SMC Corporation of America
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Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Fixed SI Unit, Instruction Manual: None, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Panel Mount Adapter

13.6 10.6 BUS IN 56.6 E 3/5 2 B 2 E 3/5 E 3/5 2 B B 2 B 2 B 2 B 2 40.2 PWR PWR 4 A 4 21.6 4 A 4 A 4 A 4 A 4 A 18 46.5 (17.8) 46.5 (7.5) (11.8) P = 10.5 (Pitch) 15.5 Note 1) These figures show the SS5Y3-10SQA-05D-C6.

19 Cylinder bore (mm) 5 1 0 '15 lo a O o a a o 16 o a a a o a N a o o a o a o o 2 3 : a o o a o o o o t2 o a o o a a a a t0 4 0.66 1.9(4.2) 3.3(7.3) 4.6(10.1) 6 1 .73 5 . 1 { 1 1 . 2 ) 8.6(18.9) 12.1Q6.61 I 2.64 7.9(17.4)13.1(28.8) 18.4(40.5) '10 4 . 1 2 12.3(27.1 20.6(45.3) 28,8(63.4) 1 2 6.91 20.7t45.5\34.5(75.9) r8.3(106.

19 Cylinder bore (mm) 5 1 0 '15 lo a O o a a o 16 o a a a o a N a o o a o a o o 2 3 : a o o a o o o o t2 o a o o a a a a t0 4 0.66 1.9(4.2) 3.3(7.3) 4.6(10.1) 6 1 .73 5 . 1 { 1 1 . 2 ) 8.6(18.9) 12.1Q6.61 I 2.64 7.9(17.4)13.1(28.8) 18.4(40.5) '10 4 . 1 2 12.3(27.1 20.6(45.3) 28,8(63.4) 1 2 6.91 20.7t45.5\34.5(75.9) r8.3(106.3 Cylinder-Applicable Pad (See also section for ZP Vacuum Pads, p

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

The set values for OUT1 are displayed in auto-preset mode as follows: Normal output Reversed output P_1 = A-(A-B)/4 n_1 = B+(A-B)/4 A = Max. pressure H_1 = (A-B)/2 H_1 = (A-B)/2 B = Min. pressure The set values of OUT2 become as follows "_", i.e. "P_2", "n_2", "H_2".

Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22 1 3 to 1 8 1 2 2.4 to 9.8 Internal pilot solenoid valve 24 1 2 to 2 3

Attaching a modular adapter enables a connection to the new modular connection brackets (Y200-A/Y300-A/Y400-A). 2 Air filter, mist separator, interface with bracket, etc. are not included. Order them separately.

Note 2) Applicable up to 2000 mL/min by using a solenoid valve with a large Cv value (Cv value of 0.5 or more).

Circuit (Class 2) of maximum 30 Vrms (42.4 V peak) or less, with UL1310 Class 2 power supply unit or UL1585 Class 2 transformer. The product is a UL approved product only if it has a mark on the body. Use the specified voltage. Otherwise failure or malfunction can result. Insufficient supply voltage may not drive a load due to a voltage drop inside the product.

A Symbol Vacuum (2/V) port Exhaust (3/E) port Pressure sensing port (G) Supply (1/P) port 06 Rc3/4 Rc1 Rc1/8 One-touch fitting 04 Rc 1/2 Applicable tube diameter F06 G3/4 8() G1 G1/8 F04 G1/2 One-touch fitting N06 NPT3/4 NPT1 NPT1/8 Applicable tube diameter 5/16(inch) N04 NPT1/2 3.4.2 Piping to ports 1) When piping to a vacuum port or pressure detection port, the body made of aluminium alloy

Also add the capacity of the piping from the cylinder to the EXH. 2. Select a model that provides a maximum processing flow volume that exceeds the consumption volume obtained in step 1.

5 ~ 60C / 40 ~ 40F Temperature Rc(PT) 1/8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc

When a fitting is over tightened, more of the sealant material is squeezed out. Remove the squeezed out sealant material. 4. When tightening is not sufficient, it will cause sealing failure or a loose fitting. 5. Re-using 1) Normally, a fitting with sealant can be re-used 2 to 3 times. 2) Remove the sealant material that is separated and adhering to a removed fitting with air blow, etc.

Av o i d m o u n t i n g t h e v a l v e i n a p o s i t i o n w h e re i t w i l l b e s u b j e c t t o vibration. 2. Ensure that pipework is thoroughly clean and free of water and debris during installation. 3. U s e a t h r e e c o r e s c r e e n e d c a b l e f o r s i g n a l a n d p o w e r. C o n d u c t o r diameter minimum 0.5mmeach core 4.

16 No.ZL3-OM00801-A 7.2 1 (/) ZL3/ZL6 ZL3-JSY3140-5LZ -a 1 3) 2) DC24V 1) 300mm 300mm * *0.150.18Nm 2) D: E: 1 1 1 1 3) 1 1 2 X12 ZL3/ZL6 SY100-30-4A-6 1 2) / 1) 2) 300 4 DC24V 6 600 10 1000 15 1500 20 2000 25 2500 30 3000 50 5000 ZL3/ZL6 SY100-30-A *x2 17 No.ZL3-OM00801-A ZL3/ZL6 ZS-39-5G ZL3-LW1-N-A 1 1) N NPN P PNP 2 ZL3/ZL6 ZL3-EJ1-H-A 1 2) 1) M 0.35 MPa

Panel When mounting on a panel, refer to page 561 in Specific Product Precautions. 4.5 M5 x P0.5 8.5 M6 x P0.5 5.5 71 11 18 124 46 53 92 10 10 9.5 Bleed Bleed 63 Exhaust SUP(1) OUT(2) 30 OUT(2) SUP(1) 43 35 2 x Rc 1/8 Port size EXH 43 50 50 2 x Rc 1/4 Port size 2 x Rc 1/8 35 60 2 x Rc 1/8 Pressure gauge port Pressure gauge port 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (Option) 30

P36201021 7 NBR Damper P36202026 P36202026 2.5 x 1 8 NBR O-ring 2 x 1.25 2 x 1.25 9 NBR O-ring 4.5 x 1 4.5 x 1 4.5 x 1 4.5 x 1 10 x 1.3 10 NBR O-ring 27.8 x 1.5 JISB2401 P11 JISB2401 P11 27.8 x 1.5 11 NBR O-ring JISB2401 P5 Note 2) JISB2401 P5 Note 2) 12 NBR O-ring JISB2401 P16 Note 2) JISB2401 P16 Note 2) 13 NBR Seal (A) P36203015 P36203015 14 NBR Seal (B) P36203016 P36203016

Note 2) Applicable up to 2000 mL/min by using a solenoid valve with a large Cv value (Cv value of 0.5 or more).

(Representative valve) Ambient and operating air temperature -5 to 60 oC (No freezing) C(dm3/(sbar)) 0.6 [1(P) 2(A)] , 0.5 [2(A)3(R)] Flow rate characteristics b 0.2 [1(P) 2(A)] , 0.15 [2(A)3(R)] Port size Rc, NPT, G1/8 ON timing ON upon the set delay Output method Normal close Reset Resets by exhausting the input signal pressure Weight 480g *) The dispersion is shown excluding the first