Rated Flow Range: 10 to 1000 l/min, Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: w/o Lead Wire and M12 Connector, Unit Specification: SI Unit Only, Calibration Certificate: Yes, Flow Direction: -

LEC-OM071xx

n e l D i s p l a y a n d SigmaWin+TM 2.

Mechanically Jointed Rodless Cylinder Series MY1

consists of a left support and a right support.

Step Motor Controller

Connector A terminal no. B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Title not found

Connector A terminal no. B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

10

flow rate of 14.1 scfm [400 L/min] (ANR) is P1 29 psi (0.2 MPa) for a 4 orifice and P1 84 psi (0.58 MP)a for a 3 orifice.

Vacuum Unit

B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown DC(

Programless Controller Series LECP1

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Cable color Connector D terminal no.

Vacuum Module Series ZX

Stabilize the source pressure by providing a tank and a vacuum regulator. Provide a vacuum switch valve to individual lines. Thus, in case of an error, each valve can be turned OFF to minimize the influences on other pads.

VM

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

M3: 0.8 Nm 61 Series SYJ7000 Type 20: Top Proted/SS5YJ7-20Stations -00 [ ]: AC Grommet (G) Approx. 300 (Lead wire length) 6 L2 L1 4-4.5 (For mounting) 6.5 (DIN 7.8) 20.3 (DIN 21.6) 15.5 3 8 3.3 122 [126.4] 17 16.5 107.4 [111.8] B A B A B A B A B A P R R 50 25 57.3 (DIN 58.6) 56.5 (DIN 57.8) P R R 17 17 79.5 [81.7] 78.7 [80.9] 1/8 (P, R port) 1/8 (A, B port) Manual override (Pitch) P = 19

VS7-6

To use a perfect valve and a spacer style regulator, use a manifold or a sub plate as the standard and stack in the following order: the perfect spacer, spacer style regulator, and the valve.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L3 L4 1.12-20 VQZ1000/2000/3000 Body Ported VQZ2000 (35) (5.5) 44.5 Mounting holes VV5QZ22 C 28 (11) Station 20 (7.5) DIN rail clamp screw n-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread Grommet (G) U side n Manual override 5 SY B 4 4 SMC SMC 2 A SYJ (L4) (L3) L2 L1 5 18 P=16 B B B 4 4 4 3 SMC SMC 2 2 2 A A A SX 2 SMC SMC SMC VK 1 SMC VZ Stations D side

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Pitch) P=19 1/8 (A port) 21 46 Series SYJ700 Type 21R Manifold: Top Ported (External Pilot Type)/SS3YJ7-21RStations (-00) [ ] for AC Grommet (G) M5 x 0.8 (X port) 63.5 L2 L1 30.5 21.5 6 1.5 14 22.5 9.5 6 21.5 49 (DIN 50.3) 26 X P A A A A 43 71.2 [73.4] 2-5.5 (For mounting) R 1/4 (P, R port) 1/8 (A port) (Pitch) P=19 21 Manual override Approx. 300 (Lead wire length) (Station n) (Station

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

L4 L4 L5 A L5 D3 D3 T T D2 L1 D2 L1 L2 L2 AS ASP Metric Size ASN A M1 L5 Max.

PA300/500/700

2(A) 2(A) 47.5 VHS 13.5 (A port) Rc 3/8 Individual exhaust: VV3PA5-42Station 3-03 28.5 3(R) 3(R) (R port) Rc 3/8 PA NO NC 87 (PA port) Rc 1/8 (Mounting hole) 2-7.2 30 PA 41.5 91.4 84.4 91.4 60 16.5 1(P) 41.5 PA (P port) Rc 3/8 (Pitch) 88 31 33 7.5 L2 L1 (PA port) Rc 1/8 PA 61.5 66 2(A) 2(A) 47.5 13.5 (A port) Rc 3/8 n: Station n L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 6 227 212

AS-FG/ASD-FG

Steel Series AS-FG Dimensions/Elbow Type M5 type U10/32 type Metric size Inch size Model d T Weight g H D1 D2 L1 L2 L3 L4 A Model d T Weight g H D1 D2 L1 L2 L3 L4 A Max.

Information

LECSB1/LECSC1/LECSS1: Single phase 100 to 120 VAC, 50/60 Hz Connection terminal: L1,L2 LECSB2/LECSC2/LECSS2: Single phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2 Three phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2,L3 Do not connect. L1 Main circuit power supply L2 L2 L3 L3 N P1 P2 N Connect between P1 and P2. (Connected at time of shipping.)

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

When a layout becomes complicated, please indicate it on a manifold specification sheet.