Rotary Table/

EE) YB effective depth YC GB GA EC ED ND 2-J through JA depth of counter bore JB 2-K Shock absorber BD EF YA 2 WF Position of bottom positioning pin hole DD Effective depth FB D 2-JC depth JD BB 2-P Piping port NA DE GD FA FD Effective depth FC Q H (UU) GC 0.5 NB NC CB SD SE BC DF (Through) SF A AA CA BA BA DG S Note 1) This part is not available with 180 specification.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

x 0.5 3.5 M3 x 0.5 M3 x 0.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 M3 x 0.5 4.8 20 22.5 2H9 2 11 2H9 2 M3 x 0.5 3.5 M4 x 0.7 M3 x 0.5 18 56 13.4 26.2 11.3 28 10 2H9 2 M3 x 0.5 5.3 21 24.5 2H9 2 11.5 2H9 2 M3 x 0.5 3.5 M5 x 0.8 M3 x 0.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 M3 x 0.5 5.3 25 27 2H9 2 13.5 2H9 2 M4 x 0.7 4.5 M6 x 1 M5 x 0.8 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3 M4 x 0.7 6.5 29 32.5 3H9

Hygienic Design Cylinder Series HY

20 CJ5 CG5 HY P Nil M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 1/2 Bore size (mm) 20 25 32 40 50 63 80 100 K KA NA NB R S ZZ C M TF G 1/8 G 1/8 G 1/4 G 1/4 G 3/8 G 1/2 TN NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 3/8 NPT 1/2 81 81 83 95 107 107 131 131 5 5 6 6.5 8 8 9.5 11.5 6 8 10 13 16 16 22 27 30 30 35.5 44 55 69 80 100 24 29 35.5 44 55 69 80 100 33 33 69 69 71 78 90 90 108

MQQ

M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB F Q Y I 4-N through M 0.2 D E L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4

MQQ

2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Low Friction Cylinders Series MQ

Individual -X 1177 Series MQQ Dimensions Lateral load resisting type (Through hole & Double end tapped): MQQLB 10, 16, 20 2 x M5 x 0.8 H effective thread depth C 2 x 4 x OB 2 x 4 x OA effective depth RA Y Q F Depth of counterbore RB I 4 x N through 4 x N through M0.2 D E K B + Stroke L M0.2 A + Stroke E 25, 30, 40 H effective thread depth C 2 x 4 x OA effective depth RA 2 x P 2 x 4 x OB Y

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

thread 4-FD through Supply port PD NA FF FE PC PA A Mounting threads 4-MA thread depth MB Groove position for auto switch mounting HB depth HC HD (2 pcs.)

MQQ

2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

39

x V H7 Depth I C 4 x NN Depth S 2 x 2 x PH7 Depth D 2 x 2 x MM Depth J Hexagon socket head plug 2 x 2 x NPT 1/4 G Rc E RB B (mm) Bore size (mm) B C D E GA GC I J K L LA LB MM GB N NA NB NC NN P 50 63 92 48 12 13.7 95 166 10 12 55 376.6 155.5 78.4 M10 x 1.5 19 13 36.5 9.5 M8 x 1.25 10 95.5 110 54 12 16.6 99 10 12 55 391.6 161 78 M10 x 1.5 22 13 36.5 15 M8 x 1.25 10 171.5 100.5 Bore size (mm

Fluoropolymer Tubing Variations

(mm) TLM0201 2 x 1 2 1 TLM0302 3 x 2 3 2 TLM0425 4 x 2.5 4 2.5 TLM0403 4 x 3 4 3 TLM0604 6 x 4 6 4 TLM0806 8 x 6 8 6 TLM1075 10 x 7.5 10 7.5 TLM1008 10 x 8 10 8 TLM1209 12 x 9 12 9 TLM1210 12 x 10 12 10 TLM1916 19 x 16 19 16 TLM2522 25 x 22 25 22 TLM1613 16 x 13 16 13 Length per roll Color Translucent Translucent Symbol N N R BU B N N N 10 m Red (Translucent) 20 m Blue (Translucent) Roll

Escapements Series MIW/MIS

2 1425 Series MIW/MIS Dimensions/Double Finger Type MIW-D 2 x P Supply port 3 x LA Scraper mounting thread EB FB NB GD LB JA B FA FC GC GB JB D Mounting hole 4 x GA LC EA C 2 x P Attachment mounting thread 4 x FD through Supply port PD NA FF FE PC PA A Groove position for auto switch mounting Mounting threads 4 x MA thread depth MB HB depth HC ME PE HD (2 pcs.)

LG1H

147 2 Series LG1H20 Standard Motor High Rigidity Direct Acting Guide Motor Output Ground Ball Screw 100W 15mm /10mm lead Horizontal Mount Without Coupling How to Order 1 F 2 PA Stroke LG1 H202 Power voltage Cable length 1 2 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 2 3 4 5 2m 3m 4m 5m Frame material Nil Aluminum alloy T Stainless steel Specifications Intermediate strokes For manufacture of

Copper-free Actuators

Pin Cylinder Series C(D)JP 1.2-2 20-CJP Double acting SCJPl 1.2-8 20-CJP Single acting Large bore size cylinder Series C(D)S1 Standard SC51l 1.10-2 20-CS1N Fine lock cylinder Series C(D)L RB Standard SCLAl 3.1-33 20-CLA J Cylinder with lock Series C(D)NA D SCNAl Standard 20-C(D)NA 3.3-1 -X End lock cylinder Series C(D)B 20Standard 20-CBM2 SCBM2l 3.4-4 Standard 20-CBA1 SCBA1l 3.4-12 Plate

TL/TIL

Torque (N.m) Bore size 0.6 to 0.9 1/8 0.8 to 1.2 1/4 1.0 to 1.6 3/8 1.5 to 2.0 1/2 2.0 to 2.7 3/4 2.5 to 3.6 1 17-5-138 4 Series LQ 1 2, LVN, TL/TIL High Purity Fluoropolymer Fittings/ Needle Valve/Tubing Precautions 2 Be sure to read before handling. Operating Environment Operating Precautions Warning Warning 1. Do not use in locations having an explosive atmosphere. 2.

TL/TIL

Torque (N.m) Bore size 0.6 to 0.9 1/8 0.8 to 1.2 1/4 1.0 to 1.6 3/8 1.5 to 2.0 1/2 2.0 to 2.7 3/4 2.5 to 3.6 1 17-5-138 Series LQ 1 2, LVN, TL/TIL High Purity Fluoropolymer Fittings/ Needle Valve/Tubing Precautions 2 Be sure to read before handling. Operating Environment Operating Precautions Warning Warning 1. Do not use in locations having an explosive atmosphere. 2.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Ball bushing O-ring NBR Snap ring Nickel plated Carbon tool steel Rod end nut Nickel plated Steel Mounting nut Steel 12 Series MQM Dimensions Basic type: MQMLB 6 Mounting nut M12 x 1 Rod end nut 2-M5 x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F F S + Stroke H ZZ + Stroke (mm) P Bore

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

Dimensions/20 to 40 Basic/CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G Width across flats B1 I 2-Eh8 D MM AL A F F NA 1.5 1.5 N N K H S + Stroke ZZ + Stroke Boss-cut ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8 13 8 41 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 62 116 20

Material: Super PFA High Purity Fluoropolymer Tubing TL/TIL Series

(mm) TIL13 1/2" 1/2" x 3/8" 12.7 TIL19 3/4" 3/4" x 5/8" 19.05 TIL25 1" 1" x 7/8" 25.4 TIL11 3/8" 3/8" x 1/4" 9.53 TIL07 1/4" 1/4" x 5/32" 6.35 TILB01 1/8" 1/8" x 1/16" 3.18 TL0604 6 x 4 6 TL0806 8 x 6 8 TL1008 10 x 8 10 TL1210 12 x 10 12 TL1916 19 x 16 19 TL0403 4 x 3 4 TIL05 3/16" 3/16" x 1/8" 4.75 TIL01 1/8" 1/8" x 0.086" Basic diameter 3.18 +0.2 0.1 +0.2 0.1 1.6 0.15 1 0.1 0.1 0.1

(or No Selection in the Case of One-touch Fittings), Mounting Option: Mounting Screw, Round Head Combination Screw, Pressure Sensor: None, NA: NA

(or No Selection in the Case of One-touch Fittings), Mounting Option: Mounting Screw, Round Head Combination Screw, Pressure Sensor: None, NA: NA