HRX-OM-Y098

Alarms that allow continuous pump operation are shown in Table 5.4-18 Alarms that allow continuous pump operation (1/2) and Table 5.4-19 Alarms that allow continuous pump operation (2/2).

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A 1 station 2 stations 3 stations 4 stations 1 () SOL.A 14 () SOL.A 2 () 1 SOL.A 14 15 () 2 SOL.A 15 3 () 3 4 5 6 7 8 9 10 11 12 13 5 stations 16 17 18 19 20 21 22 23 24 25 SOL.B 16 () SOL.A 4 () 6 stations SOL.B 17 () SOL.A 5 () 7 stations SOL.B 18 () SOL.A 6 () 8 stations SOL.B 19 () COM. 13 (+) Connector terminal no.

CJ2

2 !3 !

MHF2

MHF2-8D2 MHF2-8D1 MHF2-8D 2 pieces/unit MHF2-8D Seal kit 12, 20, 21 MHF-B08 MHF8-PS-2 MHF8-PS MHF8-PS 2 pieces/unit MHF2-8D1 Finger assembly 3, 4, 5, 6, 15, 17, 19 Mounting screw MHF-A0802-2 MHF-A0802-1 MHF-A0802 4 pieces/unit MHF2-8D2 The bolts for body through hole mounting are attached to the product.

HRL

2 Input External switch signal1 17 None Cannot be connected3 18 Common of contact output signal 6 Output 19 Contact output signal 2 Output Operation stop FLT alarm signal [N.C. type] (fix)2 20 Contact output signal 4 Output OFF1 21 None Cannot be connected3 22 Common of analog output signal 2 Output 23 Common of analog output signal 1 Output 24 None Cannot be connected3 25 None Cannot

CNG

(mounted on different sides) 2 pcs. (mounted on same side) 1 pc. 2 pcs. (mounted on different sides) 2 pcs. (mounted on same side) 1 pc.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

actuation Port size {2(A) port} (A) 2 N.C.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97 113 145 188 213 ZZ 109 109 119 129 145 177 220 245 13-/22-MXQ16L10 13-/22-MXQ16L20 13

PC Wiring System Series PCW

Refer to the page 58 for details. 4.5 5 5 Circuit Diagram PCW-EC08Z00 PCW-EC08Z01 2 4 6 8 10 12 14 20 16 18 Power supply terminal block Input/output connector (CS0) 1 3 5 7 9 11 13 15 17 19 14 8 4 2 6 20 16 18 10 12 Input/output connector (CS1) 13 1 3 5 7 9 11 19 15 17 Green Red Connection 1 1 1 1 1 1 1 1 2 2 2 3 4 3 4 CN2 CN3 2 2 2 3 4 CN5 2 2 1 3 3 3 4 CN4 3 4 3 4 CN6 24VDC 4 CN1 4 2 *S2

Cylinder with Lock Series CNG

(mounted on different sides) 2 pcs. (mounted on same side) 1 pc. 2 pcs. (mounted on different sides) 2 pcs. (mounted on same side) 1 pc.

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Guide Cylinder Series MGG

80 100 63 80 100 300mm or more 350 to 1100 308 107 54 86 108 192 30 72 14 29 Rc 1/4 119 M12 x 1.75 depth 23 16 400mm or more 350 to 1200 355 131 66 104 128 224 35 89 19 40 Rc 3/8 145 M12 x 1.75 depth 28 23 500mm or more 350 to 1300 410 131 66 128 143 262 40 110 19 40 Rc 1/2 145 23 M14 x 2 depth 30 18 Series MGG Dimensions Front mounting flange type/MGGF 20 to 50 M N Bracket (See table below

70astamb1

37 12.2 14.2 19 19 23 27 4 4 5 9 12 14 15 10.5 11.5 17 6-7-20

mb1

2 (2 pcs.), !3, !4, !6 NCA Specifications DSeal kit includes !2 to !4, !6. Order the seal kit, based on each bore size.

Square Tube Type Air Cylinder Series MB1

84 94 94 114 114 1/8 1/4 1/4 3/8 3/8 1/2 26.5 26.5 31 31 37.5 37.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 4 4 5 5 5 5 to 500 to 500 to 600 to 600 to 750 to 750 19.5 27 32 32 37 37 12.2 14.2 19 19 23 27 18

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

2 !2 !3 !3 !4 !4 !5 !5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

1/2 24 15.9 17.4 18.8 25.6 46.4 26.1 61.2 50.8 49.2 42.2 40.6 15.6 54 AS43l1F-U04-12A 12 18.5 21 26.2 48.3 28.3 63.4 17 56 11.2 12.9 16.6 20.2 36 21.4 50.1 VCHC 3/8 19 42.3 40.7 35.9 34.3 ASR ASQ Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation Inch Size [mm] Model d T Uni thread H D1 D2 D3 L1 L2 L3 L4 L5 Note 1) A Note 2) M Weight [g] Unlocked Locked

Speed Controller with Uni One-touch Fitting AS Series

19 32 33 33 34 36 54 55 57 54 55 57 94 96 14.5 5 32" 1 8 14.2 36.1 31.1 30.5 25.5 14.3 3 16" 16.5 17 18.5 14.5 16.5 17 18.5 21 17 18.5 21 17 18.5 21 21 22 12 1 4" 5 16" 5 32" 3 16" 17.2 17 1 4 1 4" 18.5 39.4 34.4 32.0 26.6 5 16" 3 8" 19 1 4" 1 4 45.9 40.9 38.1 33.1 23.0 19 20.3 5 16" 3 8" 1 4" 5 16" 19.4 45.0 40.0 37.6 32.6 19 3 8 23.0 3 8" 3 8" 1 2 18.6 24 22.4 54.6 47.1 44.5 37.0 1 2"

Vacuum Pad

2 1.5 2 1.5 8 8 8 3 3 9 8 5.2 2 4 1.8 7 6 3.4 2 2.2 Lateral 4.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.

AC

2.3 2.3 2.3 2.3 2.3 3.2 3.2 20.5 33.5 33.5 42.5 52.5 52.5 52.5 19 25 25 32.5 36 38 44 AR1000 AR2060 AR2560 AR3060 AR4060 AR4060-06 AR5060 AR6060 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4,1 1 SAC1000, #2 SAC2000, #2 SAC2503, #2 SAC2503, #2 SAC4000, #2 SAC4006, #2 SAC5000, #2 SAC6000, #2 AR1000 AR2060 AR2560 AR3060 AR4060 AR4060-06 AR5060 AR6060 1.5-35 Lubricator/Modular style AL1000