Compact Rotary Actuator Series CRQ2

CRJ 400 CRA1 Displacement (m) Displacement (m) CRQ2 MSQ 250 MSZ 350 CRQ2X MSQX MRQ 200 300 30 25 20 15 10 5 0 40 30 20 10 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 D100 100 100 80 60 40 20 0 50 40 30 20 10 0 Load (N) Load (N) 329 Series MSQX Construction o i w@3 r !

Slider Type Ball Screw Drive/11-LEFS Series

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

XLG Series

Model XLG-16 XLG-25 XLG-40 XLG-50-1 XLG-63-1 XLG-80-1 XLG-100-1 XLG-160-1 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Double acting / pressurized to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal

Fieldbus System

176 192 208 224 240 256 272 288 304 320 336 352 368 384 400 416 432 L3 148 160.5 185.5 198 210.5 235.5 248 260.5 273 298 310.5 323 348 360.5 373 385.5 410.5 423 435.5 448 473 485.5 498 L4 137.5 150 175 187.5 200 225 237.5 250 262.5 287.5 300 312.5 337.5 350 362.5 375 400 412.5 425 437.5 462.5 475 487.5 L5 13.5 12 16.5 14.5 13 17.5 15.5 14 12 16.5 15 13 17.5 16 14 12.5 17 15 13.5 11.5 16

100

B2 Supply valve (N.O.) 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC Grommet L plug connector M plug connector G: Lead wire length 300 mm L: With lead wire (300 mm) M: With lead wire (300 mm) MN: Without lead wire U With light/surge voltage suppressor (Non-polar type) r Rated voltage DC CE-compliant 5 24 VDC V 6 12 VDC V V 6 VDC V S 5 VDC V R 3 VDC V * For type U, only DC voltage is available

Compact 5-Port Solenoid Valve

Can drive 40*1 bore cylinders Can drive 50*1 bore cylinders Can drive 80*1 bore cylinders JSY1000 JSY3000 JSY5000 6.4 mm 10 mm 15 mm A, B port size: 2, 4, 6 A, B port size: 6, 8 A, B port size: 10, 12 6 One-touch fitting 12 One-touch fitting 8 One-touch fitting 540 550 520 63 25 40 Bore size [mm] Bore size [mm] Bore size [mm] 360 310 430 80 40 50 100 140 110 160 63 100 100 300 500 100 300

SL5200

Surface finish Ra max 10 in. (0.25 m) Standard 7 in. (0.18 m) 5 in. (0.13 m) Code 0 M V X Specification Standard Sub-atmospheric Code V3 L 1 H 2 4 10 40 -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7

Air Cylinder/Standard Type: Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube Type: Air-hydro Type:

CS1N180A-PS CS1N200A-PS CS1N250A-PS CS1N300A-PS Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g, 250 and 300: 60 g). Order with the following part number when only the grease pack is needed.

08-cs1-e

CS1N180A-PS CS1N200A-PS CS1N250A-PS CS1N300A-PS Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g, 250 and 300: 60 g). Order with the following part number when only the grease pack is needed.

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Piston speed mm/s Piston speed mm/s Features 6 Series MY2H Maximum Allowable Moment/Maximum Allowable Load Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2H40 40 40 40 MY2H40 MY2H40 30 30 30 MY2H25 20 20 20 MY2H25 MY2H25 MY2H16 10 10 10 MY2H16 MY2H16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500

Air Cylinder

Standard Strokes/ (mm) Air cushion Bore size Standard stroke 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Made to 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Made to Order (For details, refer to pages 25 to 27.)

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] JXC-C2-1 160 JXC-C2-3 300 JXC-C2-5 480 DIN rail L For 3 Axes For 4 Axes 5.25 12.5 (Pitch) JXC92 JXC73/83/93 7.5 AXT100 DR * For , enter a number from the No. line in the table below.

Electric Grippers

force (N) Size 16 25 32 40 16 25 32 40 141 452 707 1058 Up to 300 Up to 400 Up to 500 Up to 500 Up to 200 Up to 300 Up to 300 Up to 300 141 452 707 1058 AC Servo Motor Basic type Series LEY In-line motor type Guide rod type Series LEYG Guide rod type /In-line motor type Series LEYD Series LEYGD Dust/Drip proof compatible Dust/Drip proof compatible Series LEY Series LEY Series LEYG Series

EX120/121/122

NS Power source connector Note 1) 88 68 68 88 12 12 COM D COM C COM B COM A 24VDC COM D COM C COM B COM A 24VDC Branch connector Note 2) Branch connector Note 2) Marker: BN-WH (Made by Phoenix Contact) Marker: BN-WH (Made by Phoenix Contact) 160 136 160 136 93.5 or less 48.8 48.8 46 46 10 10 Note 1) Power supply connector specification (M12, 5 pins, plug) Note 2) Branch connector specification

Booster Regulator/Air Tank

Note) When option G (pressure gauge) is selected Connected to VBA10A, 11A VBAT05S1 Material: Stainless steel 304 Tank IN port Rc 3/8 Booster regulator IN port Rc 1/4 EXH: Rc 1/4 60 (370) (391) OUT (307) Tank OUT port Rc 3/8 257 160 163 32 32 4 x 11 Drain port Rc 1/4 100 160 200 300 Connected to VBA10A, 11A VBAT10S1 Material: Stainless steel 304 Booster regulator IN port Rc 1/4 Tank IN port

BP1000

Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Select compatible materials of construction for the gas 15 psig (0.105 MPa) 30 psig (0.2 MPa) 45 psig (0.3 MPa) 90 psig (0.6 MPa) 150 psig (1.05 MPa) 300 psig (2.1 MPa) 300 psig (2.1 MPa) 600 psig (4.1 MPa) 450 psig (3.15 MPa) 900 psig (6.2 MPa) 14 to 160F (40 to 71C) (No freezing) 1) 0.3 2 x 10-11 Pam3/sec 2 x 10

39

W Fulcrum L Front matter 5 Series CKZ3 Model Selection Model Selection CKZ3N North American Type Made to Order European Type CKZ3T 3 Clamp arm 50 63 300 150 280 140 Distance from pivot point L(mm) Distance from pivot point L(mm) 260 130 240 120 220 110 200 100 180 90 160 80 140 70 120 60 100 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 7.5 8.0 50 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200