Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: TSJ 1/4, Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]
Sensor Range: 4 [For Positive Pressure (0~500kPa)], Port Size: TSJ 1/4, Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]
Unit Manifold Valve Solenoid valve No. 3 8 7 6 5 4 3 2 1 2 No. 8 No. 7 8 7 27 (For C2: 28) 9 No. 6 No. 5 No. 4 No. 3 No. 2 No. 1 6 5 33.6 (Pitch) P = 6 (2) 38 4 3 2 1 1 (No.1) Groove side Barb fitting [1(P), 2(A), 3(R) port] Applicable tubing O.D. 4, I.D. 2.5, Polyurethane tubing (made by SMC) Soft nylon tubing (made by SMC) Connector (L = 300 to 1000) Lead wire length Cut dimension for panel mount (mounting
Force OUT 1 ON Pin No. 0 [ ] Pin No. 1 OFF Pin No. 2 [ ] b2 Force Output(pin) Output pin No.0 keykey Output pin No.1 Last Output pin No. 78 - (6) TB Ver2.1*LECPA (6-1) SET AX IS.
Electrical entry Lateral Lateral Lateral 2-wire 3-wire Wiring type NPN Type PNP Type Output type 24 VDC relay, for PLC IC circuit, Relay, for PLC Applicable load 5, 12, 24 VDC(4.5 to 28V) Power supply 10mA or less Current consumption 28 VDC or less 24 VDC(10 to 28 VDC) Load voltage 2.5 to 40mA 40mA or less Load current 4V or less 0.8 V or less at 10 mA (2 V or less at 40 mA) Internal
Dimensions/20 to 40 Basic/CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G Width across flats B1 I 2-Eh8 D MM AL A F F NA 1.5 1.5 N N K H S + Stroke ZZ + Stroke Boss-cut ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8 13 8 41 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 62 116 20
1361213613PVQ Note 1) In the case of A1 and B1, a pressure gauge or a plug is mounted on the body side, while in case of A2 and B2, on the manifold side.
Basic style: CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G RE A B Width across flats B1 I REC 2-Eh8 D CX MM AL A F F NA 1.5 1.5 CY N N K H S + Stroke ZZ + Stroke MQQ M RHC Boss-cut MK(2) RS Q G RS H A RZQ ZZ + Stroke MI W S CEP1 CE1 (mm) CE2 AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ A Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8
Q G RS H A RZQ ZZ + Stroke MI W S CEP1 CE1 (mm) CE2 AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ A Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8 13 8 41 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 62 116 20 ML2B 22 19.5 17 32 10 13 8 45 6 8 33.5 5.5 15 30 M26 x 1.5 1/8 62 120 M10 x 1.25 26 22 19.5 17 32 12 13 8 45 6 8 37.5 5.5 15 34.5 M26 x 1.5 1/8 64 122 M10 x 1.25
Note 4) Energization on A (set) side generates vacuum and energization on B (reset) side stops generation of vacuum. 28 - Doc. no. ZB-OM00201-B How to operate the supply valve of the latching type Latching type refers to a solenoid with a self holding mechanism.
Note) Except SI Unit 604 5 Port Solenoid Valve EX260 (Output device for driving 5 port solenoid valves) Compatible Protocols Compact 28 mm SV SYJ SZ Number of outputs Each 32/16 digital output type available in the series VF Output polarity Each negative common (PNP)/positive common (NPN) type available in the series VP4 Enclosure IP67 (For Units with D-sub connector, and when connected
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
B1 B2 B3 CN d1 d2 d3 E FL H (Max.) L1 l1 (Min.) l2 R SR (Max.)
N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 Work piece mounting reference plane Refer to Cross section C-C.
ZS-28-CA-2 ZS-28-CA-2 ZS-28-CA-3 ZS-28-CA-2 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-3 ZS-28-CA-4 ZS-28-CA-4 ZS-28-CA-4 SMC part no. Manufacturer's part no.
N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 Work piece mounting reference plane Refer to Cross section C-C.
17.46 12.7 14.29 17.46 1 4 28 13.2 10 20.5 17 4.6 30 28 30 5 16 15.2 12 23.5 18.5 6
L 108 117 130 135 N 93 102 N 79.5 87.5 1 4 3 8 , 50 63 80 90 35 35 40 40 52 60 68 73 25.5 33 41 44 11 14 18 21 6 7 7 7 89 97 112 117 25 25 28 28 67 75 87 92 40 52 65 70 7.5 8.5 9 9 22 28 36 42 5.5 6.5 6.5 6.5 24 33 42 47 1.6 2.3 2.6 2.6 26 30 38 43 14 17 22 22 23 23 25.5 25.5 28 35 43 45 1 2 3 4 1 101.5 115.5 106.5 120.5 4.1-82 VXZ22/23 Conduit: C FN.C.E Normally closed EN.O.F Normally open
I-04A I-05A I-08A I-10A 40 +0.070 0 +0.070 0 +0.070 0 +0.084 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 NT-04 NT-05 NT-08 NT-10 40 69 74 91 22 27 37 37 24 28 36 40 55 60 71 83 M14 x 1.5 15.5 15.5 22.5 24.5 20 20 26 28 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 8 22 27 32 41 25.4 31.2 37.0 47.3 21 26 31 39 12 12 18 20 16 16 28 30 50, 63 50, 63 M18 x 1.5 11 13 16 80 80 M22 x 1.5 100 100 105 M26 x 1.5 11
KJ10D KJ12D KJ16D KJ20D KJ27D M10 x 1.25 10 43 28 14 20 4 15 M12 x 1.25 12 50 32 16 22 4 17 M16 x 1.5 16 64 42 21 28 4 23 M20 x 1.5 20 77 50 25 33 4 27 M27 x 2 30 110 70 37 51 4 36 83 Series CP96/C96 Simple Specials These changes are dealt with Simple Specials System.