Cylinder with Lock Series CLS

(Different surfaces, Same surface), 1 pc. 10 85 90 80 D-M9V D-M9WV 10 + 30 (n2) 2 80 + 30 (n4) 2 85 + 30 (n4) 2 90 + 30 (n4) 2 n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) 2 pcs. (Different surfaces, Same surface), 1 pc. 20 115 120 D-M9AL 20 + 40 (n2) 2 115 + 40 (n2) 2 120 + 40 (n2) 2 n pcs. (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) (n = 2, 4, 6, 8) 2 pcs.

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

CLS

n = 2, 4, 6, 8 n 150 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(A) 2 (A) 2 2(A) 2(A) 3(R) (P)1 3(R) (P)1 i i 3 (R) 1 (P) 3 (R) 1 (P) u u Component Parts Replacement Parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No. No. 1 2 3 4 5 6 Description Note White White White Note Part no.

13

C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24

Cylinder with Lock Series CNS

BN BP BQ C D E EA F FA FD FT FX FY FZ G GA 125 140 160 to 1400 50 47 145 145 205 1/2 3/8 115 36 90 63 35 14 19 14 190 100 230 16 155 to 1400 50 47 161 160 245 1/2 3/8 128 36 90 63 35 14 19 20 212 112 255 16 180 to 1400 56 53 182 180 290 1/2 3/8 144 40 90 63 43 14 19 20 236 118 275 18.5 215 (mm) Bore size (mm) GB GL GR J K KA M MM N P Q S T V VA H ZZ 125 140 160 23 25 30 M14 x 1.5 15 31 19

Guide Cylinder Series MGG

82 17 182 M12 x 1.75 depth 28 1/2 110 40 262 143 128 66 410 79 64.5 19(23) 180(194) 40 85 23 188 M14 x 2 depth 30 DNote) Rc, NPT and G ports can be selected.

LVQ

Type of fitting Tubing size Symbol Nil 1 Symbol 03 04 05 06 07 06 08 10 07 11 Symbol 10 12 11 13 12 13 19 19 25 Tubing O.D. 1/8" (3) 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" Tubing O.D. 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1". 25 Applicable fitting LQ2 LQ1 Body class Applicable fitting Body class Applicable fitting 4 LQ1,LQ2 2 Body class LQ2 Symbol 2 3 4 5 6 LQ2 Applicable fitting Body class

KK/KK13

57.4 38.2 46.2 22 KK6P-03MS 11 R 3/8 76.0 44.7 41.5 48 19 1/2 -04MS R 1/2 31 53.7 44 52 22 13 106.2 -06MS R 3/4 94.4 45.5 55 27 Reference dimension for R threads after installation.

Digital Gap Checker

Lead wire color Description 1 Brown DC (+) 30.8 2 White N.C. 3 Blue DC () 4 Black OUT1 15 ISA-19-m (Centralized lead wire) 19 6 5 4 30.8 MADE IN JAPAN 3 2 1 15 23.5 33 70 108 43.5 146 5000 55 184 10 222 Unit: mm 260 10 Stations Part no. L L 2 ISA-19-2 139 3 ISA-19-3 177 4 ISA-19-4 215 5 ISA-19-5 253 6 ISA-19-6 291 M12 connector no. Pin no.

Cylinder with Lock Series MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PPS PTFE PFA N Pilot port thread type Symbol Nil 2 Body class 6 one-touch fitting M5 x 0.8 Tubing O.D. Body class 2 3 4 5 Tubing O.D. Symbol Metric sizes 06 10 12 19 6 10 12 19 Inch sizes 07 11 13 19 1/4 3/8 1/2 3/4 Variations LVD20-T Model LVD30-T LVD40-T LVD50-T Orifice diameter 4 8 10 16 Tubing O.D. Metric 6 10 12 19 Inch Valve type Type Symbol 1/4 3/8 1/2 3/4 Basic type N.C.

Metal Seal/Rubber Seal Series VQ Body Ported

Note 1) Note 2) 2-4-19 S VQ1000 Kit (Serial transmission unit) The serial transmission system reduces wiring work, while minimizing wiring and saving space.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

19 23 9.5 1.5 47.4 19.8 52.6 79 19.8 52.6 AS321F-03-10ST AS321F-N03-09ST 18.5 1.5 47.4 5/16" 15.2 29.5 41 NPT3/8 19 23 9.5 31.8 43.3 10 21 18.5 81 81 AS321F-03-12ST AS321F-N03-11ST 21 3/8" 17.9 31.8 43.3 32.8 44.3 12 22 20.9 83 141 AS421F-04-10ST AS421F-N04-11ST 21 3/8" 17.9 33.6 47.9 33.6 47.9 10 21 18.5 141 24 28.6 12 1.5 55.8 1/2" NPT1/2 23.8 21.7 28.6 12 35.2 49.5 1.5 55.8 R1/2 24.5 62.9

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

cable (5 m) Without cable Note 2) Note 2) Note 2) Note 2) 2 to 16 stations With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

cable (5 m) Without cable Note 2) Note 2) Note 2) Note 2) 2 to 16 stations With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

10

hole DIN terminal Conduit terminal S Q F Cable 6 to 12 Q2 S2 F D G1/2 (44) 31.5 32 25 Y T R E C R C G1/2 (1.5) (1.5) Y E B1 B A A B1 B 2 x P Port size 2 x P Port size U W M U W M 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole X (mm) Mounting bracket dimensions Port size P Size A B B1 C D E F M 12.8 19 19 U 46 56 56 W 36 46 46 X 11 13 13 Y 6 7 7 1 2 19 24 24 30 43 45 45 50 21 22.5 22.5

Electric Slide Tables

CLR Input Input 11 11 TL TL Input Load Load Output 12 12 TLOUT TLOUT Output Load Load Output 13 13 WAREA WAREA Output Load Load Output 14 14 BUSY BUSY Output Load Load Output 15 15 SETON SETON Output Load Load Output 16 16 INP INP Output Load Load Output 17 17 SVRE SVRE Output ESTOP Note 2) ESTOP Note 2) Load Load Output 18 18 Output ALARM Note 2) ALARM Note 2) Load Load Output 19 19 Output

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

173.3 17.5 19 20 21 22 23.5 18.5 19.5 20.5 21.5 23 18 19 20 21 22.5 23.5 18.5 19.5 20.5 22 23 18 16 Series SJ2000/3000 Dimensions: SJ3000 for Flat Ribbon Cable / PC Wiring SS5J3-60 D U (S, R, RS) 1 2 P J Stations (Pitch) P = 10 23.6 12.8 [External pilot spec.] 15.4 15.6 3/5 3/5 2 2 2 2 2 2 2 30.6 32.1 46.2 54.5 1 1 58.2 4 4 4 4 4 4 4 D D D M5 x 0.8 [4(A), 2(B) port] One-touch fitting [1(

HRX-OM-X084

17 Brown Blue 18 (CN1) 1/2 CB Red Brown 19 1A Circuit breaker PT1 White Blue 20 2A Circulating fluid outlet White Blue 21 3A 22 Blue (CN6) 1/3 Blue Brown 23 21 Blue 24 Brown 35 Black Black Black Black 25 Blue Blue 36 FL Flow rate sensor 26 Blue Blue Black 34 27 (CN5) 1/3 Brown Blue 28 White 1 1 1 2 1 3 3 1 2 4 6 7 5 Circulating fluid returnT1 8 9 White Blue (CN1) 2 2 (CN2) (CN6) 1/2 Brown