Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

(122) L (62) A (Table traveling distance)2 10 62 55 64 [(66)]4 (66) [64]4 Stroke 70 [Origin]4 2 [(4)]4 (4) [2]4 Origin3 (59.9) (8.5) 48 (59.9) (63) 30 Auto switch groove5 M4 x 0.7 thread depth 8 (F.G. terminal) 6.5 46.8 63 (1 row per side) 7.5 15 B D x 150 (= E) 15 5H9 (+0.030 +0 ) depth 56 150 n x 5.5 Motor mounting position: Right side parallel Motor mounting position: Left side parallel

Compressed Air Preparation Filter

50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.

100

60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative value) ZL6M (04P) Supply pressure: 0.35 MPa/0.37 MPa (With valve)

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Air Cylinder

126 138 SA Z ZA 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st Bore size D6 34.5 (39.5) 43.5 (48.5) 47.5 (52.5) 61.5 (66.5) 65 (70) 74 (79

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

Basic Type/Direct Mount Type

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

LEY-OM007

200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.181.25 1.42 1.68 1.86 2.03 2.21 2.382.56 2.09 2.20 2.49 2.77 3.17 3.46 3.74 4.03 4.32 4.60 4.89 LEY 16 D LEY 25 D LEY 32 D [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98

Guide Cylinder Series MGG

, 200 M6 x 1 depth 9 45 25 80 60 55 30 108 25 M6 115 65 125 112 11 12 9 6.6 95 82 99 M6 x 1 depth 13 54 35 100 70 65 35 130 30 M8 135 75 150 134 13 16 9 9 108 92 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 13 60 35 106 80 73 40 135 35 M8 140 85 150 134 16 16 9 9 118 102 129 75 50 134 95 93 50 170 45 M8 175 105 186 170 19 19 M8 x 1.25 depth 16 12 9 150 134 152 90 56 152 115 103 55 194 50

Compact Cylinder with Lock Series CLQ

L x 105 L 105 115 130 150 -75D -75D -75D -50D x 140 L x 155 L x 175 L x 110 L 110 140 155 175 -100D -100D -100D CDLQB25-5D x 165 L x 180 L x 200 L M5 x 70 L 70 165 180 200 CDLQB40-10D CDLQB63-10D CDLQB100-10D -10D M5 x 85 L M8 x 100 L M10 x 125 L x 75 L 75 85 100 125 -15D -15D -15D -15D x 90 L x 105 L x 130 L x 80 L 80 90 105 130 -20D -20D -20D -20D x 95 L x 110 L x 135 L x 85 L 85 95 110

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

D-A59W Same side 20 115 115 125 130 140 150 1 pc. 15 Different sides 10 2 pcs. D-F5/J5 Same side 10 115 115 120 130 140 150 1 pc. 10 Different sides 10 2 pcs. D-F5W/J5W D-F5BAL Same side 10 120 120 120 135 140 150 1 pc. 10 Different sides 10 2 pcs.

Compact Manifold Regulator

Knob Position Symbol Position Knob position Knob position Knob position Front Top Bottom 56 A B C Top Front Bottom 84 42 84 70 70 6 26 (Max.28) P U S SMC SMC H L 6 O C K SMC SMC 28.5 51.5 6 51.5 80 13 OUT IN 3 28 13 13 OUT IN OUT IN 3 3 2. OUT Piping Position 3.

90

160.5 135 150 161.8 172.5 162.5 173 150 165 176.8 187.5 187.5 198 165 180 191.8 202.5 200 210.5 Inch size 1 Common pilot pressure supply port is only for vacuum pump system.

Compact 5-Port Solenoid Valve

ZK2 Combination Manifold n: Stations L: Dimensions n L 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 101 110 119 128 137 146 155 164 173 182 191 200 209 218 227 L2 61.4 70.4 79.4 88.4 97.4 106.4 115.4 124.4 133.4 142.4 151.4 160.4 169.4 178.4 187.4 L3 135.5 148 160.5 160.5 173 185.5 185.5 198 210.5 223 223 235.5 248 248 260.5 L4 125 137.5 150 150 162.5 175 175 187.5 200 212.5 212.5 225 237.5 237.5

air-filter-e

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

Air Preparation Equipment

Fiber Paper Micromesh Specifications Model 4 65 to 70 x L250 FGETB FGETC FGETA FGESA Note 1) FGESB Note 1) FGESC Note 1) FGELA Note 1) FGELB Note 1) FGELC Note 1) Number of elements 8 65 x L250 12 65 x L250 4 Note 2) 8 4 Note 2) 12 4 65 to 70 x L250 4 Note 2) 8 4 Note 2) 12 4 65 x L250 4 Note 2) 4 Note 2) 65 to 70 x L500 65 to 70 x L250 65 to 70 x L750 65 to 70 x L250 65 to 70 x L500 65 to

•

(mm ) . 100 125 150 I 50 75 100 125 150 75 ~ 50 I 75 50 100 125 150 107 40 70 B3 83 97 11 5 128 128 194 52 62 204 212 225 225 1 83 107 50 70 83 ! 97 115 128 I 128 52 62 204 19' 212 2.?

Vacuum Unit

Exhaust Characteristics Flow Rate Characteristics 150 100 100 Vacuum pressure [kPa] 80 Suction flow (Port exhaust) 135 90 60 Air consumption 120 80 40 Vacuum pressure 70 105 Port exhaust 20 Vacuum pressure [kPa] Silencer exhaust/Complex exhaust 0 0 20 40 60 80 100 60 90 Suction flow [L/min (ANR)] 50 75 Flow Rate Characteristics 60 40 100 Suction flow (High-noise reduction silencer exhaust

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn X-axis Xn Z-axis Zn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.