Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Fixed SI Unit, Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve

Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option:

Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: C [1 NPN Outputs + Analog (1 to 5 V)], Unit Specification: Fixed SI Unit, Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: C [1 NPN Outputs + Analog (1 to 5 V)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Series: 25A-PFM7, Flow Rate Range: 10 [0.2 to 10 (5) L/min], Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: D [1 NPN Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M

Series: 25A-PFM7, Flow Rate Range: 10 [0.2 to 10 (5) L/min], Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: D [1 NPN Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber, Option: Bracket

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Structure: IP40, Lead Wire: With lead wire with connector (2 m), Handling Instructions: With Instruction Manual (Japanese and English), Calibration Certificate included: With Calibration Certificate, Flow rate control valve: None, Custom-made Specifications: None, Rating Flow Range(L/min): 1 to 50 (25), Accessory: None, Option: None, Analog Current Output(mA): None

Structure: IP40, Lead Wire: With lead wire with connector (2 m), Handling Instructions: With Instruction Manual (Japanese and English), Calibration Certificate included: With Calibration Certificate, Flow rate control valve: None, Custom-made Specifications: None, Rating Flow Range(L/min): 1 to 50 (25), Accessory: None, Option: None, Analog Current Output(mA): None

1

13.6 10.6 BUS IN 56.6 E 3/5 2 B 2 E 3/5 E 3/5 2 B B 2 B 2 B 2 B 2 40.2 PWR PWR 4 A 4 21.6 4 A 4 A 4 A 4 A 4 A 18 46.5 (17.8) 46.5 (7.5) (11.8) P = 10.5 (Pitch) 15.5 Note 1) These figures show the SS5Y3-10SQA-05D-C6.

Vacuum

19 Cylinder bore (mm) 5 1 0 '15 lo a O o a a o 16 o a a a o a N a o o a o a o o 2 3 : a o o a o o o o t2 o a o o a a a a t0 4 0.66 1.9(4.2) 3.3(7.3) 4.6(10.1) 6 1 .73 5 . 1 { 1 1 . 2 ) 8.6(18.9) 12.1Q6.61 I 2.64 7.9(17.4)13.1(28.8) 18.4(40.5) '10 4 . 1 2 12.3(27.1 20.6(45.3) 28,8(63.4) 1 2 6.91 20.7t45.5\34.5(75.9) r8.3(106.

Vacuum

19 Cylinder bore (mm) 5 1 0 '15 lo a O o a a o 16 o a a a o a N a o o a o a o o 2 3 : a o o a o o o o t2 o a o o a a a a t0 4 0.66 1.9(4.2) 3.3(7.3) 4.6(10.1) 6 1 .73 5 . 1 { 1 1 . 2 ) 8.6(18.9) 12.1Q6.61 I 2.64 7.9(17.4)13.1(28.8) 18.4(40.5) '10 4 . 1 2 12.3(27.1 20.6(45.3) 28,8(63.4) 1 2 6.91 20.7t45.5\34.5(75.9) r8.3(106.3 Cylinder-Applicable Pad (See also section for ZP Vacuum Pads, p

SMC Electronic Switch Series Variations

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

Vacuum System Peripherals:

Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22 1 3 to 1 8 1 2 2.4 to 9.8 Internal pilot solenoid valve 24 1 2 to 2 3

Precision Regulator

Attaching a modular adapter enables a connection to the new modular connection brackets (Y200-A/Y300-A/Y400-A). 2 Air filter, mist separator, interface with bracket, etc. are not included. Order them separately.

Process Pump

Note 2) Applicable up to 2000 mL/min by using a solenoid valve with a large Cv value (Cv value of 0.5 or more).

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Also add the capacity of the piping from the cylinder to the EXH. 2. Select a model that provides a maximum processing flow volume that exceeds the consumption volume obtained in step 1.