Vacuum Unit Ejector Exhaust Characteristics/Flow Rate Characteristics (Representative value) ZK212 Exhaust Characteristics Flow Rate Characteristics 100 100 100 Vacuum pressure [kPa] 80 Suction flow (Port exhaust) 90 90 60 80 80 40 Vacuum pressure 70 70 Port exhaust 20 Suction flow [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow [L/min (ANR)] Air consumption [L/min (ANR)] Silencer exhaust/Complex
Rubber seal 9.0 SQ2430 (0.65) 44 or less 34 or less 180 Metal seal 11.7 Exhaust center SQ2431 (0.7) 44 or less 34 or less 175 Rubber seal 12.6 SQ2530 (0.45) 44 or less 34 or less 180 Metal seal 8.1 Pressure center SQ2531 (0.5) 44 or less 34 or less 175 Rubber seal 9.0 Dual 3 port valve A B C SQ2 31 Rubber seal (0.5) 44 or less 34 or less 155 9.0 Note 1) Values for the top ported cylinder
2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !
I.D. 427 TU0425-100-X3 TU0604-100-X3 TU0805-100-X3 TU1065-100-X3 TU1208-100-X3 4 6 8 10 12 2.5 4 5 6.5 8 285 Max. operating pressure 142 0 4 32 70 105 140 10Clean Series Operating temperature F Only available in 20m rolls.
/min 30% 70% 40% 60% 8% 92% 1.0 to 52.5 l/min 1.0 to 50.0 l/min 20.0 mA 5.00 V 0 to 52.5 l/min 10% 90% PFM750 20% 80% 1.0 to 42.0 l/min 1.0 to 40.0 l/min 16.8 mA 4.20 V 0 to 42.0 l/min 30% 70% 40% 60% 8% 92% 2 to 105 l/min 2 to 100 l/min 20.0 mA 5.00 V 0 to 105 l/min 10% 90% PFM711 2 to 95 l/min 2 to 90 l/min 18.4 mA 4.60 V 0 to 95 l/min 20% 80% 30% 70% 2 to 84 l/min 2 to 80 l/min 16.8 mA
Lr=40 mm MXQ6-30 0.03 0.015 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ6-30 MXQ6-50 MXQ6-50 0.04 MXQ6-20 0.02 0.010 MXQ6-20 MXQ6-40 0.03 MXQ6-40 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 10 20 30 40 80 120 0 10 20 30 Load (N) Load (N) Load (N) 8 8 8 Lr=70
100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.
Thin Flat/Thin Flat with Ribs Deep A B Y Model Model A B C D E F Y G H G H I: M5 x 0.8 I: M6 x 1 ZPR10UT 10 11 1 ZPR10D 10 16 12 18 16 25 33.9 50 71 76 7 15 24 32.9 49 20 25 70 75 6 ZPR16D ZPR13UT 13 14 1.5 ZPR16UT 16 17 Applicable Tubing ZPR10CT 10 11 0.8 Applicable tubing O.D.
CHKGB Bore size Rod end thread type Auto switch Quantity XC63 Stroke Intermediate stroke Applicable tube For 75mm stroke For 100mm stroke Strokes 55, 60, 65, 70 80, 85, 90, 95 Dimensions CHKGB--XC63 B A 55, 60, 65, 70 80, 85, 90, 95 Stroke Bore size (mm) A B A B 32 141 131 40 150 140 175 165 50 156 145 181 170 63 165 152 190 177 80 180 163 205 188 100 207 181 232 206 Note) Dimensions other
170 45 12 10 90 110 70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120 80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60 100 120 75 35 16 205 14 20 140 25 230 110 60 20 75 16 6.5 230 220 71 14.5 150 178 120 6-13-18 18 18 Series CP95 ISO/VDMA Cylinder: Non rotating Type Double Acting w/ End of Stroke Cushioning Minimum
32 45 12 5.5 175 170 45 12 10 90 110 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 80 16 10 100 120 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 100 16 12 126 153 60 100 120 75 35 16 205 14 20 140 25 230 110 60 120 20 75 16 6.5 230 220 71 14.5 150 178 6-13-10 10 Series CP95 ISO/VDMA Cylinder: Standard Type Double Acting w/ End of Stroke Cushioning
185.5 196 206.5 217 227.5 238 248.5 259 125 137.5 150 162.5 175 175 187.5 200 212.5 225 237.5 237.5 250 262.5 275 287.5 135.5 148 160.5 173 185.5 185.5 198 210.5 223 235.5 248 248 260.5 273 285.5 298 43 Base Mounted Plug-in Manifold Series VQ1000/2000 F kit P kit J kit G kit T kit L kit S kit M kit Construction Semistandard Exploded View of Manifold VV5Q21 L4 L3 (5.25) Applicable connector
30 75 125 150 10 20 30 125 75 100 20 50 10 40 13-/22-MXQ6(L) 13-/22-MXQ8(L) 13-/22-MXQ12(L) 13-/22-MXQ16(L) 13-/22-MXQ20(L) 13-/22-MXQ25(L) 6 4.5 5.5 5.5 13.5 5.5 13.5 1 1 1 9 9 7.5 5 12 32 8 31 8 16 3.5 3.5 7.5 11.5 26.5 27.5 11.5 6 40.5 14.5 40.5 14.5 21.5 24.5 21.5 20 10 10 17 17 36 36 16.5 26 16 16 16 22 29 47 47 7 51.5 20.5 33.5 51.5 20.5 26.5 30.5 20.5 39 29 19 29 27 35 67 70
CC 25, 50, 75, 100 125, 150, 175, 200 M L MVGQ 80/100 RB Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.
ON Response Time Start-up Speed 0.05 100 90 0.04 80 Start-up speed (MPa/msec) ON response time (msec) 70 VXFA23A 0.03 60 50 0.02 40 VXFA21A VXFA22A 30 VXFA22A VXFA21A 0.01 20 10 0 0 0 500 1000 1500 0 500 1000 1500 Piping length to the pilot valve (mm) Piping length to the pilot valve (mm) 0.05 100 90 80 0.04 Start-up speed (MPa/msec) ON response time (msec) VXFA25A, B 70 VXFA23A VXFA25A,
With air cushion FT F 4 x FD 0 E0.05 FX0.15 B B FX0.15 (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E. Other dimensions are the same as basic type.
With air cushion 4-FD E-0.05 0 FT F FX0.15 B (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E.
C H G F E D B A Port size Model J K 959 317 289 363 157 152 910 260 R 3/4 IDU11C/11D 571 580 30 70 1009 337 309 383 207 175 960 280 R 1 IDU15C : Power source 220 to 240VAC 7
[365] 0.31 [140] IDF-FL208 IDFB37E AD 28.3 [720] 15.7 [400] 0.39 [175] IDF-FL213 IDFB55E GD 24 [610] 22 [560] 0.42 [190] IDF-FL214 IDFB75E 99 Series IDFBE Specific Product Precautions 1 Be sure to read this before handling.
length) Cover diameter 1.5 Cross section 0.23 mm2 46 < >: AC < >: AC 4-14-30 31 Base Mounted 3 Port Solenoid Valve (Valve Single Unit) Metal/Rubber Seal, Base Mounted, Plug Lead Unit Series VQZ100/200/300 Dimensions: VQZ200 Single unit Grommet (G): VQZ25(R)-G01 02 2-4.5 mounting hole 19.2 4 32 Manual override Cover dia. 1.6 Cross section 0.34 mm2 R4 4 A 2 34 15 V100 SMC 3 R 1 P SY 40 300 70