Series AP500

0.07 0 0.00 0 40 80 120 160 200 Flow rate (slpm, N2) AP1400T 2000 psig (13.8 MPa) 200 psig (1.4 MPa) Inlet pressure: 600 psig (4.1 MPa) 1.5 (38.1) 0.55 80 0.48 70 Delivery pressure (MPa) 2.62 (66.5) Delivery pressure (psig) 0.41 60 0.34 50 0.28 40 0.69 (17.5) 0.21 30 0.14 20 A B 0.07 10 0.88 (22.4) 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3 (7.6

CL

CG-020-24A CG-025-24A CG-032-24A CG-040-24A 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 8 +0.036 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 20 25 32 40 10 10 10 10 (29.3) (33.1) (40.4) (49.2) 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 10+0.036 0 10 12 14 12+0.036 0 14+0.043 0 Tube dia. (mm) Tube dia.

Thermo-chiller

If the voltage increase ratio (dV/dt) at the zero cross should exceed 40 V/200 sec., it may result in malfunction. 4 min 6 min 10 min 14 min 20 min 30 min 2 min 1 min Max.

Rotary Table/Rack & Pinion Style Series MSQ

3 15.5 3H9 3 280 Rotary Table/Rack & Pinion Style Series MSQ Size: 10, 20, 30, 50, 70, 100, 200 How to Order CRB2 CRBU2 Size 10 20 30 50 CRB1 MSU CRJ MSQ A 10 A M9BW High Precision Type CRA1 MSQ B 10 A M9BW Basic Type CRQ2 Thread type MSQ Size End port type Size 10, 20 30, 50, 70, 100, 200 10 20 30 50 70 100 200 Nil Nil -XF -XN M 5 Rc 1/8 G 1/8 NPT 1/8 MSZ CRQ2X MSQX Side ports are all

Mechanically Jointed Rodless Cylinder Series MY2

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

Electric Grippers

Gripping force accuracy: 25% (F.S.) 50 35 30 Pushing force 100% Gripping force F [N] Gripping force F [N] 40 Pushing force 100% 25 30 20 70% 70% 15 20 40% 40% 10 10 5 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Gripping point L [mm] Gripping point L [mm] LEHZ32 Gripping force accuracy: 20% (F.S.)

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

-SS5V1-10 10-SS5V2-10 10-SS5V3-10 10-SS5V4-10 Note) The values are for individually operated 2 position type manifold bases with 5 stations.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators (mm 2) 14/2 (PA/B) 4, 2 (A, B) 1, 5, 3 (P, EA, EB) 4/25/3 (A/BEA/EB) area M8 connector 67 (41) 89 (63) L/M plug connector Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 10-SYJ3143 10-SYJ3243 10-SYJ3343 10-SYJ3443 10-SYJ3543 10-SYJ3123 10-SYJ3223 10-SYJ3323 10-SYJ3423 10-SYJ3523 10-SYJ3133 10-SYJ3233 10-SYJ3 10-SYJ3433 10-SYJ3533 Single Double

LEF-OM002xx

H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 LECPA Horizontal Transfer 50 12 B B 20 B 10 A A 40 W(kg) A W(kg) H H W(kg) 15 8 30 6 10 20 4 10 5 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s)

MNB

500 400 300 80 80 63 63 100 100 MLGP 200 200 50 50 40 40 80 80 100 100 RLQ 63 63 50 50 Load weight: m (kg) Load weight: m (kg) 32 32 50 40 30 50 40 30 MLU 40 40 32 32 20 20 ML1C [Example] 10 10 D5 4 3 5 4 3 -X 2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500

MNB

100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40 80 80 200 200 63 63 100 100 32 32 50 50 40 40 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 32 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100

MY2

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

Thermo-con/Rack Mount Type

, 50/60 Hz Single-phase 200 to 240 VAC 10%, 50/60 Hz Electrical system Overcurrent protector 14 A Current consumption 10 A (100 V) to 4 A (240 V) 7 A (200 V) to 6 A (240 V) Power consumption 900 W 1200 W Alarm Refer to Alarm.

VQZ1000/2000/3000

part number consists of 10 units.

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

5

auto switches D-M9lV D-A9lV D-M9lWV D-M9lAV D-A9l D-M9lW D-M9lA D-M9l D-P3DWA Note 1) REB With 1 pc. 5 5 10 10 (5) 15 (10) 15 (5) 15 With 2 pcs. 5 10 10 10 15 (10) 15 (5) 15 REC Note 1) 25 is only applicable for the D-P3DWAl.

CNG

(12) 18 5.5 6 4 8 5 26 Up to 200 201 to 350 20 to 200 201 to 350 22 19.5 17 45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 31 Up to 300 301 to 400 20 to 300 301 to 400 22 19.5 17 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to

CNG

(12) 18 5.5 6 4 8 5 26 Up to 200 201 to 350 20 to 200 201 to 350 22 19.5 17 45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 31 Up to 300 301 to 400 20 to 300 301 to 400 22 19.5 17 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to