MICRO MIST SEPARATOR

DIMENSIONS (Accessory) (Port size) Maintenance space Drain Dimensions Model Standard specifications 1/81/4 1/43/8 1/43/81/2 , AFD20-A 40 87.6 9.8 20 45 AFD30-A 53 115.1 14 26.7 30 50 AFD40-A 70 147.1 18 35.5 38.4 75 AFD40-06-A 75 149.1 20 35.5 38.4 75 3/4 Model Bracket mount dimensions AFD20-A 30 27 22 5.4 8.4 40 2.3 28 AFD30-A 41 35 23 6.5 13 53 2.3 30 AFD40-A 50 52 26 8.5 12.5 70 2.3

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

Silencer Series AN

Series ANA1 Page 5-10-8 40 dB (A) 30 m High noise reduction type Series ANB1 has a larger effective area with the same port size as Series ANA1.

Nozzle Type Ionizer

ON OFF Output Maintenance signal Requirement for maintenance detected ON OFF Input External switch signal 1, 2 16 IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01m 06 07 High flow rate nozzle IZN10E-02m 06 07 18.31 (100) 2.5 16 5 92.5 46 3.5 L 6 18.5 6 11 8 L 12.4 5 6 M3 x 0.5 thread depth 4 (Ground terminal) 40 27.7 L-L Applicable tubing O.D. d A 86.4 [mm] Model

FILTER REGULATOR

HOW TO ORDER AW 30 03 BE 1 B 1 3 4 5 2 1 Symbol Description Body size 20 30 40 60 Nil Rc N NPT Thread type 2 F G 01 1/8 02 1/4 03 3/8 Port size 3 04 1/2 06 3/4 10 1 Nil Without mounting option B With bracket a Mounting H With set nut for panel mounting Nil Without auto drain b Float type auto Option C With float type auto drain (N.C.) drain 4 D With float type auto drain (N.O.)

VZS

Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series Average speed (mm/s) 800 700 600 500 400 300 200 100 0 It is when the cylinder is extending that is meter-out controlled by speed controller which

Dual Speed Controller with One-touch Fitting Series ASD

Flow Direction Symbols on Body Meter-out type Meter-in type Symbol JIS Symbol 15-9-67 Series ASD-FM How to Order ASD 3 3 0 F M 01 06 S With seal M5 and U10/32 types, as they are not available with seal. Body size 2 3 4 M5 standard 1/8 standard 1/4 standard Type Applicable tubing O.D.

VHS20/30/40/50

VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

/40-06/50 2-10 I 10 I G H F E X H .

Vacuum System Peripherals:

40 e Valve Model Fill in the blanks below with symbols of necessary specifications.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5

5

(mm) Female Rod End (mm) (mm) Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 95 Bore size S TD TT TX TY TZ Z ZZ 20 62 8 10 32 32 52 36 116 Bore size ZZ 20 103 25 8 20 M5 x 0.8 95 25 62 9 10 40 40 60 40 120 25 107 32 12 20 M6 x 1 97 32 64 9 10 40 40 60 40 122 32 109 40 13 21 M8 x 1.25 125 40 88 10 11 53 53 77 44.5 154 40 138 * When female thread is used, use a thin wrench when tightening the piston

Stainless Steel 316 Fittings

(mm) a b Note 2) Effective area (mm2) Note 1) D W Weight (g) W L2 P M1 M2 N O L1 Model P 3.2 4 6 8 10 12 4 6 8 10 12 16 KQG2U23-04 KQG2U04-06 KQG2U06-08 KQG2U08-10 KQG2U10-12 KQG2U12-16 3.2 4.2 13.4 25.6 40 57.4 3.2 3.2 4.2 4.2 4.2 4.2 8.5 11.9 19.3 31.6 47.6 67.6 5.6 5.6 8 8 8 8 9.1 11.4 13.7 16.6 18.7 24.6 27 29.3 33.7 38.3 43 47.4 10.8 11.2 12.2 13.8 14 15.6 8.1 9.1 11.5 14.6 17.6 19.8

CV/MVGQ

TX TY TZ QY S TD TT Bore size (mm) 20 25 32 40 52 36 116 62 8 10 32 32 14 120 10 40 40 60 40 14 62 9 40 60 40 122 9 10 40 16 64 44.5 154 53 53 77 16 88 10 11 10-15-24 25 Valve Mounted Cylinder Double Acting, Single Rod Series CVM5 Head Side Trunnion Style (T) Bore size Stroke CVM5T Manual override Width across flats B2 Width across flats B1 0.025 0.061 RE A B REC CX CY Width across flats

CV/MVGQ

TZ TY TX TT TD S QY Bore size (mm) 20 25 32 40 116 36 52 32 32 10 8 62 14 120 40 60 40 40 10 9 62 14 122 40 60 40 40 10 9 64 16 154 44.5 77 53 53 11 10 88 16 10-15-24 25 Valve Mounted Cylinder Double Acting, Single Rod Series CVM5 Head Side Trunnion Style (T) Bore size Stroke CVM5T Manual override Width across flats B2 Width across flats B1 0.025 0.061 RE A B REC CX CY Width across flats

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

(Including Bracket, Screw, Set Screw) Applicable bore size [mm] 32 40 50 63 80 100 125 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 The following stainless steel mounting screw kit (including set screws) is available. Use it in accordance with the operating environment. (Since the auto switch mounting bracket is not included, order it separately.)

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces, Same surface) With 1 pc. 70 75 80 85 95 100 15 D-A9 70 + 40 (n 4)/2 n = 4, 8, 12, 16 80 + 40 (n 4)/2 n = 4, 8, 12, 16 85 + 40 (n 4)/2 n = 4, 8, 12, 16 95 + 40 (n 4)/2 n = 4, 8, 12, 16 100 + 40 (n 4)/2 n = 4, 8, 12, 16 15 + 40 (n 2)/2 n = 2, 4, 6, 8 75 + 40 (n 4)/2 n = 4, 8, 12, 16 With n pcs. With 2 pcs.

Tie-rod Type Hydraulic Cylinder

Auto switch models Bore size (mm) 40 50 63 80 100 D-M9/M9V/M9W/M9WV D-M9A/M9AV/A9/A9V D-F5/J59/F5W/J59W D-F5BA/F59F/F5NT D-A5/A6/A59W BA7-040 BA7-063 BA7-063 BA7-080 BA7-080 CHQ BT-04 BT-06 BT-06 BT-08 BT-08 CHK CHN Auto switch models Bore size (mm) 80 100 BD1-08M 63 BD1-06M 50 BD1-05M 40 BD1-04M CHM D-G39/K39/A3/A44 D-G5/K59 D-G5W/K59W/G5BA/G59F D-G5NT/

C95

Contents CK95-32 CK95-40 CK95-50 CK95-63 CK95-80 CK95-100 32 40 50 63 80 100 Kits include items 13 to 17 for 32, 12 to 18 for 40 to 100 from the table above.