Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.

Fieldbus system EtherCAT compatible SI Unit

UNSIGNED8 Number of Channels 40x2:03 40x2:04 Channel 2 Channel 3 (Output setting value during communication fault) UNSIGNED16 0 to 0xF 40x3:0 Idle mode UNSIGNED8 Number of Channels 40x3:03 40x3:04 Channel 2 Channel 3 (Output setting during communication idling) Enum0800 0=Disable (Hold) 1=Enable (Fault value) 40x4:0 Idle value UNSIGNED8 Number of Channels 40x4:03 40x4:04 Channel 2

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set (Example) SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set The asterisk denotes the symbol for assembly.

125

Manifold base Port 2(A) side Port 2(A) side Internal pilot Common external pilot + + + + Blanking plate assembly VVEX2-2 (Common external pilot) Exhaust from both ends when there are 5 stations or more. 2 x M5 Common external pilot port (VVEX2-2 only) 2 x Port 3(R): 1/4 30.5 2 x 6.5 7.5 A B A B P1 P1 13.5 (For mounting) 98 88.2 11.5 27 P1 P 66.1 R 50 25 2 P=31 22.5 7.5 24 2 x Port 1(P):

VSA4

JIS Symbol 2 position single 01 02 03 Sub-plate Assembly Part No.: VS4020-SMounting bolt and gasket are not included.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Compact Cylinder with Air Cushion and Lock Series RLQ

Type A mounting bracket part number .YA-03 Joint .YU-03 T1 B 2 x D through 2 x O counterbore Material: Stainless steel (mm) Bore size (mm) B D E J M O Part No. YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 Joint YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 K ( across flats) Mass (g) Bore size (mm) T1 RS T2 V W Part No.

RLQ

Type A mounting bracket part number .YA-03 Joint .YU-03 T1 B 2-D through 2-O counterbore Material: Precision die-casting material equivalent to stainless steel 304 (mm) Bore size (mm) B D E J M O Part No. YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 Joint YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 K ( across flats) H (With locking) Weight (g) Bore size (mm) RS T1 T2 V W Part No.

F

Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03 ..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !

•

Millirrfeter size 1{1' Q I1'SiZeJ' , 0.6' r'~ '" 0Ur 0~ '2. , ~1/4' a!;'16" 03/4" 'ol/2~ AsP330F'!U R(PT)1/8 M5 X 0.8 J\SP. 4;JOF~02 R(PT)I /4 Rc(PD1 /8 IIS'P530F:03 R(PT)318 Rc(PT)lIS 'ASi"!)30l"'lJ4 " R(PT)1!2 Rc(PT)1I4 ASP;l3OF:,FO~ RIPT)114 G(PF)1I8 I\Sps:ioFf;03' R(PT)318 G(PF)118 ),I'SPsJOF;;04: R(PT)1 /2 G{PF)1/4 A~P33!1F" 'l Il1 NPT1 /8 10-32UNF ,~Sp430FNO,?

Compact Cylinder with Air Cushion and Lock Series RLQ

YA-03 Joint . YU-03 T1 B 2-D through 2-O counterbore (mm) Bore size (mm) B D E J M O Part No. 12 7 25 9 34 11.5 depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5 depth 8.5 YB-05 50, 63 Joint Weight (g) Bore size (mm) T1 RS T2 V W Part No.

AC Servo Motor Driver (Pulse input type/Positioning type ）

0 70 _ _ 4 0 17.6 _ _ 0 1 2250 _ _ 2 1 66 _ _ 4 1 16.5 _ _ 0 2 1125 _ _ 2 2 62 _ _ 4 2 15.6 _ _ 0 3 750 _ _ 2 3 59 _ _ 4 3 14.8 _ _ 0 4 562 _ _ 2 4 56 _ _ 4 4 14.1 _ _ 0 5 450 _ _ 2 5 53 _ _ 4 5 13.4 _ _ 0 6 375 _ _ 2 6 51 _ _ 4 6 12.8 _ _ 0 7 321 _ _ 2 7 48 _ _ 4 7 12.2 _ _ 0 8 281 _ _ 2 8 46 _ _ 4 8 11.7 _ _ 0 9 250 _ _ 2 9 45 _ _ 4 9 11.3 _ _ 0 A 225 _ _ 2 A 43 _ _ 4 A 10.8 _ _ 0 B 204

0.4

VQ 2 x Rc 3/4 1 2 3 4 5 6 7 8 n Stations D-side U-side VQ4 3(R) port 2 x Rc 1/2 4 x G 1/2 1(P) port VQ5 Conduit port SMC SMC SMC SMC SMC SMC SMC VQC 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 90 72 13 VQZ 55.5 42.7 43.5 20.5 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A SQ 33.5 12 11.5 15.7 2 x Rc 1/8 Pilot EXH port (6.5) 21.5 2 x Rc 1/8 VFS External pilot port 27 31 2n x Rc 1/4, 3/8, C8, C10, C12 Rc 1/

LEC-OM071xx

Panel Display and Sigma Win+TM.2-2 2.1 Panel Display.2-2 2.1.1 Status Display.2-2 2.1.2 Alarm and Warning Display.2-2 2.1.3 Hard Wire Base Block Display.2-2 2.1.4 Overtravel Display.2-2 2.2 Operation of SigmaWin+TM.2-3 2.2.1 Compatible Devices.2-3 2.2.2 Hardware requirements.2-3 2.2.3 Installing SigmaWin+ Program.2-3 2.2.4 Starting SigmaWin+TM.2-12 2.3 Utility Functions.2-15 2.4 Parameters

7.5

2!

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

Free Mount Cylinder

Seal kit includes @0, @1, @2.

MB

8 MB n (Same side) 2 (Different sides or Same side) 20 25 25 MB1 (n2) 2 (n2) 2 (n2) 2 25 + 55 n = 2, 4, 6, 8 20 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 n (Same side) D-A59W CA2 1 15 25 25 D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F 15 25 25 2 (Different sides or Same side) CS1 (n2) 2 (n2) 2 (n2) 2 15 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 n (Same side) C76 1 10 25

Plug-in/Plug Lead: Single Unit

b 3.4 3.4 3.4 Cv 2 position rubber seal VQ5 01 1 2 16 16 16 C [dm3/(sbar)] 0.33 0.33 0.33 4/2 5/3 (A/B EA/EB) b 4.4 4.4 4.4 Cv Note) For port size Rc 1/2 Manifold Option Blanking plate assembly VVQ5000-10A-5 Individual EXH spacer VVQ5000-R-5Individual SUP spacer VVQ5000-P-5-03 04 03 04 EXH block plate VVQ5000-16A-2 Throttle valve spacer VVQ5000-20A-5 SUP stop valve spacer VVQ5000-37A-5

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin