0 0 HEA 45 40 50 0 10 20 30 60 70 80 90 100 110 120 Circulating fluid flow rate [L/min] 45 0 20 10 40 30 50 60 70 80 90 100 110 120 130 Circulating

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 57 35 11 65 15 85 10 9 17 8 40 52 60 10 234 10 12 57 35 11 65 18 85 10 9 17 8 40 52 70 10 261 12 60 162 16 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 10 280 80 100 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 12 337 20 93 60 16.5 100 35.5 130 15 13.5 24 12

7

W) Note 1) Power consumption (W) Note 1) VXD23 to 25 VXD26, 27 VXD28, 29 VXD2A to 2C VXD2D, 2E VXD2F, 2G 9 100 9 100 12 100 12 100 15 100 15 100 Note 1) Power consumption: The value at ambient temperature of 20C and when the rated voltage is applied.

10

Temperature rise F [C] Note 2) Size Size Size 1 Size 1 9 212 [100] 9 212 [100] Size 2 Size 2 12 212 [100] 12 212 [100] Size 3 Size 3 15 212 [100] 15 212 [100] Note 1) Power consumption: The value at ambient temperature of 68F (20C) and when the rated voltage is applied.

MY2

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

0.

Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC 8 Series VQZ100/200/300 Made to Order (For details, refer to page 34.)

Mechanically Jointed Rodless Cylinder Series MY2

MY2H16 1 1 1 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Mass/MY2H (Single axis) MY2H/m1 MY2H/m2 MY2H/m3 60 50 60 60 50 50 30 30 30 20 20 20 Load mass kg Load mass kg Load mass kg MY2H40 MY2H40 MY2H40 10 10 10 MY2H25 MY2H25 MY2H25 5 5 5 4 4 4 3 3 3 MY2H16 MY2H16 MY2H16 2 2 2 1 100 200 300

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load Weight Allowable Moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Cylinder with Lock

Bore size (mm) 40 50 63 80 100 TL TA TC TDH10 (hole) TE TF TH TO TR TS TT TU TX TY Z Part no. +0.070 0 80 102 119 60 45 60 17 9 12 17 10 85 62 162 15 CA2-S04 +0.070 0 80 112 129 60 45 60 17 9 12 17 10 95 74 181 15 CA2-S06 +0.070 0 100 130 150 73 55 70 20 11 14 22 15 110 90 191 18 +0.084 0 120 166 192 100 75 90 26 13.5 17 24 15 140 110 231 25 MB-S10 +0.084 0 120 188 214 100 75 90 26 13.5 17

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

CM2

101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 68 81 93 106 131 156 17 36 20 62 9 10 40 40 25 60 112 122 72 85 97 110 135 160 185 17 36 25 64 9 10 40 40 32 60 114 124 72 85 97 110 135 160 185 17 36 32 88 10 11 53 53 40 77 143.5 154 77 90 102 115 140 165 190 19 46 40 With rod boot (mm) ZZ Symbol Z l Stroke 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 1 to 50 51 to 100

60

Rated voltage Note) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz Rated voltage Note) Coil insulation type Note) 1 2 3 4 5 6 7 8 J 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC Nil H Class B Class H DIN terminal and DC spec. are not available.