Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Electric Actuator with Integrated Guide

point distance mm LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% 1000 Load 50% 10 Amount of deflection m Amount of deflection m 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 100 1000 Load point distance mm Load point distance mm w w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

Vacuum Unit

V None (SI unit only) H V V J V None (SI unit only) P Pressure sensor 0 to 101 Analog output 1 to 5 V T 100 to 100 F Individual port exhaust For Manifold 100 to 100 High-noise reduction silencer exhaust High-noise reduction silencer exhaust H N Without pressure switch for vacuum/pressure sensor 1 With exhaust port when w is 12 or 15 2 Combination of direct exhaust and end plate exhaust

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

(Applicable for round bar, roller and chamfered type rod end configurations.) 1.0 1.0 Operating pressure P (MPa) Operating pressure P (MPa) RSQ20 RSQ40 RSQ12 RSQ16 RSQ32 0.5 0.5 RSQ50 D-X Individual -X 0 600 800 400 200 0 50 100 Lateral load F (N) Lateral load F (N) 1375 Series RSQ Construction Roller rod end Built-in shock absorber Lever rod end type (32, 40, 50 only) 12 16 @9 #3 @8 !

Guide Cylinder/Compact Type Series MGC

) (Slide bearing type) Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) St: Stroke (mm) St: Stroke (mm) St: Stroke (mm) Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGCM 40-R Stroke (Slide bearing type) St: Stroke (mm) Allowable end load F (N) MGCM 50-R Stroke (Slide bearing type) Deflection Y (mm) St: Stroke (mm) Allowable end load F (

CNG

Load in direction of rod extension Load in direction of rod retraction m 0.3MPa Graph 5 F 0.4MPa Graph 6 m 0.5MPa Graph 7 F 19 Model Selection Series CNG Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 200 200 100 100 40 30 40 50 30 40 50 32 40 25 Load weight: m (kg) Load weight: m (kg) 20 20 20 32 10 10 25 20 5 4 3 5 4 3 2 2 1 1 100 500 400 300 200 100 0.5 500 400 300 200

Cylinder with Lock Series CNG

Load in direction of rod extension Load in direction of rod retraction m 0.3MPa Graph 5 F 0.4MPa Graph 6 m 0.5MPa Graph 7 F 19 Cylinder with Lock Series CNG Model Selection Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 200 200 100 100 40 30 40 50 30 40 50 32 40 25 Load weight: m (kg) Load weight: m (kg) 20 20 20 32 10 10 25 20 5 4 3 5 4 3 2 2 1 1 0.5 100 500 400 300 200

Cylinder with Lock

192 308 80 237 381 100 257 401 With Rod Boot [mm] Bore size d e f l h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 32 54 36 23 12.5 25 37.5 50 75 100 125 73 86 98 111 136 161 186 40 56 41 23 12.5 25 37.5 50 75 100 125 81 94

REA/REB

F A F For the double axis type, this is the cylinders central axis.

Thermo-con

HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 100 100 Facility water: 50F (10C) 0 10 20 30 40 50 60 70 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Circulating fluid temperature (C) HEC003 Circulating fluid: Clear water Circulating fluid: 20% ethylene glycol F 50 70 90 110 130 150 F 50 70 90 110 130 150 1000 1000 Facility water flow rate: 1.3 gpm (5 L/min)

VEX1

900 800 700 600 C 500 400 300 200 100 0 1000 900 800 700 600 D 500 400 300 200 100 0 1000 900 800 700 600 E 500 400 300 200 100 0 1000 900 800 700 600 F 500 400 300 200 100 0 When the cylinder is extended, the speed controller is metered-out, is connected with the cylinder directly, and its needle is fully open.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Connection threads Rc/NPT 2 x B K E E F G L1 L1 L2 Y H M B Model L2 M N F LQ3B11-F LQ3B12-F LQ3B21-F LQ3B22-F LQ3B31-F LQ3B32-F LQ3B33-F LQ3B34-F LQ3B35-F LQ3B36-F LQ3B41-F LQ3B42-F LQ3B43-F LQ3B51-F LQ3B52-F LQ3B53-F LQ3B61-F LQ3B62-F LQ3B63-F 4 3 M 11 14 3.5 10 9 9.5 28.5 27.5 19.5 18.5 4.8 1/8" (E,E) (E,E) G H 20 18.5 1/8" 1/4" H L1,L1 L1,L1 6 16 20 4 17 16 12 34.5 33.5 6 22 21.5 10 8

Sensor Monitor

0 Units selection function 30 F 1 Setting of OUT1 34 F 2 Setting of OUT2 37 F 3 Digital filter setting 39 F 4 Auto-preset function 40 F 5 FUNC terminal setting 42 F 6 Fine adjustment of display value 46 F10 Sub display setting 47 F11 Display resolution setting 53 F80 Power saving mode 54 F81 Security code 55 F82 Input of line name 57 F90 Setting of all functions 58 F96 Input signal check

Industrial Filters

) 5, 10, 20, 40 74, 105 EM100 All types of gases/liquids, High-temperature fluids P.42 5, 10, 20, 40 74, 105 EM500 Stainless steel 316 21 Filter Selection by Main Application FGD/FGE/FGG type FGD type FGE type FGG type Applications and Applicable Element : Recommended : Can be used : Cannot be used Applicable filter model F G D C F G D E F G D T F G D F F G E S F G E L F G E T F G G S F G

Table of Contents

Possible to use in vacuum to 100 kPa Tubing material Tubing O.D.

Series VQ Metal Seal/Rubber Seal Body Ported

Specifications Positive COM AXT661-14A-F Single (2 wire) VQ4 Negative COM AXT661-14AN-F Positive COM AXT661-13A-F VQZ Double (latching) (3 wire) Negative COM AXT661-13AN-F VQD Note) Lead wire length: 300mm Note) The parts numbers above are applicable to VQ0/1000 (2 to 16 stations) and 13 14 VQ2000 (2 to 10 stations). VQ2000 (11 to 16 stations) uses AXT661 A (N)F425. VZS VFS 3.

A_HEC-OM-K001

A l a r m S e q u e n c e Function M O D E < O f f 5.5 How to operate 5-11 A_HEC-OM-K001-1.7 Chapter 5 Operation <12> Heating power upper limit value setting: Mode indication Heating Power Upper Limit Default value: 100 % Setting range 0 to 100% Heating power upper limit value Heating Power Upper Limit indicates that it is heating power upper limit value setting mode.

Digital Flow Switch (Integrated display type)

L/min [H_1] Hysteresis of OUT1 5.0 L/min [H_1] Hysteresis of OUT1 10 L/min [P_2] Set value of OUT2 50.0 L/min [P_2] Set value of OUT2 100 L/min [H_2] Hysteresis of OUT2 5.0 L/min [H_2] Hysteresis of OUT2 10 L/min : Only available for models with switch outputs for both OUT1 and OUT2 : For hysteresis, please refer to [F 1] Setting of OUT1 (page 35), [F 2] Setting of OUT2 (page 40). -28No.PF-OMW0007

Air Slide Table Series MXW

A F F A L = 200 mm F L = 200 mm L L L L = 200 mm A MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 0.03 0.03 0.10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXW12 MXW8 MXW16 MXW12 MXW8 MXW16 0.08 MXW12 MXW8 MXW16 0.02 0.02 0.06 0.04 0.01 0.01 0.02 75 50 25 100 0 0 0 100 20 40 60 75 50 25 Load (N) Load (N) Load (N) MXW20, MXW25 MXW20

Electric Actuator/Slider Type

Graph of Allowable Lateral Load on the Rod End (Guide) 22.5 [100] Load: F lbf [N] [Stroke] = [Product stroke] + [Distance from the rod end to the center of gravity of the workpiece] LEY63 F 2.25 [10] LEY32 Workpiece LEY25 Center of gravity 1 Stroke [mm] 0 100 200 300 400 500 600 700 800 900 1000 71 Model Selection Series LEY 25, 32, 63 Size LEFS LEFB LEJS LEJB LEY LEYG LECYM/LECYU Model Selection