CNG

H CNS C 0.1 C 0.1 NA BC 8-J BN S + Stroke F ZZ + Stroke CLS CLQ MLGP e RLQ 8 f l MLU ZZ + l + Stroke h + l ML1C With rod boot D-X Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 2018 15.5 13 38 93 1/8 44.5 14 8 12 2 87 10 (12) 18 5.5 6 4 8 5 26 Up to 200 201

Industrial Filters

EM100 All types of gases/liquids, High-temperature fluids P.42 5, 10, 20, 40 74, 105 EM500 Stainless steel 316 21 Filter Selection by Main Application FGD/FGE/FGG type FGD type FGE type FGG type Applications and Applicable Element : Recommended : Can be used : Cannot be used Applicable filter model F G D C F G D E F G D T F G D F F G E S F G E L F G E T F G G S F G G L Fluid name Applicable

REC

90 0.5 W W W 0.5 F 117 108 95 76 0.7 C J G5-S 0.1 0 500 1000 1500 81 75 66 51 0.3 CV G 60 55 49 37 0.5 Cylinder stroke (mm) The above curve in the graph refers to P = 0.5 MPa of supply pressure.

Hydraulic Filters

(mm) A B C D E F G H J K L M N P Port size Rc (d) 54 76 65 200 299 270 95 100 75 70 M8 12 10 55 3/4 76 112 89.1 210 342 320 120 128 100 95 M10 14 12 75 1 1/4 310 442 420 1 1/2 20 Return Filter Series FH100 Specifications Selection of elements for different applications Depending on the application, the user can choose among several standard element types, paper elements (5, 10 and 20 m) and

CXS

0.7 with depth 6 2-M5 x 0.8 with depth 8 38.5 58 20 56 18 9 2-M5 x 0.8 45 25 5 10 30 8 48 10 10 M6 x 1.0 x 5 CXS15 Strokes Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 25 20 15 100 80 10 30 35 40 45 50 60 70 75 80 90 100 10 15 20 25 30 35 40 45 50 60 70 75 80 90 Model 30 40 50 100 105 115 125 130 65 70 75 80 85 90 95 CXS10 97 92 87 82 102 107 112 117 122 132

MY1

8 MY1HG-F (W) Component Parts Description Material Note No.

Electric Actuators

70% 75% 80% 90% 100% Set value of pushing force [%] Step 3 Check the lateral load on the rod end.

Environment

: 75% 15000 15000 Duty ratio: 100% 12500 12500 10 10 7500 7500 Duty ratio: 100% 5000 5000 2500 2500 0 0 0 2 4 6 8 0 5 10 15 20 Work load [kg] Work load [kg] LEFS25SlB/Ball Screw Drive LEFS25SlB/Ball Screw Drive Horizontal Vertical 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

03 Rc 1 4 Rc 3 8 T F SJ Option Mountable only for VFS3120.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

VFS

01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 2-5 mounting hole Manual override 150.5 (3 position: 158) (Non-locking) 2-5 mounting hole Manual override (Non-locking) With light/surge voltage suppressor 163.5 (3 position: 171) With light/surge voltage suppressor 1 8 (

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Refer to page 100 for part numbers. 75 Non-standard Motor High Rigidity Direct Acting Guide Series LJ1H20 Ground Ball Screw Motor Output 100W 15mm/10mm lead Vertical Mount How to Order Stroke 2 LJ1H20 F K W X10 PA 1 G Cable entry direction Top entry Power supply voltage Motor specification Cable entry direction Switch Left entry N.C. (B contact) 2 pcs.

MK

C B A Model MK32-F MK40-F MK -F Model MKG32 MKG40 MKG50 MKG63 RHC 0 0.052 0 0.052 0 0.062 0.1 0.15 5.5 48 65 8 0.1 34 0.15 56 21 M6 x 1.0 5.5 54 72 8 40 62 28 M6 x 1.0 MK(2) 35 50 63 0.1 0.15 6.6 67 89 9 0.1 50 0.15 76 M8 x 1.25 9 80 108 9 60 92 M10 x 1.5 RS Q G Arm for width across flats RS H A Rod end width across flats With arm RZQ F + Clamp stroke C + Clamp stroke MI W S CEP1 CE1 CE2

RQ

, 100 30, 40, 50, 75, 100 40, 50, 75, 100 RQ MU DManufacture of Intermediate Stroke -X Description Part no.

CG5-S

M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GB GA NN MM Cover surface BA CB D FY FB 2-FC With head cover port in axial position (R) Mounting hole NB A BB FX FZ NA F FT S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17

CV/MVGQ

D-B5 D-B64 D-G5NTL 2015 + 50 ( n 2) (n = 2, 4, 6) 2 75 15 10 75 + 55 (n 2) Data 20 + 50 ( n 2) (n = 2, 4, 6) D-B59W 2 20 75 15 10-15-33 Series CVM3 Built-in One-touch Fitting CVM3 Mounting style Bore size For How to Order, refer to page 10-15-31. F Built-in One-touch fitting Specifications One-touch fittings are installed on cylinders.

5 Port Solenoid Valve Series VQZ1000/2000/3000

2 position 3 position/exhaust center 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) VQ1000-FPGC4 M5 F Option None Nil OUT side port size DIN rail mounting (For manifold) IN side port size M5 C3 C4 C6 D M5 thread 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting C4 C6 4 one-touch fitting 6 one-touch fitting F With bracket Name plate N

Cylinder with Lock Series CNS

G G FA MM CLJ2 Q D EA LY E CLM2 V LH 4 x LD CLG1 Width across flats KA VA BN CL1 N N X X Y Y LT LX C B S + Stroke ZZ + Stroke LS + Stroke MLGC CNG With rod boot MNB 75 CNA CNS 40 l h + l ZZ1 + l + Stroke CLS Long stroke CLQ Rc BQ plug with breathing hole BC element 4 x J CL 2 x MA Thread effective depth R RLQ AL FA A K H GA F GB BP (Rc, NPT, G) Unlocking port GR GL T G G 2 x P (Rc, NPT, G

Vacuum Unit

C C1 L L1 L2 L3 L Individual wiring V V V V F D-sub connector V V P Flat ribbon cable connector V V 8 (Common PV) 6 (Common PS) P Vacuum pump system PN 5/16"(Common PV) 1/4" (Common PS) 10 10 stations 1 Common wiring F/P is available only for solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.